• 제목/요약/키워드: magnetic thin film

검색결과 612건 처리시간 0.025초

스퍼터링으로 경사증착한 $SiO_x$ 박막을 이용한 VA-LCD의 전기광학특성 (Electro-Optical Characteristic for VA-LCD on the $SiO_x$ Thin Film Layer Oblique Deposited by Sputtering Method)

  • 최성호;황정연;김성연;오병윤;명재민;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.451-452
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    • 2006
  • We studied the electro-optical characteristic of vertical alignment liquid crystal display(VA-LCD) on the $SiO_x$ thin film deposited $45^{\circ}$ oblique by rf magnetic sputtering system. LC alignment characteristic showed homeotropic alignment, and pretilt angle was about $90^{\circ}$. A uniform liquid crystal alignment effect on the $SiO_x$ thin film was achieved and the electro-optical characteristic of the $SiO_x$ thin film deposited $45^{\circ}$ oblique by rf magnetic sputtering system was excellent.

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CoCrMo/Cr 자성박막의 제조조건이 자기적성질에 미치는 영향 (The Effect of Sputtering Conditions on Magnetic Properties of CoCrMo/Cr Magnetic Thin Film)

  • 박정용;남인탁;홍양기
    • 한국자기학회지
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    • 제3권4호
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    • pp.320-324
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    • 1993
  • 스퍼터된 자기기록매체 Co-10at%Cr-2at%Mo/Cr 자성박막의 제조조건이 미세구조와 자기적특성에 미치는 영향을 조사하였다. 기판의 온도는 상온-$250^{\circ}C$로 하였으며 Cr하지층과 CoCrMo층의 두께는 각각 $1000-2500\AA$, $300-800\AA$이었다. CoCrMo층의 두께가 $500{\AA}-800{\AA}$ 증가함에 따라 결정립은 미세화 되었으며 균일한 조직을 나타냈다. 보자력은 기판의 온도, CoCrMo자성층, Cr하지층의 두께 를 증가시켰을때 향상되었다. 기판온도가 $250^{\circ}C$, 자성층의 두께가 $700\AA$, Cr 하지층의 두께가 $1000\AA$일때 880 Oe의 보자력을 나타냈다.

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Ba-페라이트/$SiO_2$ 자성박막에서 ${\alpha}-Al_2O_3$ buffer 층의 역할 (Role of ${\alpha}-Al_2O_3$ buffer layer in $Ba-ferrite/SiO$ magnetic thin films)

  • 조태식;정지욱;권호준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.267-270
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    • 2003
  • We have studied the interfacial diffusion phenomena and the role of ${\alpha}-Al_2O_3$ buffer layer as a diffusion barrier in the $Ba-ferrite/SiO_2$ magnetic thin films for high-density recording media. In the interface of amorphous Ba-ferrite ($1900-{\AA}-thick)/SiO_2$ thin film during annealing, the interfacial diffusion started to occur at ${\sim}700^{\circ}C$. As the annealing temperature increased up to $800^{\circ}C$, the interfacial diffusion abruptly proceeded resulting in the high interface roughness and the deterioration of the magnetic properties. In order to control the interfacial diffusion at the high temperature, we introduced ${\alpha}-Al_2O_3$ buffer layer ($110-{\AA}-thick$) in the interface of $Ba-ferrite/SiO_2$ thin film. During the annealing of $Ba-ferrite/{\alpha}-Al_2O_3/SiO_2$ thin film even at ${\sim}800^{\circ}C$, the interface was very smooth. The smooth interface of the film was also clearly shown by the cross-sectional FESEM. The magnetic properties, such as saturation magnetization 3nd intrinsic coercivity, were also enhanced, due to the inhibition of interfacial diffusion by the ${\alpha}-Al_2O_3$ buffer layer. Our study suggests that the ${\alpha}-Al_2O_3$ buffer layer act as a useful interfacial diffusion barrier in the $Ba-ferrite/SiO_2$ thin films.

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기판 부근의 자기장이 RF 스퍼터링법으로 증착된 ITO 박막의 특성에 미치는 영향 (Influence of Magnetic Field Near the Substrate on Characteristics of ITO Film Deposited by RF Sputtering Method)

  • 김현수;장호원;강종윤;김진상;윤석진;김창교
    • 한국전기전자재료학회논문지
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    • 제25권7호
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    • pp.563-568
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    • 2012
  • Indium tin oxide (ITO) films were prepared using radio frequency (RF) magnetron sputtering method, magnets were equipped near the target in the sputter to bring the plasma near the target. The effect of magnetic field that brings the plasma near the substrate was compared with that of substrate heating. The effect of substrate heating on the grain size of the ITO thin film was larger than that of the magnetic field. However, the grain size of the ITO thin film was larger when the magnetic field was applied near the substrate during the sputtering process than when the substrate was not heated and the magnetic field was not applied. If stronger magnetic field is applied near the substrate during sputtering, it can be expected that the ITO thin film with good electrical conductivity and high transparency is obtained at low substrate temperature. When magnetic field of 90 Gauss was applied near the substrate during sputtering, the mobility of the ITO thin film increased from 15.2 $cm^2/V.s$ to 23.3 $cm^2/V.s$, whereas the sheet resistivity decreased from 7.68 ${\Omega}{\cdot}cm$ to 5.11 ${\Omega}{\cdot}cm$.

Computer Simulation of Sensing Current Effects on the Magnetic and Magnetoresistance Properties of a Crossed Spin-Valve Read

  • Lim, S.H;Han, S.H;Shin, K.H;Kim, H.J
    • Journal of Magnetics
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    • 제5권2호
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    • pp.44-49
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    • 2000
  • Computer simulation of sensing current effects on the magnetic and magnetoresistance properties of a crossed spin-valve head is carried out. The spin-valve head has the following layer structure: Ta (8.0 nm)/NiMn (25 nm)/NiFe (2.5 nm)/Cu (3.0 nm)/NiFe (5.5 nm)/Ta (3.0 nm), and it is 1500 nm long and 600 nm wide. Even with a high pinning field of 300 Oe and a high hard-biased field of 50 Oe, the ideal crossed spin-valve structure, which is essential to the symmetry of the output signal and hence high density recording, is not realized mainly due to large interlayer magnetostatic interactions. This problem is solved by applying a suitable magnitude of sensing currents along the length direction generating magnetic fields in the width direction. The ideal spin-valve head is expected to show good symmetry of the output signal. This has not been shown explicitly in the present simulation, however, The reason for this is possibly related to the simple assumption used in this calculation that each magnetic layer consists of a single domain.

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Co-Cr(-Ta) 층의 결정성 및 자기적 특성에 미치는 하지층 효과 (Underlayer effects on crystallographic and magnetic characteristics of Co-Cr(-Ta) layer)

  • 금민종;공석현;가출현;손인환;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.208-211
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    • 2000
  • We prepared Co-Cr-Ta and Co-Cr-Ta/Ti thin film for perpendicular magnetic recording media by facing targets sputtering system (FTS system). Ti underlayer effects on crystallographic and magnetic characteristics of Co-Cr-Ta perpendicular magnetic recording media have been investigated. Crystallgraphic and magnetic characteristic of prepared thin films were evaluated by x-ray diffractometry(XRD), vibrating sample magnetometer(VSM) and kerr hysteresis loop measurement. The coercivity and anisotropy field increase by introduced Ti underlayer when substrate temperature is higher than 150$^{\circ}C$. The c-axis dispersion angle and grain size of Co-Cr-Ta/Ti thin film is decrease than Co-Cr-Ta when substrate temperature is higher than 100$^{\circ}C$. Consequently, the use of a Ti underlayer highly orientated can be improved crystallographic and magnetic characteristics of Co-Cr -Ta perpendicular media layer.

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Circularly polarized soft X-ray generation by Co/Pt thin film polarizer with perpendicular magnetic anisotropy

  • Lee, Sang-Hyuk;Huang, Lin;Lee, Jae-Woong;Kim, Namdong;Shin, Hyun-Joon;Jeong, Jong-Ryul;Hwang, Chanyong;Kim, Dong-Hyun
    • Current Applied Physics
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    • 제18권11호
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    • pp.1196-1200
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    • 2018
  • We have experimentally demonstrated circular polarization generation from linear polarized soft X-ray at synchrotron by adopting a thin magnetic film polarizer. Polarizer is composed of Co/Pt multilayer with a perpendicular magnetic anisotropy, which allows us to easily accommodate without needing any tilting angle into the measurement setup since the circular polarization is generated for the X-ray with normal incidence and transmission. Generated circular polarization is examined by observing magnetic domain features based on the X-ray magnetic circular dichroism, where~11% of circular component is estimated compared to the case of full circular polarization.

RF Characterizations of Patterned CoNbZr Magnetic Thin Film on Transmission Line

  • Kim, Ki-Hyeon
    • Journal of Magnetics
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    • 제11권3호
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    • pp.130-134
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    • 2006
  • The microwave power absorption for the patterned CoNbZr magnetic film has been investigated by coplanar waveguide method. The power absorption peaks of the patterned CoNbZr film (50 ${\mu}m$ ${\times}$ 2 mm ${\times}$ 2 ${\mu}m$), were observed at around 5.7 GHz. The observed resonance peak was in good agreement with calculated ferromagnetic resonance frequency including magnetic shape anisotropy effects. Compared with the coplanar waveguide without a magnetic film, the characteristic impedance of patterned film was shown to be increased. This resulted from the large increment of inductance up to 33 % without any significant changes of the capacitance.

퍼멀로이와 코네틱 박막의 연자성 특성 비교 (Comparison of Soft Magnetic Properties of Permalloy and Conetic Thin Films)

  • 최종구;황도근;이상석;이장로
    • 한국자기학회지
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    • 제19권4호
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    • pp.142-146
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    • 2009
  • 이온빔 증착법으로 제작한 코닝유리(Corning glass)/Ta(5 nm)/(Permalloy, Conetic)/Ta(5 nm) 박막에 대한 연자성의 특성에 대해 연구하였다. 퍼멀로이(Permalloy; NiFe)층과 코네틱(Conetic; NiFeCuMo)층을 증착하여 인가 자기장 방향에 용이축과 곤란축의 자기저항곡선으로부터 얻은 보자력과 포화자기장에 대해 각각 비교하였다. 두께가 10${\sim}$15 nm인 코네틱 박막의 표면저항값은 퍼멀로이 박막보다 2배 정도 높았으나 보자력과 포화자기장은 1/3배 정도 낮았으며, 자화율은 2${\sim}$3배 정도 높은 초연자성의 특성을 가졌다. 퍼멀로이 박막보다 연자성의 특성이 높은 코네틱 박막을 이용한 스핀밸브나 터널접합의 소자를 개발할 수 있는 가능성을 확인하였다.