Influence of Magnetic Field Near the Substrate on Characteristics of ITO Film Deposited by RF Sputtering Method
![]() |
Kim, Hyun-Soo
(Department of Electronics and Information Engineering, Soonchunhyang University)
Jang, Ho-Won (Korea Institute of Science and Technology, Electronic Materials Center) Kang, Jong-Yoon (Korea Institute of Science and Technology, Electronic Materials Center) Kim, Jin-Sang (Korea Institute of Science and Technology, Electronic Materials Center) Yoon, Suk-Jin (Korea Institute of Science and Technology, Electronic Materials Center) Kim, Chang-Kyo (Department of Electronics and Information Engineering, Soonchunhyang University) |
1 | S. R. Forrest, Nature, 428, 911 (2004). DOI ScienceOn |
2 | H. C. Lee, J. Y. Seo, Y. W. Choi, and D. W. Lee, Vacuum, 72, 269 (2004). |
3 | N. Basu, A. K. Batabyal, and A. K. Barua, J. Appl. Phys., 54, 6 (1983). |
4 | H. Sirringhaus, P. J. Brown, R. H. Friend, and M. M. Nielsen, Nature, 401, 685 (1999). DOI |
5 | J. S. Kim, R. H. Friend, and F. Cacialli, Appl. Phys. Lett., 74, 3084 (1999). DOI |
6 | S. Takaki, K. Matsumotoa, and K. Suzuki, Appl. Surf. Sci. 33/34, 919 (1988). DOI |
7 | K. L. Choppa, S. Major, and D. K. Pandya, Thin Solid Film 102, 1 (1983). DOI ScienceOn |
8 | K. K. Yee, Int, Met. Rev. 23, 19 (1978). DOI |
9 | K. H. Ro, W. Park, G. Choe, and J. C. Ahn, Kor. J. Mater. Res., 7, 21 (1997). |
10 | J. B. Park, J. Y. Hwang, D. S. Seo, S. K. Park, D. G. Moon, and J. I. Han, J. KIEEME, 16, 1115 (2003). |
11 | C. D. Dimitrakopoulous, S. Purushothaman, J. Kymissis, A. Calleari, and J. M. Show, Science, 283, 882 (1999). |
12 | K. Bradley, J. P. Gabriel, and G. Gruner, Nano Lett., 3, 1353 (2003). DOI |
![]() |