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http://dx.doi.org/10.4283/JKMS.2009.19.4.142

Comparison of Soft Magnetic Properties of Permalloy and Conetic Thin Films  

Choi, Jong-Gu (Dept. of Eastern-western Biomedical Engineering, Graduation, Sangji University)
Hwang, Do-Guwn (Dept. of Eastern-western Biomedical Engineering, Graduation, Sangji University)
Lee, Sang-Suk (Dept. of Eastern-western Biomedical Engineering, Graduation, Sangji University)
Rhee, Jang-Roh (Department of Physics, Sookmyung Women' University)
Abstract
The soft magnetic property for the Corning glass/Ta(5 nm)/[Conetic, Permalloy)/Ta(3 nm) prepared by the ion beam deposition sputtering was investigated. The coercivity and saturation magnetic field of conetic (NiFeCuMo) and permalloy (NiFe) layer with easy and hard direction along to the applying magnetic field during deposition was compared with each other. The surface resistance of conetic film with a thickness of 10 nm was 2 times lower than one of permalloy film. The coercivity and the magnetic susceptibility of conetic film decreased and increased 3 times to one of permalloy film, respectively. These results suggest that a highly sensitive GMR-SV or MTJ using conetic film can be possible to develop the bio-device.
Keywords
ion beam deposition (IBD) method; conetic thin film; permalloy thin film; coercivity; soft magnetic property; magnetic susceptibility;
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