• Composites Research
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• 제20권5호
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• pp.49-55
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• 2007

반도체 쿼츠 웨이퍼 다이싱용 블레이드는 마이크로/나노 디바이스와 부품을 제조하기 위해 고정밀도의 가공성을 요구한다. 따라서 균일한 마이크로/나노 선폭의 가공을 위해서는 블레이드의 제작 단계에서 균일한 두께와 밀도를 유지하는 것이 중요하다. 기존의 실리콘웨이퍼 가공을 위해서는 금속의 블레이드가 사용되고 있지만 쿼츠 웨이퍼 가공을 위해서는 고분자 복합재가 사용된다. 이러한 복합재는 가공성, 전기전도성, 그리고 적절한 강도와 연성 및 마모저항성이 있어야 한다. 그러나 기존의 건식성형 공정으로는 균일성을 유지하기 위해 많은 공정과 비용이 소비되고 있다. 본 연구에서는 도전성 나노 세라믹스 분말, 연마재 세라믹스 분말에 열경화성 수지, 전도성 고분자를 혼합한 복합재 분말을 습식성형 공정에 의해 제조, 평가하는 연구를 수행하였다. 먼저 복합재 분말을 액상과 혼합하여 블레이드를 제작하였으며, 액상의 종류, 액상 건조공정의 영향을 고찰하였다. 평가는 마이크로미터 측정기와 현미경을 이용하여 두께를 측정하였다. 두께편차와 기공률, 밀도, 경도, 등의 특성을 비교, 평가하였다. 그 결과 습식성형에 의해 블레이드의 두께편차를 감소시킬 수 있었으며, 경도 등의 특성을 향상시킬 수 있었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2001년도 추계학술대회 논문집
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• pp.305-308
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• 2001

Powder injection molding (PIM) uses the shaping advantage of injection molding but is applicable to metals and ceramics. This process combines a small quantity of polymer with an inorganic powder to form a feedstock that can be molded. After shaping, the polymeric binder is extracted and the powder is sintered often to near-theoretical densities. Accordingly, PIM delivers structural materials in a shaping technology previously restricted to polymers. The process overcomes the shape limitations of traditional powder compaction, the costs of machining, the productivity limits of isostatic pressing and slip casting, and the defect and tolerance limitations of casting. The 17-4 PH stainless steel powders with average diameter of $10{\mu}m$ were injection-molded into flat tensile specimens. Sintering of the compacts was carried out at the various temperatures ranging from 900 to $1350^{\circ}C$. Sintering behavior of the compacts and tensile properties of sintered specimens were investigated.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2000년도 춘계학술대회 논문집
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• pp.151-156
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• 2000

Ultra precision progressive die have used for above one million's lot size of production part. In the field of design and making tool for press working, the progressive die for sheet metal (STS 304, thickness : 0.5mm) is a specific division. In order to prevent the defects, the optimum design of the production part, strip layout, die design, die making and tryout etc. are necessary. They require analysis of many kinds of important factors, i.e. theory and practice of metal press working and its phenomena, die structure, machining condition for die making, die materials, heat treatment of die component, know-how and so on. In this study, we designed and constructed a progressive die of multi-stage and performed try out. Out of these processes the die development could be taken for advance. Especially the result of tryout and its analysis become the characteristics of this paper (part 1 and part 2) that nothing might be ever seen before such as this type of research method on all the processes. In the part 2 of this study we treated die making and tryout mostly.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.39-43
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• 1996

This paper described on the effect of residual stocks in internal grinding of tungsten carbide materials in order to improve the grinding efficiency as well as grinding accuracy. Though the fundamental investigation is carried out for tungsten carbide materials using electroplated diamond wheel, the residual stock after grinding process is effective to the grinding effciiency. The obtained results are as follows: (1) Under the depth of cut(t) is constant and decreasing the workpiece velocity(Vw), the resiudal stock after grinding is increased, but the difference is little less than the difference by table speed. (2) Increasing the wheel velocity, the residual stock after grinding is decreased. Therefore in order to minimize the residual stock, the wheel velocity should be increased as far as possible. (3) The surface foughness and out-of roundness increased with depth of cut and table speed, and decreased with wheel velocity, but it may as well adopt as much as polssible under the dimensional tolerance which is required for high efficiency grinding. (4) In order to remove residual stock, the spark-out grinding shoule be done, and it also can be improved about 20 .approx. 25% throughout spark-out grinding, and the number of optimal spark-out times were within 10 times.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2000년도 추계학술대회 논문집
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• pp.231-235
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• 2000

Precision progressive die have used for above ten thousand pieces of lot size production part. In the field of design and making tool for press working, the progressive die for sheet metal (SPC, thickness : 2mm) is a specific division. In order to prevent the defects, the optimum design of the U-bending production part, strip layout, die design, die making and tryout etc. are necessary. They require analysis of many kinds of important factors, i.e. theory and practice of metal pres working and its phenomena, die structure, machining condition for die making, die materials, heat treatment of die component, know-how and so on. In this study, we designed and constructed a progressive die of multi-stage and performed try out. Out of these processes the die development could be taken for advance. Especially the result of tryout and its analysis become the characteristics of this paper (part 1 and part 2) that nothing might be ever seen before such as this type of research method on all the processes. In the part 2 of this study we treated die making and tryout mostly.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.218-223
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• 2000

Ultra precision progressive die have used for above one million's lot size of production part. In the field of design and making tool for press working, the progressive die for sheet metal (STS 304, thickness : 0.5mm) is a specific division. In order to prevent the defects, the optimum design of the production part, strip layout, die design, die making and tryout etc. are necessary. They require analysis of many kinds of important factors, i.e. theory and practice of metal press working and its phenomena, die structure, machining condition for die making, die materials, heat treatment of die component, know-how and so on. In this study, we designed and constructed a progressive die of multi-stage and performed try out. Out of these processes the die development could be taken for advance. Especially the result of tryout and its analysis become the characteristics of this paper (part 1 and part 2) that nothing might be ever seen before such as this type of research method on all the processes. In the part 2 of this study we treated die making and tryout mostly.

• 한국정밀공학회지
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• 제23권2호
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• pp.146-153
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• 2006

Acceleration sensors have widely been used in the various fields of industry. In recent years, micromachining accelerometers have been developed and commercialized by the micromachining technique or MEMS technique. Typical structure of such sensors consist of a cantilever beam and a vibrating mass fabricated on Si wafers using etching. This study investigates the feasibility of powder blasting technique for microfabrication of sensor structures made of the pyrex glass alternating the existing Si based acceleration sensor. First, as preliminary experiment, effect of blasting pressure, mass flow rate of abrasive and no. of nozzle scanning on erosion depth of pyrex and soda lime glass is studied. Then the optimal blasting conditions are chosen for pyrex sensor. Structure dimensions of designed glass sensor are 2.9mm and 0.7mm for the cantilever beam length and width and 1.7mm for the side of square mass. Mask material is from aluminium sheet of 0.5mm in thickness. Machining results showed that tolerance errors of basic dimensions of glass sensor ranged from 3um in minimum to 20um in maximum. This results imply the powder blasting can be applied for micromachining of glass acceleration sensors alternating the exiting Si based sensors.

• Tribology and Lubricants
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• 제31권4호
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• pp.170-176
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• 2015

As a continuation of Part I, which developed a design formula of the minimum corner radius (R_min) for restraining tribological failures, Part II investigates design parameters such as material properties and contact force. As design examples, Al 7075-T651, SST 304 and HT-9 are chosen for the materials and 1, 10 and 100 kN are used for the forces. The results show that the difference in R_min decreases as either the elastic modulus increases or the contact force decreases. Given the same material and force, the permissible R_min decreases as the flat region increases and vice versa. Because the R_min values obtained from the examples are very small, the dimensions of the corner radius normally designed in engineering structures are regarded acceptable. The von Mises stress evaluated for a typical example, which is far below the yield strength, confirms this interpretation. Nevertheless, the present work can provide a design criterion as well as a guideline for quality control in the manufacturing of, in particular, contact corners, which has not been attempted before to the best of the author’s knowledge. In addition, this paper considers the problem of a step that may be formed in the contact contour by using a similar approach. The result shows that no size of the step is permissible.

• 한국기계가공학회지
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• 제18권11호
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• pp.109-114
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• 2019

Hydraulic pumps are widely used in fields such as machinery manufacturing, engineering and construction. Although the research on hydraulic engineering is mature, it is still necessary to examine various performance aspects in detail for specific applications. This paper will focus on the hydraulic pump used in special construction machinery that needs high temperature and high pressure resistance. It will analyze the theoretical design, structure and thermal characteristics of the pump system using the Fundamentals of Engineering (FE) method, and will measure the key tolerance parameters of the hydraulic pump to ensure the accuracy of the machining. Through this research, a good design method for the linear reciprocating type of hydraulic pump can be summarized.

• Design & Manufacturing
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• 제14권2호
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• pp.14-20
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• 2020

In OLED panel production process, it is necessary to cut a part of protective film as a preprocess for lighting inspection. The current method is to recognize only the fiducial mark of the cut-out panel. Bare Glass Cutting does not compensate for machining cumulative tolerances. Even though process defects still occur, it is necessary to develop technology to solve this problem because only the Align Mark of the panel that has already been cut is used as the reference point for alignment. There is a lot of defective lighting during panel lighting test because the correct protective film is not cut on the panel power and signal application pad position. In laser cutting process to remove the polarizing film / protective film / TSP film of OLED panel, laser processing is not performed immediately after the panel alignment based on the alignment mark only. Therefore, in this paper, we performed real time inspection which minimizes the mechanism tolerance by correcting the laser cutting path of the protective film in real time using Machine Vision. We have studied calibration algorithm of Vision Software coordinate system and real image coordinate system to minimize inspection resolution and position detection error and edge detection algorithm to accurately measure edge of panel.