• Title/Summary/Keyword: low-temperature oxide

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Characteristics of photo-thermal reduced Cu film using photographic flash light

  • Kim, Minha;Kim, Donguk;Hwang, Soohyun;Lee, Jaehyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.293.1-293.1
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    • 2016
  • Various materials including conductive, dielectric, and semi-conductive materials, constitute suitable candidates for printed electronics. Metal nanoparticles (e.g. Ag, Cu, Ni, Au) are typically used in conductive ink. However, easily oxidized metals, such as Cu, must be processed at low temperatures and as such, photonic sintering has gained significant attention as a new low-temperature processing method. This method is based on the principle of selective heating of a strongly absorbent film, without light-source-induced damage to the transparent substrate. However, Cu nanoparticles used in inks are susceptible to the growth of a native copper-oxide layer on their surface. Copper-oxide-nanoparticle ink subjected to a reduction mechanism has therefore been introduced in an attempt to achieve long-term stability and reliability. In this work, a flash-light sintering process was used for the reduction of an inkjet-printed Cu(II)O thin film to a Cu film. Using a photographic lighting instrument, the intensity of the light (or intense pulse light) was controlled by the charged power (Ws). The resulting changes in the structure, as well as the optical and electrical properties of the light-irradiated Cu(II)O films, were investigated. A Cu thin film was obtained from Cu(II)O via photo-thermal reduction at 2500 Ws. More importantly, at one shot of 3000 Ws, a low sheet resistance value ($0.2527{\Omega}/sq.$) and a high resistivity (${\sim}5.05-6.32{\times}10^{-8}{\Omega}m$), which was ~3.0-3.8 times that of bulk Cu was achieved for the ~200-250-nm-thick film.

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Characteristics of an 1.25 Gbps 850 nm Oxide VCSEL Transmitter Operating at Fixed Current over a Wide Temperature Range (넓은 온도 범위에서 고정 구동전류로 동작하는 1.25 Gbps 850 nm 산화형 VCSEL 송신기의 특성)

  • Kim, Tae-Ki;Kim, Tae-Yong;Kim, Sang-Bae;Kim, Sung-Han
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.12
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    • pp.43-53
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    • 2007
  • We have analyzed low current operation characteristics of a VCSEL transmitter operating at fixed Current over wide temperature range. Used 850 nm oxide VCSEL has low temperature dependence of the threshold current and $d^2I_{th}/dT^2$ is approximately $1.346\times10^{-4}mA/^{\circ}C^2$. We fixed on-current so that output power from the chip is 1 mW at $20^{\circ}C$ and investigated the turn-on, turn-off characteristics and eye-diagram of the 850 nm oxide VCSEL transmitter with varying ambient temperature and off-current. We measured rise time, fall time, extinction ratio and timing jitter by changing tile ambient temperature and off-current. With the fixed off-current of around $0.1\sim0.2mA$ lower than the lowest threshold current the transmitter successfully operated at 1.25 Gbps over a wide temperature range from $-20^{\circ}C$ to $80^{\circ}C$.

Numerical & Experimental Study For Burner of Low NOx Formation of Multi-Stage In a Combustor (연소기에서의 다단 저 NOx 버너의 수치 및 실험적 연구)

  • Choi, Yun-Ki;Kang, Kyung-Tae;Kim, Young-Mo
    • 한국연소학회:학술대회논문집
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    • 2003.12a
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    • pp.65-74
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    • 2003
  • Air pollution included Nitric Oxide(NOx) from heating boilers is increased by pursuing better life. Development of low NOx emission boiler is strongly needed. However commercial burner for heating boiler is also asked to be thermal efficient and low-cost manufactuable in addition to low NOx emission. Small space for combustor including burner is usually allowed. In this study, parametric study of compact low NOx burner for heating boiler was done using numerical analysis and experiments. Commerical computational fluid dynamic(CFD) program named CFX 5-6 was used for numerical analysis of low NOx burner using turbulent diffusion flame. Comparison of outlet NO and outlet temperature under various equivalence ratio and fuel flow rate was performed between experiment and numerical analysis.

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Effects of Ta addition in Co-sputtering Process for Ta-doped Indium Tin Oxide Thin Film Transistors

  • Park, Si-Nae;Son, Dae-Ho;Kim, Dae-Hwan;Gang, Jin-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.334-334
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    • 2012
  • Transparent oxide semiconductors have recently attracted much attention as channel layer materials due to advantageous electrical and optical characteristics such as high mobility, high stability, and good transparency. In addition, transparent oxide semiconductor can be fabricated at low temperature with a low production cost and it permits highly uniform devices such as large area displays. A variety of thin film transistors (TFTs) have been studied including ZnO, InZnO, and InGaZnO as the channel layer. Recently, there are many studies for substitution of Ga in InGaZnO TFTs due to their problem, such as stability of devices. In this work, new quaternary compound materials, tantalum-indium-tin oxide (TaInSnO) thin films were fabricated by using co-sputtering and used for the active channel layer in thin film transistors (TFTs). We deposited TaInSnO films in a mixed gas (O2+Ar) atmosphere by co-sputtering from Ta and ITO targets, respectively. The electric characteristics of TaInSnO TFTs and thin films were investigated according to the RF power applied to the $Ta_2O_5$ target. The addition of Ta elements could suppress the formation of oxygen vacancies because of the stronger oxidation tendency of Ta relative to that of In or Sn. Therefore the free carrier density decreased with increasing RF power of $Ta_2O_5$ in TaInSnO thin film. The optimized characteristics of TaInSnO TFT showed an on/off current ratio of $1.4{\times}108$, a threshold voltage of 2.91 V, a field-effect mobility of 2.37 cm2/Vs, and a subthreshold swing of 0.48 V/dec.

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Microstructure Evolution of 15Cr ODS Steel by a Simple Torsion Test (단순 전단변형에 의한 15Cr 산화물 분산강화 강의 미세조직 변화)

  • Jin, Hyun Ju;Kang, Suk Hoon;Kim, Tae Kyu
    • Journal of Powder Materials
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    • v.21 no.4
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    • pp.271-276
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    • 2014
  • 15Cr-1Mo base oxide dispersion strengthened (ODS) steel which is considered to be as a promising candidate for high- temperature components in nuclear fusion and fission systems because of its excellent high temperature strength, corrosion and radiation resistance was fabricated by using mechanical alloying, hot isostatic pressing and hot rolling. Torsion tests were performed at room temperature, leading to two different shear strain routes in the forward and reverse directions. In this study, microstructure evolution of the ODS steel during simple shearing was investigated. Fine grained microstructure and a cell structure of dislocation with low angle boundaries were characterized with shear strain in the shear deformed region by electron backscattered diffraction (EBSD). Grain refinement with shear strain resulted in an increase in hardness. After the forward-reverse torsion, the hardness value was measured to be higher than that of the forward torsion only with an identical shear strain amount, suggesting that new dislocation cell structures inside the grain were generated, thus resulting in a larger strengthening of the steel.

Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

  • Kang, Junyoung;Park, Hyeongsik;Yi, Junsin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.169-169
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    • 2016
  • In this paper, we report electrical, optical and structural properties of Al-doped zinc oxide (AZO) thin films deposited at different substrate temperatures and pressures. The films were prepared by radio frequency (RF) magnetron sputtering on glass substrates in argon (Ar) ambient. The X-ray diffraction analysis showed that the AZO films deposited at room temperature (RT) and 20 Pa were mostly oriented along a-axis with preferred orientation along (100) direction. There was an improvement in resistivity ($3.7{\times}10^{-3}{\Omega}-cm$) transmittance (95%) at constant substrate temperature (RT) and working pressure (20 Pa) using the Hall-effect measurement system and UV-vis spectroscopy, respectively. Our results have promising applications in low-cost transparent electronics, such as the thin-film solar cells and thin-film transistors due to favourable deposition conditions. Furthermore our film deposition method offers a procedure for preparing highly oriented (100) AZO films.

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Characteristics of CrOx Thin-films for High Precision Resistors (고정밀저항용 크롬산화박막의 특성)

  • Seo, Jeong-Hwan;Noh, Sang-Soo;Lee, Eung-Ahn;Kim, Kwang-ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.3
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    • pp.253-258
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    • 2005
  • This paper presents characteristics of CrOx thin-film, which were deposited on $Al_2$O$_3$ wafer by DC reactive magnetron sputtering in an argon-oxide atmosphere for high temperature applications. The present paper deals with a study of the technological characteristics of thin film resistors to provide a control in obtaining temperature coefficients of resistance of given value. The optimized condition of CrOx thin-film were thickness range of 2500 $\AA$ and annealing condition(350 $^{\circ}C$, 1 hr) in oxide partial pressure(3.5${\times}$10$^{-4}$ torr). Under optimum conditions, the CrOx thin-films is obtained a high resistivity, p=340 $\mu$Ωcm, a low temperature coefficient of resistance, TCR=-55 ppm/$^{\circ}C$. The CrOx thin films resistors which were fabricated in this paper had excellent characteristics as high precision resistors.

A study on the properties of transparent conductive ZnO:Al films on variaton substrate temperature (기판온도 변화에 따른 ZnO:Al 투명 전도막의 특성 변화)

  • Yang, J.S.;Seong, H.Y.;Keum, M.J.;Son, I.H.;Shin, S.K.;Kim, K.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.525-528
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    • 2001
  • ZnO:Al thin film can be used as a transparent conducting oxide(TCO) which has low electric resistivity and high optical transmittance for the front electrode of amorphous silicon solar cells and display devices. This study of electrical, crystallographic and optical properties of Al doped ZnO thin films prepared by Facing Targets Sputtering(FTS), where strong internal magnets were contained in target holders to confine the plasma between the targets, is described. Optimal transmittance and resistivity was obtained by controlling flow rate of $O_2$ gas and substrate temperature. When the $O_2$ gas rate of 0.3 and substrate temperature $200^{\circ}C$, ZnO:Al thin film had strongly oriented c-axis and lower resistivity( < $10^{-4}{\Omega}-cm$ ).

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The property of surface morphology of AZO films deposited at low temperature with post-annealing (저온증착 AZO 박막의 분위기 후열처리에 따른 표면 형상 특성)

  • Jeong, Yun-Hwan;Chen, Ho;Song, Min-Jong;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.417-418
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    • 2008
  • Transparent conductive oxide (TCO) are necessary as front electrode or anti-reflecting coating for increasing efficiency of LED and Photodiode. In this paper, aluminum-doped Zinc oxide films(AZO) were prepared by DC magnetron sputtering on glass(corning 1737) and Si substrate at temperature of $100^{\circ}C$ and then annealed at temperature of $400^{\circ}C$ for 1hr in Ar and vaccum. The AZO films were etched in diluted HCL (0.5 %) to examine the surface morphology properties. After annealing, Structural and electrical property were investigated. The c-axis orientation along (002) plane was enhanced and the electrical resistivity of the AZO film decreased from $1.1\times10^{-1}$ to $1.6\times10^{-2}{\Omega}cm$. We observed textured structure of AZO thin film etched for 2s.

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A study on the high temperature properties of CoNiCrAlY coating fabricated by HVOF and LPPS process (LPPS용사법과 HVOF 용사법으로 제조된 CoNiCrAlY 코팅의 고온물성에 관한 연구)

  • 강현욱;권현옥;송요승
    • Journal of the Korean institute of surface engineering
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    • v.34 no.2
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    • pp.161-168
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    • 2001
  • A Thermal Barrier Coating (TBC) can play an important role in protecting parts from harmful environments at high temperatures such as oxidation, corrosion, and wear in order to improve the efficiency of aircraft engines by lowering the surface temperature of the turbine blade. The TBC can increase the life span of the product and improve the operating properties. Therefore, in this study the mechanical and thermal properties of the TBC such as oxidation, fatigue and shock at high temperatures were evaluated. A samples of a bond coat (CoNiCrAlY) produced by the High Velocity Oxygen Fuel (HVOF) and Low Pressure Plasma Spray (LPPS) method were used. The thickness of the HVOF coating layer was approximately $450\mu\textrm{m}$ to 500$\mu\textrm{m}$ and the hardness number of the coating layer was between 350Hv and 400Hv. The thickness of the LPPS coating was about 350$\mu\textrm{m}$ to 400$\mu\textrm{m}$ and the hardness number of the coating was about 370Hv to 420Hv. The X-ray diffraction analysis showed that CoNiCrAlY coating layer of the HVOF and LPPS was composed of the $\beta$and ${\gamma}$phase. After the high temperature oxidation test, the oxide scale with about l0$\mu\textrm{m}$ to 20$\mu\textrm{m}$ thickness appeared at the coating surface on the Al-depleted zone was observed under the oxide scale layer.

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