• 제목/요약/키워드: low dielectric constant glass

검색결과 70건 처리시간 0.035초

$C_{x}F_{y}$ Polymer Film Deposition in rf and dc $C_{7}F_{16}$ Vapor Plasmas

  • Sakai, Y.;Akazawa, M.;Sakai, Yosuke;Sugawara, H.;Tabata, M.;Lungu, C.P.;Lungu, A.M.
    • Transactions on Electrical and Electronic Materials
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    • 제2권1호
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    • pp.1-6
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    • 2001
  • $C_{x}F_{y}$ polymer film was deposited in rf and dc Fluorinert vapor ($C_{7}F_{16}$) plasmas. In the plasma phase, the spatial distribution of optical emission spectra and the temporal concentration of decomposed species were monitored, and kinetics of the $C_{7}F_{16}$ decomposition process was discussed. Deposition of $C_{x}F_{y}$ film has been tried on substrates of stainless steel, glass, molybdenum and silicon wafers at room temperature in the vapor pressures of 40 and 100 Pa. The films deposited in the rf plasma showed excellent electrical properties as an insulator for multi-layered interconnection of deep-submicron LSI, i.e. the low dielectric constant ∼2.0, the dielectric strength ∼2 MV/cm and the high deposition rate ∼100nm/min at 100W input power.

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K2O-CaO-P2O5계 유리-BNT(BaO-Nd2O3-TiO2)계 세라믹 복합체의 소결 및 유전특성 (Sintering and Dielectric Properties of K2O-CaO-P2O5 Glasses-BNT(BaO-Nd2O3-TiO2) Ceramic Composites)

  • 오영석;이용수;강원호;정병해;김형순
    • 한국세라믹학회지
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    • 제40권10호
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    • pp.954-960
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    • 2003
  • 본 연구에서는 모바일 폰 안테나 모듈용 유전체 재료를 개발을 위해 20∼80의 유전율을 가지는 유리-세라믹스 복합체를 제조하고자 하였다. BaO-Nd$_2$O$_3$-TiO$_2$계 세라믹스에 $K_2$O-CaO-P$_2$O$_{5}$계 글래스 프릿의 첨가를 통해 제조된 글래스-세라믹스 복합체의 소결특성과 유전특성을 조사하였다. BaO-Nd$_2$O$_3$-TiO$_2$계 세라믹스에 글래스 프릿을 10∼40 wt% 범위로 첨가하였고, 900∼120$0^{\circ}C$의 온도범위에서 소결하였다. 그 결과로서, $K_2$O-CaO-P$_2$O$_{5}$계 글래스 프릿의 첨가량이 증가하고 소결온도가 증가할수록 소결수축률과 상대밀도가 증가하였다. 또한 유전율($\varepsilon$$_{r}$)과 품질계수(Q${\times}$f)는 감소하는 경향을 나타내었다.

Tape Casting에 의한 fluormica계 제조 및 특성 저온 소결 기판의 제조 및 특성 (Fabrication and Characteristics of Low Temperature Firing Substrate by Tape Casting in Fluormica System)

  • 박대현;최정헌;강원호;김병익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.673-676
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    • 1999
  • We fabricated green sheet by tape casting method with fluormica glass-ceramic powders for fabrication of low temperature co-firing substrate. After ball milling with organic additives, we investigated green strength and density of green sheets which were casted by doctor blade machine. Green sheets were sintered at 700 ~ 1,00$0^{\circ}C$ for 1 ~3hrs. Microstructure, linear shrinkage and dielectric constant of substrates were surveyed.

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저온소결형 (1-x)$ZnNb_2$$O_6$-$xPb_5$$Nb_4$$O_{15}$계 세라믹스의 유전특성과 미세구조에 관한 연구 (A Study on Microwave Dielectric Properties of Low-temperature Sintered (1-x) $ZnNb_2$$O_6$-$xPb_5$$Nb_4$$O_{15}$ and Microstructure)

  • 김현학;김경용;김병호
    • 한국전기전자재료학회논문지
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    • 제13권11호
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    • pp.926-931
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    • 2000
  • The microwave dielectric properties and the microstructures as a mole fraction of (1-x)ZnNb$_2$O$_{6}$-xPb$_{5}$Nb$_4$O$_{15}$ ceramics with CuV$_2$O$_{6}$, Sb$_2$O$_3$ and glass(ZNPN ceramics) was investigated. 0.98ZN-0.02PN ceramics containing 1.5 wt% CuV$_2$O$_{6}$ 1.0 wt% Sb$_2$O$_3$ and 1.0 wt% glass had a dielectric constant($\varepsilon$$_{r}$) of 23, Qxf$_{o}$ value of 15000 and TCF(Temperature Coefficient of resonance Frequency) of -25 ppm/$^{\circ}C$ and it is possible to be co-fired with Ag electrode at 90$0^{\circ}C$. As sintered temperature increases over 90$0^{\circ}C$ the grain size of ZNPN ceramics was increasing for growth and it has poor co-fired properties with Ag electrode.e.ctrode.e.e.

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Glass 함유 BaTiO3 유전체의 전기 및 기계적 특성 (Electrical and Mechanical Properties of Glass reacted BaTiO3 based Dielectrics)

  • 구자권
    • 마이크로전자및패키징학회지
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    • 제2권1호
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    • pp.29-34
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    • 1995
  • Glass 물질을 첨가하여 저온소결한(Ba, Sr, Ca) TiO3 세라믹 유전체의 전기 및 기계 적 특성을 조사하였다. PbO-ZnO-B2O3 계 glass를 첨가하여 소결온도를 135$0^{\circ}C$ to 105$0^{\circ}C$ With 4wt% of glass material the sintered specimen at 115$0^{\circ}C$ for 2hrs showed a dielectric constant over 8000 with low dissipation factor. As fired ceramic capacitor satisfied the Z5U( +10~ +85$^{\circ}C$; +22% ~-56%) specifications of the EIAs. The mechanical hardness and toughness of glass reacted ceramics slightly decreased but it hows higher hardness and toughness values than Lead perovskite dielectrics.

저온 소결성 세라믹 기판재료 (Low Temperature Firing Ceramic Substrates for IC Package)

  • 김정돈;손용배;주기태;장성도
    • 한국세라믹학회지
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    • 제29권2호
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    • pp.83-88
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    • 1992
  • New ceramic substrates firable at low temperature (<1000$^{\circ}C$) were prepared with mixture of alumina and glass powders in CaO-Al2O3-SiO2 system. The substrate of alumina 40 wt% and glass 60 wt%, which was fired between 900∼1000$^{\circ}C$, shows low dielectric constant (5∼8 at 1 MHz), specific gravity of 3.10, relatively low thermal expansion coefficient (5.5${\times}$10-6/$^{\circ}C$ at 40∼500$^{\circ}C$) and excellent surface roughness (0.4∼0.5 ${\mu}$Ra). These properties were thought to be superior to those of conventional Al2O3 ceramic substrates.

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(Ba$_{0.5}$Pb$_{0.5}$)Nd$_2$Ti$_5$O$_14$ 마이크로파 유전체의 저온소결과 마이크로파 특성 (Low-temperature Sintering and Microwave Properties in (Ba$_{0.5}$Pb$_{0.5}$)Nd$_2$Ti$_5$O$_14$ Ceramics)

  • 박재환;박재관
    • 마이크로전자및패키징학회지
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    • 제8권2호
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    • pp.9-13
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    • 2001
  • $(Ba_{0.5}Pb_{0.5})Nd_2Ti_5O_{14}$(마이크로파 유전체 세라믹스에 borosilicate계 유리를 첨가하여 저온소결 특성과 마이크로파 특성을 조사하였다. Borosilicate계 유리가 2~3 wt% 첨가된 경우 $950^{\circ}C$의 소결 온도에서 소결성이 향상됨과 동시에 품질계수도 놀아지는 것을 확인할 수 있었다. BPNT에 3 wt%의 유리를 첨가함으로써 $950^{\circ}C$에서 유전율은 90에서 75 정도로 약간의 감소를 보였으나 마이크로파 품질계수 (Q$\times$f)는 4500 정도로 잘 유지되었고 공진주파수의 온도계수도 +10 $ppm/^{\circ}C$로서 잘 유지되는 결과를 나타내었다.

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Effect of $Al_{2}O_{3}$ filler addition on sintering behavior of low-firing $BaO-B_{2}O_{3}-ZnO$ glass ceramic system

  • Kim, Young-Nam;Kim, Byung-Sook;Lee, Joon-Hyung;Kim, Jeong-Joo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.814-817
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    • 2003
  • The sintering behavior of $BaO-B_{2}O_{3}-ZnO$, which is Pb-free glass-ceramic system, was examined as functions of the composition and the amount and particle size of $Al_{2}O_{3}$ filler. Different kinds of modifiers were added and $Al_{2}O_{3}$ fillers with different particle sizes ($1.5{\mu}m$ and $4.5{\mu}m$) were added. The glass frit-filler composites were sintered in the temperature range $520{\sim}580^{\circ}C$. X-ray diffraction results revealed that some of the composites crystallized during sintering. Dielectric constant and thermal expansion coefficient the glass-ceramics were analyzed.

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일방향 유리섬유/에폭시 복합재료의 유전성질 예측을 위한 혼합법칙 (Binary Mixture Rule for Predicting the Dielectric Properties of Unidirectional E-glass/Epoxy Composite Materials)

  • 진우석;이대길
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2004년도 추계학술발표대회 논문집
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    • pp.175-179
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    • 2004
  • Since the electromagnetic properties of fiber reinforced polymeric composites can be tailored effectively by adding small amount of electromagnetic powders to the matrix of composites, they are plausible materials for fabricating the radar absorbing structures (RAS) of desired performance. In order to design the effective electromagnetic wave (EM) absorber with the fiber reinforced polymeric composites, the electromagnetic characteristics with respect to the constituents of the composite should be available in the target frequency band. In order to describe the dielectric behavior of low loss unidirectional fiber reinforced composite, theoretical models and mixture equations for estimating its dielectric constant were proposed with respect to the fiber, matrix volume fractions and fiber orientations, and verified by the experiments. From the investigation, it was found that the suggested binary mixture rules agreed well with the experimental results.

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Low-k and High Reflectance Material as a Filler for Flat Panel Display Devices

  • Lee, Jung-Ki;Kim, Jin-Ho;Sung, Woo-Kyung;Hwang, Seong-Jin;Kim, Hyung-Sun
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1580-1582
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    • 2007
  • The composites were fabricated with titania used commercially and calcite as a filler in BZB glass matrix and their thermal, optical and electrical properties were investigated. From our results, calcite may be the profitable and highly efficient reflectance material as a filler for flat panel display devices.

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