• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.10
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• pp.499-503
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• 2006

This paper deals with a new two dimensional clinometer based on dual axis micromachined accelerometers. The clinometer is a small and low-cost product, which is mainly developed to help golfers read easily the tilt of a putting green. First, this paper proposes the principle of two dimensional clinometer and also a calibration method with respect to the offset voltage and sensitivity of a accelerometer. Experimental results on the developed clinometer show that the proposed clinometer can provide useful information on the tilt angle and direction of an inclined plane.

• International Journal of Aeronautical and Space Sciences
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• v.18 no.3
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• pp.555-564
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• 2017

In this paper, a new technique for attitude and heading reference system (AHRS) using low-cost MEMS sensors of the gyroscope, accelerometer, and magnetometer is addressed particularly in vibration environments. The motion of MEMS sensors interact with the scale factor and cross-coupling errors to produce random errors by the harsh environment. A new adaptive attitude estimation algorithm based on the Kalman filter is developed to overcome these undesirable side effects by analyzing windowed measurement error covariance. The key idea is that performance degradation of accelerometers, for example, due to linear vibrations can be reduced by the proposed measurement error covariance analysis. The computed error covariance is utilized to the measurement covariance of Kalman filters adaptively. Finally, the proposed approach is verified by using numerical simulations and experiments in an acceleration phase and/or vibrating environments.

• IEIE Transactions on Smart Processing and Computing
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• v.6 no.1
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• pp.1-9
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• 2017

This paper proposes to improve the performance of a strap down inertial navigation system using a foot-mounted low-cost inertial measurement unit/magnetometer by configuring an attitude and heading reference system. To track position accurately and for attitude estimations, considering different dynamic constraints, magnetic measurement and a zero velocity update technique is used. A conventional strap down method based on integrating angular rate to determine attitude will inevitably induce long-term drift, while magnetometers are subject to short-term orientation errors. To eliminate this accumulative error, and thus, use the navigation system for a long-duration mission, a hybrid configuration by integrating a miniature micro electromechanical system (MEMS)-based attitude and heading detector with the conventional navigation system is proposed in this paper. The attitude and heading detector is composed of three-axis MEMS accelerometers and three-axis MEMS magnetometers. With an absolute algorithm based on gravity and Earth's magnetic field, rather than an integral algorithm, the attitude detector can obtain an absolute attitude and heading estimation without drift errors, so it can be used to adjust the attitude and orientation of the strap down system. Finally, we verify (by both formula analysis and from test results) that the accumulative errors are effectively eliminated via this hybrid scheme.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.12
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• pp.2217-2220
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• 2007

In this paper, we propose a new wafer level package (WLP) for the RF MEMS applications. The Film Bulk Acoustic Resonator (FBAR) are fabricated and hermetically packaged in a new wafer level packaging process. With the use of Au-Sn eutectic bonding method, we bonded glass cap and FBAR device wafer which has groove-shaped via formed in the backside. The device wafer includes a electrical bonding pad and groove-shaped via for connecting to the external bonding pad on the device wafer backside and a peripheral pad placed around the perimeter of the device for bonding the glass wafer and device wafer. The glass cap prevents the device from being exposed and ensures excellent mechanical and environmental protection. The frequency characteristics show that the change of bandwidth and frequency shift before and after bonding is less than 0.5 MHz. Two packaged devices, Tx and Rx filters, are attached to a printed circuit board, wire bonded, and encapsulated in plastic to form the duplexer. We have designed and built a low-cost, high performance, duplexer based on the FBARs and presented the results of performance and reliability test.

• Spatial Information Research
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• v.19 no.4
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• pp.73-79
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• 2011

With the recent increase in demand for geo-registered imagery, Mobile Mapping Systems(MMS), which can quickly construct geographic information, has become important. The main part of MMS is the high-precision observation system, which collects geographic information at a certain speed. MMS has a complex data generation process and requires a standard-specific vehicle for its use, limiting its application range. In this paper, lightweight MMS is proposed to overcome its complexity by replacing the time synchronizer with a high-speed camera and by stabilizing motion with MEMS IMU/GPS. The proposed low-cost, portable method is expected to produce of geo-registered imagery efficiently.

• Korean Journal of Optics and Photonics
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• v.13 no.4
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• pp.289-294
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• 2002

We propose optical true time-delays (TTDs) for phased-array antennas (PAAs) composed of 2${\times}$2 MEMS switches and fiber delay lines, and implement a TTD which shows a maximum scan angle of $120^{o}$ with $30^{o}$ resolution. Since this structure uses only one fixed wavelength laser diode, it provides several advantages such as easy control, high speed operation, and low cost compared with those of the optical TTDs using tunable laser sources. We design a four element linear PAA using the proposed TTDs at 10 ㎓. Simulation results show that the maximum gain is 11.6 dB at the radiation angle $0^{o}$, 11.2 dB at $\pm$$30^{o}$, and 10.6 dB at $\pm$$60^{o}$.

• International Journal of Ocean System Engineering
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• v.2 no.4
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• pp.223-232
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• 2012

For the accurate estimation of the position and orientation of a UUV (unmanned underwater vehicle), a low-cost AHRS (attitude heading reference system) was developed using a low-cost IMU (inertial measurement unit) sensor which provides information on the 3D acceleration, 3D turning rate and 3D earth-magnetic field data in the object coordinate system. The main hardware system is composed of an IMU sensor (ADIS16405) and TMS320F28335, which is coded with an extended kalman filter algorithm with a 50-Hz sampling frequency. Through an experimental gimbal device, good estimation performance for the pitch, roll, and yaw angles of the developed AHRS was verified by comparing to those of a commercial AHRS called the MTi system. The experimental results are here presented and analyzed.

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.218-219
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• 2002

Recently, RF lumped-element devices are demanded strongly in application of hand-held mobile communication equipments. Many workers have been reported RF integrated inductor as well as air cores. In order to achieve the high Q value, they removed backside of substrate by micro machining process [1] and also another MEMS-like approach such as levitated structure [2]. These approaches are capable of suppressing the parasitic effects, but low reproducibility and high cost problems remain. (omitted)

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1619-1620
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• 2006

This paper deals with a new two dimensional clinometer based on dual axis micromachined accelerometers. The clinometer is a small and low-cost product, which is mainly developed to help golfers read easily the tilt of a putting green. First, this paper proposes the principle of two dimensional clinometer and also a calibration method to improve accuracy with respect to the offset voltage and sensitivity of a accelerometer. Experimental results show that the proposed clinometer can provide useful information on the tilt of an inclined plane.

• Particle and aerosol research
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• v.5 no.3
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• pp.95-109
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• 2009

A low temperature plasma process has been widely used for semiconductor fabrication and can also be applied for the preparation of solar cell, MEMS or NEMS, but they are notorious in the point of particle contamination. The nano-sized particles can be generated in the low temperature plasma process and they can induce several serious defects on the performance and quality of microelectronic devices and also on the cost of final products. For the preparation of high quality thin films of high efficiency by the low temperature plasma process, it is desirable to increase the deposition rate of thin films with reducing the particle contamination in the plasmas. In this paper, we introduced the studies on the generation and growth of nanoparticles in the low temperature plasmas and tried to introduce the recent interesting studies on nanoparticle generation in the plasma reactors.