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$SiO_2$ 식각을 위한 판형 Low Angle forward Reflected Neutral Beam 식각장치에 관한 연구

  • 정승재;이도행;염근영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2003년도 춘계학술발표회 초록집
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    • pp.56-56
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    • 2003
  • 플라즈마 식각에서 물리적 손상과 전기적 손상은 차세대 Nanoscale 소자와 Deep - Submicron 반도체공정에서 해결되어야 할 가장 큰 문제 중 하나이다. 이 중 전기적인 손상을 줄이기 위한 몇 가지 무손상 공정이 제시되고 있으며, 그러한 기술 중의 하나가 이온빔의 Low Angle Forward Reflection을 이용한 식각방법이다. Low Angle Forward Reflection방법은 이온소오스로부터 발생시킨 이온을 Low Angle 에서 Reflection-시켜 이온빔을 중성화되도록 하는 방법으로, 이전 연구를 통해 Reflection시 입사각이 5도일 경우 대부분의 이온들이 중성화되는 결과를 얻었다. 또한, 실험에 사용된 $SF_6,{\;}NF_3,{\;}CF_4$와 같은 모든 가스종에서 유사한 값의 중성화 정도를 관찰할 수 있었으며, 이러한 가스를 이용하여 $Si0_2$ 식각시 Vertical한 Profile 결과를 얻었다. 본 연구에서는 기존 Grid 장치에서 이온소오스 부분에 Low Angle Forward Reflected Neutral Beam을 위한 판형 Reflector를 부착하였으며, 이에 따라 중성빔의 Flux가 크게 향상되며 Beam의 직진성을 향상시킬 수 있었다. 또한, F계열 가스를 이용한 실험을 통해 $Si0_2$ 식각율과 식각특성 면에서 향상된 실험결과를 얻을 수 있었다.

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Evaluation of skeletal maturity in the cervical vertebrae and hand-wrist in relation to vertical facial types

  • Lee, Ye-Seul;Choi, Sung-Hwan;Kim, Kyung-Ho;Hwang, Chung-Ju
    • 대한치과교정학회지
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    • 제49권5호
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    • pp.319-325
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    • 2019
  • Objective: To evaluate differences in skeletal maturity in relation to vertical facial types and to compare differences in the skeletal maturity of the cervical vertebrae and hand-wrist in females. Methods: This study included 59 females aged 7 to 9 years with skeletal Class I malocclusion. The participants were categorized into three groups (low, normal, and high) according to the mandibular plane angle. Skeletal maturity was measured using skeletal maturity indicators (SMIs) and the Tanner-Whitehouse III (TW3) method on hand-wrist radiographs and by using cervical vertebrae maturation indicators (CVMIs) on lateral cephalometric radiographs. Results: The SMI was higher in the high-angle group than in the low-angle group (p = 0.014). The median TW3 bone age was 11.4 months higher in the high-angle group than in the low-angle group (p = 0.032). There was no significant difference in CVMI among the three groups. Skeletal maturity showed a weakly positive correlation with the mandibular plane angle (SMI, r = 0.391; TW3, r = 0.333; CVMI, r = 0.259). Conclusions: The skeletal maturity of the hand-wrist in females with a high mandibular plane angle was higher than that in females with a low mandibular plane angle. Obtaining additional hand-wrist radiographs may facilitate evaluation of skeletal maturity of females. In females with a high mandibular angle, the time to commence orthodontic treatment may be earlier than that in females with a low mandibular angle.

Effects of the Instrument Pilates Exercise Based on the Schroth Exercise on the Cobb's Angle, Angle of Trunk Rotation and Low Back Pain in Patients with Idiopathic Scoliosis: A Single Subject Study

  • Song, Ki Yeon;Baek, Ki Hyun;Lim, Mi Soo;Lim, Hyoung-won
    • The Journal of Korean Physical Therapy
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    • 제33권2호
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    • pp.97-105
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    • 2021
  • Purpose: This study examined the effects of the application of Schroth exercise-based instrument Pilates exercise on the Cobb's angle, angle of trunk rotation, and low back pain of female patients with idiopathic scoliosis. Methods: Three patients with idiopathic scoliosis at a Cobb's angle of 20° or more participated in this study. Among the single-subject experimental research designs, a reversal (ABA) design was performed. In particular, Schroth exercise-based instrument, Pilates exercise, was performed for 10 weeks, consisting of five weeks between the baseline and intervention one period and five weeks between the intervention 1 and intervention 2 periods, and then followed up for five weeks. Results: After the Schroth exercise-based instrument, Pilates exercise, was applied, the Cobb's angle and the angle of trunk rotation decreased compared to the baseline in all subjects, and the follow-up period also showed a continuous decline. After Pilates exercise was performed, low back pain in subjects 1 and 2 was decreased in the intervention 1 period compared to the baseline. The level of low back pain in the intervention 2 period increased compared to the intervention 1 period, but a reduction was noted in the follow-up period. The low back pain in the subject was decreased in all intervention periods and the follow-up period. Conclusion: Schroth exercise-based Pilates exercise improves the Cobb's angle and the angle of trunk rotation for female patients with idiopathic scoliosis in their teens and 20s, and an effective intervention method is proposed for low back pain.

성장에 따른 중학생 척추측만증 이행양상 (Scoliosis Progression according to the Growth of Middle School Students)

  • 김죽향;김은주
    • 지역사회간호학회지
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    • 제14권3호
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    • pp.479-487
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    • 2003
  • Purpose: This study was conducted to investigate the progression of Cobb's angle of middle school students according to the Risser grade changes during a one-year follow up period, and to identify the prevalence rate and related factors regarding scoliosis. Method: A total of 2,124 middle school students were preliminarily screened by the Adam's forward bending test. Among them, 21 adolescents diagnosed with scoliosis (above 5Cobb's angle) by X-Raying were the subjects and followed up for checking Cobb's angle and the Risser grade for one year. Results: The overall prevalence of scoliosis in middle school students was 2.13% and the prevalence in girls was higher than in boys. The Cobb's angle was significantly high in seniors and girls. The cases in low angle and low Risser grade demonstrated significant changes in progressive Cobb's angle compared to the cases in high angle and high Risser grade after one-year. But gender and pattern of curvature were not significantly different from the changes scoliosis angle after one-year. Conclusion: Based on these study results, juniors in low Risser grade were inclined to aggravate scoliosis despite the low degree of curvature at the first measurement.

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Loss Analysis by Impeller Blade Angle in the S-Curve Region of Low Specific Speed Pump Turbine

  • Ujjwal Shrestha;Young-Do Choi
    • 신재생에너지
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    • 제20권2호
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    • pp.35-43
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    • 2024
  • A pump turbine is a technically matured option for energy production and storage systems. At the off-design operating range, the pump turbine succumbed to flow instabilities, which correlated with the pump turbine geometry. A low specific speed pump turbine was designed and modified according to the impeller blade angle. Reynolds-Average Navier-Stokes is carried out with a shear stress transport turbulence model to evaluate the detailed flow characteristics in the pump turbine. The impeller blade inlet angle (𝛽1) and outlet angle (𝛽2) are used to evaluate hydraulic loss in the pump turbine. When 𝛽1 changed from low to high value, the maximum efficiency is increased by 4.75% in turbine mode. The S-Curve inclination is reduced by 8% and 42% for changes in 𝛽1 and 𝛽2 from low to high values, respectively. At α = 21°, the shock loss coefficient (𝜁s) is reduced by 16% and 19% with increases of 𝛽1 and 𝛽2 from low to high values, respectively. When 𝛽1 and 𝛽2 values increased from low to high, the impeller friction coefficient (𝜁f) increased and decreased by 20% and 8%, respectively. Hence, the high 𝛽2 effectively reduced the loss coefficient and S-Curve inclination.

밀링가공에서 부등각 엔드밀의 절삭특성 평가 (An Evaluation on Cutting Characteristics in Milling Process with Different Helix Angle Endmills)

  • 이상복;김원일;왕덕현;김실경
    • 한국공작기계학회논문집
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    • 제12권6호
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    • pp.1-7
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    • 2003
  • The experimental research was conducted to find an end mill with an ideal helix angle, which has a superior anti-vibration effect and a low machining tolerance. A conventional endmill which all low blades are $30^{\circ}$ helix angles and a different helix angle endmill which the opposite two blades are $30^{\circ}$ and the other opposites are different helix angles were studied. The cutting farce, machining tolerance and surface roughness were obtained. The AE signals appeared to have low values in up-milling rather than in down-milling. These are also appeared to have low values at low spindle revolutions rates. The cutting force values of Fxy and Fxyz were found to be increased according to the value of helix angle. In up-milling, it was difficult to find a definite tendency in machining tolerance, but in down-milling machining tolerance of the different helix angle end mill was found to be lower than that of the convention end mill. There is a definite tendency that the surface roughness gets better as the RPM increases. In down-milling, Type A($25^{\circ}$$30^{\circ}$) appeared to bring the most satisfactory result.

테이핑 요법으로 호전된 요통환자의 요추전만도 변화 1례 (Change of Lumbar Lordotic angle by Taping Therapy on Low Back Pain Patient with Lumbar Hyperlordosis ; A Case Report)

  • 윤유석;이종수;문상현
    • 대한추나의학회지
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    • 제4권1호
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    • pp.157-165
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    • 2003
  • Low back pain (LBP) is a significant in today's society, with lifetime include factors associated with LBP ar reporter. Among the causes, aberration of posture may play a role in the development of LBP. Many investigators have assessed the curvature of spine in standing posture. But LBP is associated with Lumber Hyperlordosis of Hyperlordosis is controversial Subjects: In conservative treatment(acupuncture, herb med, manipulation & TENS. exercise, potural correction) for a 40 years old woman who had low back pain(V AS) be caused by decrease lumbar lordotic angie. Objectives: The object is change of lumbar lordotic angle of a 40 years old woman who had low back pain with Lumbar hyperlordosis, In conservative treatment. Method: In conservative treatment, We added taping therapy(mechanical correction taping of Kinesio Taping) about Lumbar Lordosis. Conclusion: We experienced a 40 years old woman who had love pack pain with Lumbar hyperlordosis. In conservative treatment, Her pain was Improved by additional taping therapy In company with decrease of Lumbar Lordosis. 1. abnormal spinal curvature, specially lumbar hyperlordosis act on induction & perpetuation agent for low back pain 2. In a patient had low back pain with lumbar hyperlordosis, change of lumbar lordotic angle is of utility value for the effect of treatment and assessment of prognosis. 3. pain control is more relative with change of lumbosacral angle than lumbar lordotic angle, in patient had low back pain with lumbar hyperlordosis. 4. mechanical taping therapy with elastic adhesive tape is effective for patient had low back pain with lumbar hyperlordosis

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베인 디퓨저의 솔리디티와 출구 유동각에 따른 성능변화 (Performance Variations of Vaned Diffusers with Solidity and Exit Vane Angle)

  • 조성국;강신형;차봉준;이대성
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 추계학술대회논문집B
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    • pp.422-427
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    • 2000
  • The design of low-solidity vaned diffusers and the effect on the performance of a turbocharger compressor is discussed. The effect of vane number and turning angle was investigated while maintaining a basic design with a leading edge angle of $70^{\circ}$, leading and trailing edge radius ratios of 1.1 and 1.3. All results are compared with those obtained with the standard vaneless diffuser configuration and it was shown that all designs increased and shifted the pressure ratio to reduced flowrates. Despite the low-solidity configuration none of the vane designs provided a broad operating range, and the vane leading edge angle was not main factor that system went into the surge condition. The diffuser of higher trailing edge angle improved the flow range for the compressor to operate at lower flow region.

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저순도 알루미나 세라믹 예비소결체의 선삭에서 공구 마멸에 미치는 절삭 조건의 영향 (Effect of Cutting Condition on the Tool Wear in Turning of the Presintered Low Purity Alumina Ceramics)

  • 이재우
    • 한국정밀공학회지
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    • 제27권5호
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    • pp.14-21
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    • 2010
  • In this study, presintered low purity alumina ceramics were machined with various tools to clarify the effects of the tool material, cutting condition and tool geometry on machinability. The main conclusions obtained were as follows. (a)The wear of tungsten carbide tool becomes smaller with the increase of the feed and clearance angle, and with the decrease of rake angle, especially exhibiting considerably smaller wear with both the decrease of rake angle and the increase of clearance angle. (b) So far as turning the ceramic presintered at low temperature, the diamond tool shows the best performance with higher feed. (c) The effect on the tool wear of the feed, clearance angle and rake angle becomes smaller in turning the ceramic presintered at higher temperature. (d) The tool wear is not severely affected by the depth of cut.

Study of Chromium thin films deposited by DC magnetron sputtering under glancing angle deposition at low working pressure

  • Bae, Kwang-Jin;Ju, Jae-Hoon;Cho, Young-Rae
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.181.2-181.2
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    • 2015
  • Sputtering is one of the most popular physical deposition methods due to their versatility and reproducibility. Synthesis of Cr thin films by DC magnetron sputtering using glancing angle deposition (GLAD) has been reported. Chromium thin films have been prepared at two different working pressure($2.0{\times}10-2$, 30, $3.3{\times}10-3torr$) on Si-wafer substrate using magnetron sputtering with glancing angle deposition (GLAD) technique. The thickness of Cr thin films on the substrate was adjusted about 1 mm. The electrical property was measured by four-point probe method. For the measurement of density in the films, an X-ray reflectivity (XRR) was carried out. The sheet resistance and column angle increased with the increase of glancing angle. However, nanohardness and density of Cr thin films decreased as the glancing angle increased. The measured density for the Cr thin films decreased from 6.1 to 3.8 g/cc as the glancing angle increased from $0^{\circ}$ to $90^{\circ}$ degree. The low density of Cr thin films is resulted from the isolated columnar structure of samples. The evolution of the isolated columnar structure was enhanced at the conditions of low sputter pressure and high glancing angle. This GLAD technique can be potentially applied to the synthesis of thin films requiring porous and uniform coating such as thin film catalysts or gas sensors.

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