• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.72.1-72.1
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• 2010

Thin film a-Si solar cells deposited by PECVD have many advantages compared to the traditional crystalline Si solar cells. They do not require expensive Si wafer, the process temperature is relatively low, possibility of scaling up for mass production, etc. In order to produce thin film solar cells, understanding the relationship between the material characteristics and deposition conditions is important. It has been reported by many groups that the band gap of the a-Si material and the deposition rate has an linear relationship, when RF power is used to control both. However, when the process pressure is changed in order to control the deposition rate and the band gap, a diversion from the well known linear relationship occurs. Here, we explain this diversion by the deposition condition crossing different plasma regions in the Paschen curve with a simple model. This model will become a guide to which condition a-Si thin films must be fabricated in order to get a high quality film.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.146-150
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• 2021

Plasma information based virtual metrology (PI-VM) that predicts wafer-to-wafer etch rate variation after wet cleaning of plasma facing parts was developed. As input parameters, plasma information (PI) variables such as electron temperature, fluorine density and hydrogen density were extracted from optical emission spectroscopy (OES) data for etch plasma. The PI-VM model was trained by stepwise variable selection method and multi-linear regression method. The expected etch rate by PI-VM showed high correlation coefficient with measured etch rate from SEM image analysis. The PI-VM model revealed that the root cause of etch rate variation after the wet cleaning was desorption of hydrogen from the cleaned parts as hydrogen combined with fluorine and decreased etchant density and etch rate.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2006.04a
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• pp.141-141
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• 2006

• Journal of Environmental Science International
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• v.21 no.6
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• pp.695-704
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• 2012

The application of disinfection models on the plasma process was investigated. Nine empirical models were used to find an optimum model. The variation of parameters in model according to the operating conditions (first voltage, second voltage, air flow rate, pH) were investigated in order to explain the disinfection model. In this experiment, the DBD (dielectric barrier discharge) plasma reactor was used to inactivate Ralstonia Solanacearum which cause wilt in tomato plantation. Optimum disinfection models were chosen among the nine models by the application of statistical SSE (sum of squared error), RMSE (root mean sum of squared error), $r^2$ values on the experimental data using the GInaFiT software in Microsoft Excel. The optimum model was shown as Weibull+talil model followed by Log-linear+ Shoulder+Tail model. Two models were applied to the experimental data according to the variation of the operating conditions. In Weibull+talil model, Log10($N_o$), Log10($N_{res}$), ${\delta}$ and p values were examined. And in Log-linear+Shoulder+Tail model, the Log10($N_o$), Log10($N_{res}$), $k_{max}$, Sl values were calculated and examined.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.21 no.4
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• pp.193-200
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• 2011

Objectives: Blood lead and hyperhomocysteinemia have been found to be associated with cardiovascular disease. The objective of the present study was to assess the relationship of lead biomarkers on plasma homocysteine and blood pressure. Methods: To evaluate the effect of lead biomarkers including blood lead on plasma homocysteine and blood pressure in retired lead workers, 66 retired lead workers without any occupational exposure to organic solvent, mercury and arsenic were agreed to participate this study. For the control subjects 42 controls were recruited from same area of retired lead workers with consideration of demographic characteristics. Results: The mean levels of blood lead and ZPP of retired lead workers were significantly higher than control group. There were positive significant correlations between blood lead and plasma homocysteine, also systolic and diastolic blood pressure. The multiple linear regression analysis also reveled that plasma homocysteine was significantly associated with blood lead after adjusting for age, gender, body mass index, lead exposure, smoking and drinking. Diastolic blood pressure was significantly associated with blood lead, plasma homocysteine, and total cholesterol; whereas, systolic blood pressure was significantly associated with plasma homocysteine only. Conclusions: Blood lead showed significant association with plasma homocysteine and blood pressure even after more than mean 10 years from their retirements.

• Journal of the Korean institute of surface engineering
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• v.39 no.3
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• pp.142-146
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• 2006

A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880\;mm{\times}660\;mm$ ($4^{th}$ generation glass size). In this study, effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas of the order of $3.18{\times}10^{11}\;cm^{-3}$ could be obtained with a pressure of 15 mTorr Ar at an inductive power of 5000 W with good plasma stability. This plasma density is higher than that obtained for the conventional double comb-type antenna, possibly due to the plasma confinement, low rf voltage, resulting in high power transfer efficiency. Also, due to the remarkable reduction in the antenna rf voltage and length, a plasma uniformity of less than 3% could be obtained within a substrate area of $880\;mm{\times}660\;mm$ as rf power increased.

• Archives of Pharmacal Research
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• v.12 no.2
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• pp.108-113
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• 1989

A new column-switching high performance liquid chromatographic method was developed for the determination of lonazolac in plasma. This method was based on the on-line trace enrichment of lonazolac using a precolumn packed with Amberlite XAD-2. The analysis was complete in 20 min. between injections and the limit of detection was $0.1{\mu}g/ml$ using $100{\mu}l$ of plasma. The method was linear in range of $0.1-10{\mu}g/ml$ with a correlation coefficient of 0.9991. Absolute recovery of lonazolac from the spiked plasma samples ranged from 95.6% to 97.1%. The method was shown to be reproducible over the concentration range studied.

• Archives of Pharmacal Research
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• v.15 no.3
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• pp.246-250
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• 1992

Acetaminophen (AAP) and ranitidine (RT) were coadministered orally to nine rats, and the possible contribution of the gastric emptying to the plasma concentration profiles of them was examined. The drugs showed multiple plasma peaks similar to the respective ones after separated administration of each durg. IT Implies that there is no significant interaction between AAP and RT in terms of the gastric emptying or drug absorption. There were no significant linear correlations of the peak patterns (peak height and peak time) between AAP andd RT. It is contrary to the expectation from the biphasic gastric emptying (BGE) theory previously suggested for AAP and RT. The BGE theory. Therefore, seemed to have some draw-backs in explaining satisfactorily the multiple plasma peaks of AAP and RT. Two more doubts raised previously against the BGE theory were also discussed.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.198-198
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• 2014

Plasma를 이용하는 대면적 디스플레이 공정에서 균일도는 매우 중요한 요소 중 하나이다. 이를 향상시키기 위하여 본 연구에서는 pulsed plasma를 이용하여 duty ratio를 조절함으로써 균일도를 향상시켰으며, plasma on/off time을 이용하여 electron temperature를 낮추어 plasma에 의한 damage를 감소시키려 하였다. 또한 optical emission spectroscopy(OES)를 이용하여 pulse condition에따라 변하는 ion species peak을 실시간으로 확인하였다.

• Journal of the Korean institute of surface engineering
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• v.32 no.3
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• pp.344-350
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• 1999

The surface chemical structure of three kinds of polyethylene (PE): high density (HD) PE, low density (LD) PE and linear (L)-LDPE exposed to Ar and $O_2$ plasmas has been investigated using XPS. Oxygen was incorporated in a more increased amount for HDPE than for L-LDPE and LDPE. Ar plasma tended to incorporate more oxygen than $O_2$ plasma. The XPS valence band spectra for Ar plasma exhibited a clear peak assigned to $O_2$s character. By chemical derivatization method it was found that the amount of -COOH group at the surface was much greater than that of -OH group. The hydrophilic nature of plasma-treated PE increased in the order: LDPE