• Journal of the Korean Society for Precision Engineering
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• v.32 no.5
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• pp.405-413
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• 2015

This paper presents the motion accuracy simulation considering loads such as workpiece weight, cutting force, cogging force of a linear motor, and force caused by misalignment and runout error of a ballscrew in linear motion units. The transfer function method is basically utilized to estimate 5-DOF motion errors, together with the equilibrium equations of force and moment on the table. The transfer function method is modified in order to consider clearance changed according to the loads in the double sided hydrostatic/aerostatic bearings. Then, the analytic model for predicting the 5-DOF motion errors is proposed with the modified transfer function method. Motion errors were simulated under different loading conditions in the linear motion units using hydrostatic, aerostatic, and linear motion bearings, respectively. And the proposed analytic model was verified by comparing the estimated and measured motion errors.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.215-220
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• 2002

Recently, linear motor has been developed for linear motion of machine tools. Linear motor is useful to design the linear motion, high speed and high accuracy, because of the simple system not required the additional mechanical part such as coupling and ballscrew. This paper tested performance of linear motor relevant to motioning and positioning table such as F.R.F., step response and positional accuracy Linear motion system using linear motor requires the effective cooling system because it cause to decrease the positional error and to protect the motor coil. Therefore the positional error measurement was made to evaluate the effect of the temperature variation.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.6
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• pp.607-614
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• 2013

In this study, effect of the sensor gain error is theoretically analyzed and simulated when mixed sequential two-prove method(MTPM) is applied for the precision measurement of straightness error of a linear motion table. According to the theoretical analysis, difference of the gain errors between two displacement sensors increases measurement error dramatically and alignment error of the straightedge is also amplified by the sensor gain difference. On the other hand, if the gain errors of the two sensors are identical, most of error terms are cancelled out and the alignment error doesn't give any influence on the measurement error. Also the measurement error of the straightness error is minimized compared with that of the straightedge's form error owing to close relationship between straightness error and angular motion error of the table in the error terms.

• 제어로봇시스템학회:학술대회논문집
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• 1987.10b
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• pp.228-231
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• 1987

Microprocessor-based software DDA interpolator is developed and applied to two axis contouring control of X-Y table. Developed assembly program is composed of feedrate, linear and circular DDA interpolation routines. Reference-pulse type of open-loop stepping motor control system in which the micro-computer produces a sequence of reference pulses for each axis of motion is adopted. To test performance of the developed program, X-Y table drive system based on stepping motor and shaft encoder is designed. Contouring error of the system in linear and circular path is within .+-.0.2 mm.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• 연구논문집
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• s.34
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.7 s.100
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• pp.806-812
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• 2005

This paper adresses the shaking table tests with 1/100 scaled model followed similitude law for OOdam main designing section to understand nonlinear behavior characteristics of concrete dam body by ground motion. As earthquake wave, Hachinohe and El Centre waves were used and acceleration and displacements are measured to analyze behaviors of dam body. For maximum ground acceleration range $(0.3\~0.9 g)$, the results showed linear behavior regardless of maximum 9round acceleration and secured safety of structure. To analyze the behavior of dam after tension cracking, 3 cm-notch was placed at the critical section of over-flowing section. As results of applying Hachinohe wave(0.8 g), Even though tension cracks were formed at over-flowing section by Hachinohe wave(0.8 g), it showed that the dam is stable for supporting upper stream Part of water tank of dam.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.3
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• pp.51-51
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• 1998

It is very important to test linear cycle positioning accuracy of Machining centers as it affect all other machines machined by them in industries. For example, if the linear positioning accuracy of each axes directions is bad, the size of works will be wrong and the change-ability will be bad in the assembly of machine parts. In this paper, measuring systems are organized to measure linear displacements of table or spindle of machine center using laser interferometer, magnescale and tick pulses comming out from computer in order to get data at constant time intervals from the sensors. And each set of data gotten from test is expressed to a plots by computer treatment and the results of linear positioning error motion is estimated to numerics by statistical treatments.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.5
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• pp.44-51
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• 2008

In this paper, the optimal tuning of a cross-coupled controller linked with the feedforward controller is studied to reduce contouring and tracking errors of a bi-axial servomechanisms by using the previously developed integrated tuning method. The CCC system for an arbitrary curve, which is combined with the feedforward controller, is formulated by a state-space based on a series of linear motion trajectories. An optimal tuning problem is formulated as a nonlinear constrained optimization problem including relevant controller parameters of the servo. To verify the effectiveness of the proposed optimal tuning procedure, linear and circular motion experiments are performed on the xy-table. Experimental results confirm that both tracking and contouring errors are significantly reduced by applying the proposed control and tuning system.