• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.380-384
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• 1997

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. Reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, correctwe machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysls method proposed in the previous paper. These processes can be rtcrated if the analized motion errors are worse than target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail after corrective machining are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm IS effective to acquire the corrective machming information to improve the accuracy of hydrostatic table.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.5
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.767-768
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• 2010

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.135-141
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• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.36-40
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• 2003

In order to discuss the availability of aerostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156N and a laser scale with the resolution of $0.01\mu\textrm{m}$ are used as the feeding system. The experiments are performed on the static stiffness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway also has $0.21\mu\textrm{m}$ of positioning error and $0.09\mu\textrm{m}$ of repeatability, and it shows the stable response against the $0.01\mu\textrm{m}$ resolution step command. The velocity variation of feeding system is less than 0.6%. From these results, it is confirmed that the aerostatic guideway driven by the coreless linear motion is very useful for the ultra precision machine tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1144-1149
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• 2003

It is very important to measure circular motion accuracy of NC lathes it affects accuracy, performance, interchange ability and quality of machine parts machined by the NC lathes in industries. So, in this study, measuring units system to measure circular motion accuracy two axes circular motion accuracy of NC lathes was composed of two optical linear scales installed on the z and x-axes of work coordinate system on NC lathe and a computer inserted with PC counter card enables to obtain measuring data. Here, ATC(Automatic Tool Changer) and moving part of linear scales are fixed with magnet bases in order to measure circular motion accuracy of the ATC of NC lathe. And next, computer software was developed in order to measure the circular motion accuracy of NC lathe under resolution of 0.1 $\mu\textrm{m}$ using two linear scales, and also computer softwares were developed so that measuring data could be modeled on plots and be analyzed numerically,

• Journal of the Korean Society for Precision Engineering
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• v.20 no.3
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• pp.187-193
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• 2003

This paper presents an on-machine measurement method of flatness error fur surface machining processes. There are two kinds of on-machine measurement methods available to measure flatness errors in workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are often engaged in both methods. This paper proposes an idea to realize a measurement system of flatness errors and its rigorous application for estimation of motion errors of the positioning system. The measurement system is made by modifying the straightness measurement system, which consists of a laser, a CCD camera and processing system, a sensor head, and some optical units. The sensor head is composed of a retroreflector, a ball and ball socket, a linear motion guide unit and adjustable arms. The experimental .results show that the proposed method is useful to identify flatness errors of machined workpieces as well as motion errors of positioning systems.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.177.3-177
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• 2001

In this paper, the design of the in-motion alignment system of Strapdown Inertial Navigation System(SDINS) using Robust Extended Kalman Filter(REKF) is presented. The compensation of errors in the aided navigation system is accomplished by the indirect feedback filtering. The performance of the aided navigation algorithm is very sensitive to the accuracy of the initial estimate, which is the characteristic of the EKF. Unfortunately, the initial attitude error can be very large during the in-motion alignment. To overcome the in-motion alignment under large initial attitude error problem, the REKF using linear robust filtering technique is proposed. The linear robust H$_2$ filter can be adopted for nonlinear ...

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.375-381
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• 2004

Recently, the evolution in production techniques (e.g. high-speed milling) and the complex shapes involved in modem production design has been increasingly popular. The key to the achievement is a drastic improvement of the dynamic behavior of the machine tool axes used in production machinery. The more complex these tool paths the higher the speed and acceleration requirements. But it is very difficult to reach the target for high speed machine tool because of the limitations of servo system and motion control system. However the direct drive design of machine tool axes, which is based on linear motors and which recently appeared on the market, is a viable candidate to meet the ever increasing demands, because of these advantages such as no backlash, less friction, more mechanical simplicity and very higher acceleration and velocity comparing to the traditional system. This paper focused on the performance tests of the high speed horizontal machine tool based on linear motor. Especially, dynamic characteristics were investigated through circular test and circular form machining test is carried out considering many important parameter. Therefore these several experiments is used to be evaluated the model for prediction of circular motion error and circular machined error.