• 설비공학논문집
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• 제16권5호
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• pp.475-481
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• 2004

This paper presents a force model of the clean tube system, which was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafers motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes a control method to emit and stop a wafer at the center of a control unit. It reveals the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when the wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for the 12 inch wafer shows the validity of the proposed model and the algorithm.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• International Journal of Control, Automation, and Systems
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• 제3권3호
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• pp.387-396
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• 2005

The Rotational/Translational Actuator (RTAC) benchmark problem considers a fourth-order dynamical system involving the nonlinear interaction of a translational oscillator and an eccentric rotational proof mass. This problem has been posed to investigate the utility of a rotational actuator for stabilizing translational motion. In order to experimentally implement any of the model-based controllers proposed in the literature, the values of model parameters are required which are generally difficult to determine rigorously. In this paper, an approach to the least-squares estimation of the parameters of a system is formulated and practically applied to the RTAC system. On the other hand, this paper shows how to model a nonlinear system as a linear uncertain system via nonparametric system identification, in order to provide the information required for linear robust $H_\infty$ control design. This method is also applied to the RTAC system, which demonstrates severe nonlinearities, due to the coupling from the rotational motion to the translational motion. Experimental results confirm that this approach can effectively condense the whole nonlinearities, uncertainties, and disturbances within the system into a favorable perturbation block.

• Journal of Power Electronics
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• 제11권5호
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• pp.697-703
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• 2011

In this paper a control system with a high performance dynamic response for linear induction motors (LIMs) is proposed which takes into account the end-effect in both the machine model and the control system. Primary flux oriented control has two major drawbacks i.e. a lack of decoupling of the thrust and the flux and a possibility of system instability due to the end-effect. Both of these drawbacks have been dealt with in this paper. A flux estimation method is proposed to correct the flux orientation error caused by the end effect. Extensive motor performance evaluations under the proposed control system prove its superiority over conventional vector control.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1404-1409
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• 2003

The sway control problem of the pendulum motion of the container crane hanging on the trolley, which transports containers from the container ship to the truck, is considered in this paper. In the container crane control problem, the main issue is to suppress the residual swing motion of the container at the end of the acceleration, deceleration or the case of that the unexpected disturbance input exists. For this problem, in general, the trolley motion control strategy is introduced and applied to real plants. In this paper, we suggest a new type of swing motion control system for a crane system in which a small auxiliary mass is installed on the spreader. The actuator reacting against the auxiliary mass applies inertial control forces to the spreader of the container crane to reduce the swing motion in the desired manner. In this paper, we consider that the length of the rope varies is we design the anti-sway control system based on LMI(linear matrix inequality) approach. And, it will be shown that the proposed control strategy is useful and it can be easily applicable to the real world. So, in this study, we investigate usefulness of the proposed anti-sway system and evaluate system performance from simulation and experimental studies.

• Transactions on Control, Automation and Systems Engineering
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• 제2권3호
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• pp.214-219
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• 2000

This paper presents a recoil and counter recoil motion measurement system using linear variable differential transformers (LVDT). The output of the LVDT is obtained from the differential voltage of the secondary transformers. Since a transducer core is attached to the motion body, the output is directly proportional to the movement length of the core. Displacement, velocity and acceleration are measured from the LVDT. With a comparison between the measurement result and the reference value obtained by the highly accurate Vernier calipers, it is proved that the measurement system with the LVDT is applicable to the test of the moving part of the mechanism with better accuracy.

• 한국정밀공학회지
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• 제22권6호
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• pp.76-82
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• 2005

In this paper, the pole placement controller based on the Robust Internal-loop Compensator (RIC) structure, which has inherent structural equivalence to disturbance observer, is proposed to control a linear positioning system. This controller has the advantage to easily select controller gains by using pole placement without loss of that of original RIC structure. The principal is to construct the pole placement controller for a nominal internal model instead of unknown real plant. Using linear motion experiment showed the effectiveness of the proposed controller.

• International Journal of Control, Automation, and Systems
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• 제6권1호
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• pp.54-61
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• 2008

This paper presents a method for reducing modelling error in the linear motion system with voicecoil actuator (VCA). A model of linear motion system composed of a mechanism and control was prepared to verify the proposed method. In modeling of the system, the damping coefficient obtained experimentally is applied to the model in order to consider the effect of the viscous friction for the moving part in VCA. The response velocity of VCA for duty ratio of PWM signal was analyzed in the time domain. Consequently, the relation between velocity and duty ratio was obtained. The result from the experiment showed an error of 9% when compared with that of simulation. In order to reduce the modeling error, impedance variation according to input frequency was analyzed, and equivalent impedance with multi-frequency was applied to the control part. As a result, the modeling error decreased to 5%.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1264-1268
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• 2004

This paper presents a wafer motion modeling of the transfer unit and the control unit in the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. The motion in the transfer unit is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated plate is modeled as a linear spring. The motion in the control unit is also modeled as another mass-spring-damper system, but in two dimensional systems. Experiments with a clean tube system built for 12-inch wafers show the validity of the presented force and motion models.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.754-758
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• 2000

In recent years, the LDM(Linear DC Motor) is widely used, because it has more merits than other rotary motors. First, if system requires linear motion, LDM realizes direct linear motion as rotary motor does not. Second, system is simple and easy to control, and so on. In optical disc drive, a tracking system consists of two parts. One is fine actuating and the other is coarse actuating. For coarse actuating VCM(Voice Coil Motor) actuator is used as a basic drive mechanism. In this paper, MC(Moving Coil) type LDM is designed, manufactured and controlled. System is composed of mechanical-electromagnetic component, therefore mechanical loss and electromagnetic loss exist. The dominent mechanical loss is friction which results from sliding between guide shaft and hole. Therefore, this paper shows the friction compensation control. High speed and accurate position is not gained only PID control, therefore other control method is applied to the system.