• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• International Journal of Fluid Machinery and Systems
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• v.7 no.1
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• pp.28-33
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• 2014

In order to research the relationship between the tip clearance and leakage flow of centrifugal compressor, a high speed centrifugal compressor was investigated by using CFD. A numerical study on the effect of four different rotor tip clearance sizes of centrifugal compressor, which were 0.5times, 1 times, 1.5times and 2.0times of the design tip clearance, was carried out. Efficiency and pressure ratio curves were obtained under different mass flow. The reasons of the clearance vortex and the factors of vortex size were analyzed. The result indicated that with the increase of tip clearance size, the performance of the compressor changed obviously, the performance parameters such as efficiency and pressure ratio tended to decrease obviously. While, the leakage flow does not always lead to leak vortex. The strength of the vortex increased with the tip clearance. The size of leak vortex was affected by the pressure difference between the suction side and the pressure side of blade tip.

• Nuclear Engineering and Technology
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• v.53 no.9
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• pp.3122-3125
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• 2021

Electromagnetic vortex flowmeter is a new type of instrument for detecting leakage of steam generator, and the signal processing method based on the envelope to calculate energy ratio can effectively detect bubbles in sodium flow. The signal processing method is not affected by changes in the amplitude of the sensor output signal, which is caused by changes in magnetic field strength and other factors. However, the detection sensitivity of the electromagnetic vortex flowmeter is reduced. To this end, a signal processing method based on inverse Fourier transform to calculate energy ratio is proposed. According to the difference between the frequency band of the bubble noise signal and the flow signal, only the amplitude in the frequency band of the flow signal is retained in the frequency domain, and then the flow signal is obtained by the inverse Fourier transform method, thereby calculating the energy ratio. Using this method to process the experimental data, the results show that it can detect 0.1 g/s leak rate of water in the steam generator, and its performance is significantly better than that of the signal processing method based on the envelope to calculate energy ratio.

• Journal of Korean Society of Water and Wastewater
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• v.29 no.3
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• pp.415-425
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• 2015

Aging water pipe networks hinder efficient management of important water service indices such as revenue water and leakage ratio due to pipe breakage and malfunctioning of pipe appurtenance. In order to control leakage in water pipe networks, various methods such as the minimum night flow analysis and sound waves method have been used. However, the accuracy and efficiency of detecting water leak by these methods need to be improved due to the increase of water consumption at night. In this study the Principal Component Analysis (PCA) technique was applied to the night water flow data of 426 days collected from a water distribution system in the interval of one hour. Based on the PCA technique, computational algorithms were developed to narrow the time windows for efficient execution of leak detection job. The algorithms were programmed on computer using the MATLAB. The presented techniques are expected to contribute to the efficient management of water pipe networks by providing more effective time windows for the detection of the anomaly of pipe network such as leak or abnormal demand.

• Journal of the Korean Society of Safety
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• v.15 no.2
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• pp.59-62
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• 2000

Almost accidents related with gas have started with the leakage of LPG(Liquefied Petroleum Gas) in the open air. But experimental data of LPG leak jet are difficult to find because the safety of experiment is hard to secure and its phenomenon is not steady but transitional. This study is focused on the phenomena of injection jet of liquid butane to the open air. Simple experiment shows that only liquid butane jet in the open air is possible due to the slow vaporization because of low temperature difference between the liquid and air and low vapor pressure of liquid butane. Comparing with the water, 25~40% more liquid butane flow through the tube under the same pressure difference driving.

• Journal of Korean Society of Water and Wastewater
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• v.27 no.3
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• pp.351-361
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• 2013

In this study the Principal Component Analysis (PCA) was applied to flow data in a water distribution pipe system to analyze the relevance between the flow observation dates, which have the outliers of observed night flows, and the maintenance records. The data was obtained from four small size water distribution blocks to which 13 maintenance records such as pipe leak and water meter leak belong. The flow data during four months were used for the analysis. The analysis was carried out to identify an appropriate analysis period for a PCA model for a water distribution block. To facilitate the analyses a computational algorithm was developed. MATLAB was utilized to realize the algorithm as a computer program. As a result, an appropriate PCA period for each of the case study small size water distribution blocks was identified.

• Nuclear Engineering and Technology
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• v.48 no.5
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• pp.1162-1173
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• 2016

In this paper, we describe a physicomathematical model of the processes that occur in a sodium circuit with a variable flow cross-section in the case of a water leak into sodium. The application area for this technique includes the possibility of analyzing consequences of this leak as applied to sodium-water steam generators in fast neutron reactors. Hydrodynamic processes that occur in sodium circuits in the event of a water leak are described within the framework of a one-dimensional thermally nonequilibrium three-component gas-liquid flow model (sodium-hydrogen-sodium hydroxide). Consideration is given to the results of a mathematical modeling of experiments involving steam injection into the sodium loop of a circulation test facility. That was done by means of the computer code in which the proposed model had been implemented.

• Journal of the Korean Institute of Gas
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• v.27 no.2
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• pp.57-64
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• 2023

As the meter reading method of gas meters develops, smart gas meters capable of remote meter reading (leak checking meters and multi-function safety meters) are being used. These meters have a function to judge leakage by utilizing the flow rate and pressure data collected as an additional function. Leakage judgment function using flow rate data has valid cases in the actual field, but the pressure data-based leakage judgment standard is based on not only the pressure value change due to leakage but also various factors (pressure regulator pressure, connection with adjacent meters, usage of adjacent houses, location of meters, etc.). There is a problem with pressure magnitude changes (levels). In this paper, as a technique that can judge leaks by using pressure data collected from smart gas meters, it was developed through preprocessing of pressure data, criteria for pressure value ranges related to leaks, leak judgment techniques, and application case verification.

• Transactions of The Korea Fluid Power Systems Society
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• v.2 no.4
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• pp.23-29
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• 2005

In order to improve the efficiency of hydraulic gear pumps or motors especially for high operating pressure, power losses due to viscous friction and leak flow through gear teeth end-gaps are considered in this paper. Optimal gaps minimizing the power loss for pumps and motors with uniform heights of gaps are analysed first. And the effect of the shapes of gaps with unequal heights on the power loss are studied and discussed by simulation. Considering that the outer shell lacing gear teeth may expand due to high internal pressure or thermal stress, the results drawn in this paper can be used for the design of high efficiency pumps and motors.

• Journal of Advanced Marine Engineering and Technology
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• v.22 no.6
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• pp.871-879
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• 1998

The refrigerator consists of many components such as compressor condenser expansion valve evaporator and the cabinet which filled by urethane foam. In this paper the heat leakage of refriger-ator is measured by the new experiment method which is different from a present method, The devi-ation of the UA(overall heat transfer coefficient times area) between the simulation and experiments is about 7-8%. Using the modeling of various components of refrigeration system a performance analysos of CFC 12 and HFC 134a is performed numerically on the UA. As the results of this study according to increase the heat leakage the refrigeration load and mass flow rate of refrigerant are increased. And the increase of the mass flow rate results in the increase of the condensing and evapo-rating temperature. Therefore according to increase of the heat leakage the COP leads to increase because the increase of refrigeration capacity is larger than the increase if compressor power.