• Title/Summary/Keyword: layer removal

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Milling of NiCo Composite Silicide Interconnects using a FIB (FIB를 이용한 니켈코발트 복합실리사이드 미세 배선의 밀링 가공)

  • Song, Oh-Sung;Yoon, Ki-Jeong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.3
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    • pp.615-620
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    • 2008
  • We fabriacted thermal evaporated $10nm-Ni_{1-x}Co_x$(x=0.2, 0.6, and 0.7) films on 70 nm-thick polysilicon substrate with $0.5{\mu}m$ line width. NiCo composite silicide layers were formed by rapid thermal annealing (RTA) at the temperatures of $700^{\circ}C$ and $1000^{\circ}C$. Then, we checked the microstructure evaluation of silicide patterns. A FIB (focused ion beam) was used to micro-mill the interconnect patterns with low energy condition (30kV-10pA-2 sec). We investigated the possibility of selective removal of silicide layers. It was possible to remove low resistance silicide layer selectively with the given FIB condition for our proposed NiCo composite silicides. However, the silicides formed from $Ni_{40}Co_{60}$ and $Ni_{30}Co_{70}$ composition showed void defects in interconnect patterns. Those void defects hinder the selective milling for the NiCo composite silicides.

Effect of Flux on Recovery of Aluminum During Molten Metal Treatment of Aluminum Can Scrap (알루미늄 캔 스크랩의 용탕처리 시 알루미늄 합금 회수에 미치는 플럭스의 영향)

  • Han, Chulwoong;Ahn, Byung-Doo;Kim, Dae-Guen;Lee, Man Seung;Kim, Yong Hwan
    • Resources Recycling
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    • v.29 no.1
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    • pp.70-80
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    • 2020
  • This study investigates the effect of flux type and mixing ratio on efficiency in aluminum can scrap recycling using induction furnace. The removal of surface coating layer of aluminum can scrap was possible through heat treatment at about 500 ℃ for about 30 min. The temperature for the melting process was set to be slightly above the melting temperature of the aluminium can scrap. The molten metal treatment was performed with different types of flux and mixing ratio. As a result, The optimum efficiency of Al recovery ratio was revealed when the process was performed with at least 3 wt.% of the flux (Salt and MgCl2 mixture of ratio 70:30) at 750 ℃. The mechanical property of the recovered Al alloy showed that the tensile strength is about 249 MPa and elongation is about 14 %. This result was found to be similar to the mechanical property of the virgin Al 5083 alloy.

Effect of BOE Wet Etching on Interfacial Characteristics of Cu-Cu Pattern Direct Bonds for 3D-IC Integrations (3차원 소자 적층을 위한 BOE 습식 식각에 따른 Cu-Cu 패턴 접합 특성 평가)

  • Park, Jong-Myeong;Kim, Su-Hyeong;Kim, Sarah Eun-Kyung;Park, Young-Bae
    • Journal of Welding and Joining
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    • v.30 no.3
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    • pp.26-31
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    • 2012
  • Three-dimensional integrated circuit (3D IC) technology has become increasingly important due to the demand for high system performance and functionality. We have evaluated the effect of Buffered oxide etch (BOE) on the interfacial bonding strength of Cu-Cu pattern direct bonding. X-ray photoelectron spectroscopy (XPS) analysis of Cu surface revealed that Cu surface oxide layer was partially removed by BOE 2min. Two 8-inch Cu pattern wafers were bonded at $400^{\circ}C$ via the thermo-compression method. The interfacial adhesion energy of Cu-Cu bonding was quantitatively measured by the four-point bending method. After BOE 2min wet etching, the measured interfacial adhesion energies of pattern density for 0.06, 0.09, and 0.23 were $4.52J/m^2$, $5.06J/m^2$ and $3.42J/m^2$, respectively, which were lower than $5J/m^2$. Therefore, the effective removal of Cu surface oxide is critical to have reliable bonding quality of Cu pattern direct bonds.

Application of a Soil Separation System for the Remediation of Arsenic Contaminated Soil in a Metal Mining Area (폐금속광산 지역의 비소오염토양 처리를 위한 선별 기술 적용)

  • ParK, Chan-Oh;Kim, Jong-Won;Park, Jun-Hyoung;Lee, Young-Jae;Yang, In-Jae;Lee, Jai-Young
    • Journal of Soil and Groundwater Environment
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    • v.18 no.5
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    • pp.56-64
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    • 2013
  • After the law has been enacted for the prevention and recovery of mining damage in 2005, efforts of remediation have been started to recover heavy metal contaminated soils in agricultural land near mining sites. As part of an effort, the upper part of cultivation layer has been treated through covering up with clean soil, but the heavy metal contamination could be still spreaded to the surrounding areas because heavy metals may be remained in the lower part of cultivation layers. In this study, the most frequently occurring arsenic (As) contamination was selected to study in agricultural land nearby an abandoned metal mining site. We applied separation technologies considering the differences in the physical characteristics of soil particles (particle size, density, magnetic properties, hydrophobicity, etc.). Based on physical and chemical properties of arsenic (As) containing particles in agricultural lands nearby mining sites, we applied sieve separation, specific gravity separation, magnetic separation, and flotation separation to remove arsenic (As)-containing particles in the contaminated soil. Results of this study show that the removal efficiency of arsenic (As) were higher in the order of the magnetic separation, flotation separation, specific gravity separation and sieve separation.

Depilatory creams increase the number of hair follicles, and dermal fibroblasts expressing interleukin-6, tumor necrosis factor-α, and tumor necrosis factor-β in mouse skin

  • Tsai, Pi-Fen;Chou, Fen-Pi;Yu, Ting-Shuan;Lee, Huei-Jane;Chiu, Chun-Tang
    • The Korean Journal of Physiology and Pharmacology
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    • v.25 no.6
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    • pp.497-506
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    • 2021
  • Besides using for hair removal, depilatory agents have been considered to be used as a penetration enhancer for transepidermal drug delivery. To examine the effect in hair follicles (HFs), two commercially available depilatory creams were tested on the dorsal skin of mice to monitor the effect deep into the skin structure. Fifteen male BALB/c mice were used in this study. Depilatory creams were applied to the dorsal skin of the same animal using shaved and untouched treatments as controls to minimize individual differences. Skin samples were collected at three days, one week and two weeks (n = 5 for each) after the treatment, and subjected for hematoxylin-eosin staining, and immunohistochemical analysis for proinflammatory cytokines. The morphological examination showed an increase in the thickness of epidermal layer of the depilatory cream-treated skin at early time points and in the subcutis at two weeks. Depilatory cream promoted entry of anagen phase and increased the number of hair follicles in the subcutis at one and two weeks. Immunohistochemistry showed elevated percentages of dermal fibroblasts expressing interleukin-6, tumor necrosis factor-α, and tumor necrosis factor-β. Shaving process increased the thickness of epidermis and dermis as depilatory creams did, but did neither induce the expression of proinflammatory cytokines in the dermal fibroblasts nor the number of HFs. The results suggested that the commercially available depilatory creams caused a transient minor inflammatory response of the skin and increased the levels of cytokines that might subsequently affect hair growth.

Sandwich-structured High-sensitivity Resistive Pressure Sensor based on Silver Nanowire (샌드위치 구조를 갖는 은 나노와이어 기반 고감도 저항성 압력 센서)

  • Lee, Jinyoung;Kim, Gieun;Shin, Dongkyun;Park, Jongwoon
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.2
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    • pp.1-5
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    • 2018
  • Elastic resistive pressure sensor is fabricated by a direct spray coating of silver nanowires (AgNWs) on uncured polydimethylsiloxane (PDMS) and an additional coating of a conductive polymer, poly(3,4-ethylenedioxythiophene): poly (styrene sulfonate) (PEDOT:PSS). To improve the sensitive and stability, we have fabricated sandwich-structured AgNW/polymer sensor where two AgNW/polymer-coated PDMS films are laminated with the conducting surfaces contacted by pressure lamination. It shows a resistance decrease upon loading due to the formation of dense network of AgNWs. It is demonstrated that the sandwich-structured AgNW/polymer sensor exhibits very high sensitivity ($2.59kPa^{-1}$) and gauge factor (37.8) in the low pressure regime. It can also detect a subtle placement and removal of a weight as low as 3.4 mg, the corresponding pressure of which is about 5.4 Pa. It is shown that the protrusion of AgNWs from PDMS is suppressed substantially by the over-coated PEDOT:PSS layer, thereby reducing hysteresis and rendering the sensor more stable.

Simulated occlusal adjustments and their effects on zirconia and antagonist artificial enamel

  • Alfrisany, Najm Mohsen;Shokati, Babak;Tam, Laura Eva;De Souza, Grace Mendonca
    • The Journal of Advanced Prosthodontics
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    • v.11 no.3
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    • pp.162-168
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    • 2019
  • PURPOSE. The aim of this study was to evaluate the effect of occlusal adjustments on the surface roughness of yttria-tetragonal zirconia polycrystal (Y-TZP) and wear of opposing artificial enamel. MATERIALS AND METHODS. Twenty-five Y-TZP slabs from each brand (Lava, 3M and Bruxzir, Glidewell Laboratories) with different surface conditions (Control polished - CPZ; Polished/ground - GRZ; Polished/ground/repolished - RPZ; Glazed - GZ; Porcelain-veneered - PVZ; n=5) were abraded (500,000 cycles, 80 N) against artificial enamel (6 mm diameter steatite). Y-TZP roughness (in ${\mu}m$) before and after chewing simulation (CS) and antagonist steatite volume loss (in $mm^3$) were evaluated using a contact surface profilometer. Y-TZP roughness was analyzed by three-way analysis of variance (ANOVA) and steatite wear by two-way ANOVA and Tukey Honest Difference (HSD) (P=.05). RESULTS. There was no effect of Y-TZP brand on surface roughness (P=.216) and steatite loss (P=.064). A significant interaction effect (P<.001) between surface condition and CS on Y-TZP roughness was observed. GZ specimens showed higher roughness after CS (before CS - $3.7{\pm}1.8{\mu}m$; after CS - $13.54{\pm}3.11{\mu}m$), with partial removal of the glaze layer. Indenters abraded against CPZ ($0.09{\pm}0.03mm^3$) were worn more than those abraded against PVZ ($0.02{\pm}0.01mm^3$) and GZ ($0.02{\pm}0.01mm^3$). Higher wear caused by direct abrasion against zirconia was confirmed by SEM. CONCLUSION. Polishing with an intraoral polishing system did not reduce the roughness of zirconia. Wear of the opposing artificial enamel was affected by the material on the surface rather than the finishing technique applied, indicating that polished zirconia is more deleterious to artificial enamel than are glazed and porcelain-veneered restorations.

A Study on the Removal Characteristics of a Radioactively Contaminated Oxide Film from the irradiated Stainless Steel Surface using Short Pulsed Laser Ablation (초단 펄스레이저 어블레이션에 의한 스테인리스강 표면의 오염산화막 제거 특성)

  • Kim, Geun-Woo;Yoon, Sung-Sik;Kim, Ki-Chul;Lee, Myung-Won;Kang, Myungchang
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.10
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    • pp.105-110
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    • 2020
  • Radioactive Oxides are formed on the surface of the primary equipment in a nuclear power plant. In order to remove the oxide film that is formed on the surfaces of the equipment, chemical and physical decontamination technologies are used. The disadvantage of traditional technologies is that they produce secondary radioactive wastes. Therefore, in this study, the short-pulsed laser eco-friendly technology was used in order to reduce production of the secondary radioactive wastes. They were also used to minimize the damages that were caused on the base material and to remove the contaminated oxide film. The study was carried out using a Stainless steel 304 specimen that was coated with nickel-ferrite particles. Further, the laser source was selected with two different wavelengths. Furthermore, the depth of the coating layer was analyzed using a 3D laser microscope by changing the laser ablation conditions. Based on the analysis, the optimal conditions of ablation were determined using a 1064nm short-pulsed laser ablation technique in order to remove the radioactively contaminated oxide film from the irradiated stainless steel surface.

The Analysis of the Maison Margiela's Design Code -Focusing on the Checklist Method- (메종 마르지엘라의 디자인 코드 분석 -체크리스트법을 중심으로-)

  • Mok, So-Ri;Cho, Jean-Suk
    • Journal of Fashion Business
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    • v.19 no.4
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    • pp.135-152
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    • 2015
  • The purpose of this study is to explore the role of deconstruction and creative destruction in Maison Margiela’s fashion design code, which has opened the door to a new wave of innovative design since 1988. Using a combination of theoretical analysis, precedent research, and a review of existing literature, five years of Maison Margiela's works (2010-2014) were evaluated. The analysis shows that Maison Margiela’s Design Code consists of the following key elements: Addition, Extension, Asymmetry, Elimination, Deconstruction, Complanation, and Inversion. Addition refers to act of attaching additional pieces of fabric or clothing on the existing piece. Extension refers to the act of extending the design elements, such as their position or features. Asymmetry means the irregular positioning of left-to right and front-to-back length and features. Deconstruction could be seen in intentionally frayed sleeves, open seams, and tears in the cloth. The element of Elimination was evident in the removal of key pieces of clothing such as a coat, pants, blouse, and a jacket. Complanation refers to the reversion to a two dimensional contemplation of the human form rather than the more obvious 3-dimensional form. Finally, Inversion was used by displaying an inner layer of clothing on the outside or exposing seams or zippers in a way that people are not accustomed to seeing. It also meant that the order of wearing clothes was sometimes inverted, so external layers would be worn within clothing that are traditionally underneath. Maison Margiela’s creations represented a break

Scientific Conservation of Underwood Typewriter(Hangi6863) in National Hangeul Museum (국립한글박물관 소장 언더우드 영문 타자기(한기6863)의 과학적 보존)

  • Kim, Yu Jin;Chung, Kwang Yong
    • Conservation Science in Museum
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    • v.28
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    • pp.1-16
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    • 2022
  • Treatment was performed to conserve the Underwood Typewriter (Hangi 6863) from the collection of the National Hangeul Museum. Since the typewriter was presumably manufactured in the modern or contemporary era and bore patterns of damage such as component loss, corrosion, and paint loss, as well as being made of multiple materials, a condition survey and a scientific analysis were conducted ahead of the conservation treatment in order to carry out appropriate treatments for each material. The analysis confirmed that the typewriter was made of various materials including metal, paint, and rubber, and the conservation treatment was performed in the sequence of removal of contamination, reinforcement, and restoration under conditions where each material was stable. Conservation treatment was completed in a stable state by strengthening the layer of damaged paint and restoring the lost leg. These processes have enabled a better understanding of the materials and characteristics of typewriters manufactured in the early modern era, which is expected to provide basic data for typewriter conservation research to be conducted in the future.