• Journal of Korean Society of Industrial and Systems Engineering
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• v.36 no.2
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• pp.1-7
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• 2013

Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particles and bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies producing precision machines and electrical parts essentially have industrial cloom facilities and clean technologies to produce defects free products due to particles. Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of sub-micro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.11 no.4
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• pp.31-36
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• 2001

A spin coater is a machine to coat wafer or LCD display with thin film. Vibration in the spin coater may be one of main troubles in the coating process. In this paper, we focus on the difference between two spin coaters. Vibration sources are identified by experimental approach and are compared to find the difference between the two spin coaters. Also, the particle concentration is observed by laser particle counter (LPC) for the two spin coaters, when the spin coaxers are working. It is also considered whether the defect rate is proportional to the particle concentration. The result shows that particle generation in the coating process is related to excessive vibration of the spin coater shaft and the particles influence the defect rate of the thin film product.

• 한국가시화정보학회:학술대회논문집
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• 2004.12a
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• pp.111-118
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• 2004

A new micro-resolution PIV (Particle Image. Velocimetry) has been developed. To investigate transient phenomena in a microfluidic device, Dynamic micro-PIV system was realized by combining a high-speed camera and a CW(Continuous Wave) laser. The technique was applied to a micro-counter-current flow, consisting of water and butyl acetate. The velocity fields of water in the micro counter-current flow were visualized for a time resolution of 500 $\{mu}s$ and a spatial resolution of 2.2 x 2.2 $\{mu}m$. Using the Dynamic micro-PIV technique, the vortex-like motions of fluorescent particles at the water-butyl acetate interface were captured clearly

• Journal of Environmental Science International
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• v.23 no.2
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• pp.275-289
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• 2014

Asian dust (or yellow sand) occurring mainly in spring in East Asia is affected by the distribution of weather systems. This study was performed to investigate the characteristics of suspended particulate for Asian dust at Busan, Korea in 20 March 2010, which was one of the extreme case for the last 10 years. There was used the data of weather chart, satellite, automatic weather system (AWS), $PM_{10}$, laser particle counter (LPC), and backward trajectories model. In synoptically, the high pressure was located in the northwestern part and low pressure was located in the northeastern part of Korea. The strong westerly winds from surface to upper layer makes it possible to move air masses rapidly. Air masses passing through Gobi Desert in Mongolia and Inner Mongolia plateau covered the entire Korean peninsula. As the results of aerosol analysis, $PM_{10}$ concentration at Gudeok mountain in Busan was recorded $2,344{\mu}g/m^3$ in 2300 LST 20 March 2010 and their concentration was markedly increased at coarse mode particle. In surface condition, westerly wind about 3 ~ 5 m/s was dominant and small particles of $0.3{\sim}0.5{\mu}m$ were distributed on the whole. In heavy metal components analysis, the elements from the land was predominated.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.55-59
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• 2010

In this study, we developed nonvolatile residue (NVR) real-time monitoring system to measure the nonvolatile residue particle in ultra pure water (UPW). This device has a capability of measuring 4 different channels, i.e., 10 nm, 30 nm, 50 nm, and 100 nm. Until now, the light scattering method to detect RAE(residue after evaporation) was the only choice. However, this method can detect RAE larger than ca. 50 nm. In ultra pure water, RAE particles are usually very small and hard to detect with conventional laser scattering devices. To detect very small RAEs, a new system is developed and tested. The system consists of an atomizer that generates RAE particles and a four channel condensation particle counter (CPC). During the several months' operation in manufacturing line, the system was successfully tested and showed reliable results.

• Journal of Pharmaceutical Investigation
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• v.18 no.1
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• pp.9-13
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• 1988

Physicochemical properties of oil in water microemulsions containing soybean oil and egg phosphatide were observed for 3 weeks under the storage condition of $4^{\circ}C$ refrigerator. Changes in major fatty acid content, particle size distribution, rheogram, acid value and pH value were measured by gas chromatograph, laser particle sizer, Coulter counter and rheometer. From above experiments following conclusions were obtained; 1) Mean particle diameter was shifted from 240 to 266mm. 2) No significant changes were observed in the content of major fatty acids of soybean oil, rheogram, acid value and pH value.

• Transactions of the Korean Society of Automotive Engineers
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• v.6 no.6
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• pp.202-209
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• 1998

For development of SDI(Spark-ignited Direct Injection) engine, stratified mixture formation with adequate strength at spark plug was required in wide range of engine operating conditions. So, spray structure under high ambient pressure and spray distribution after impingement on piston bowl in motoring engine was visualized by using laser equipments. Also, incylinder bulk flow structure was measured by using PIV (Paiticle Image Velocimetry) system. Counter-rotating tumble port and bowl piston was found effective to conserve bulk motion directed to spark plug in compression stroke. In addition, mask attached near valve seat in intake port was proposed to attenuate conventional tumble component and enhance counter-rotating tumble component.

• Journal of Environmental Science International
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• v.17 no.6
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• pp.699-709
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• 2008

To understand the development mechanism of the aerosols in the surface boundary layer, the variation in the aerosol number concentration due to the divergence and convergence of the wind fields was investigated. The aerosol number concentration was measured in the size ranges of $0.3{\sim}10.0{\mu}m$ using a laser particle counter(LPC) from 0000 LST on 03 Feb. to 0600 LST on 07 Feb. 2004 at Mokpo in Korea during snowfall. The Velocity Azimuth Display(VAD) technique was used to retrieve the radar wind fields such as the horizontal wind field, divergence, and deformations including the vertical air velocity from a single Doppler radar. As a result, the distribution of the aerosol number concentration is apparently different for particles larger than $1{\mu}m$ during snowfall, and it has a tendency to increase at the beginning of the snowfall. The increase and decrease in the aerosol concentration due to the convergence and divergence of the wind fields corresponded to the particles with diameters greater than $1{\mu}m$. It is found that the fluctuations in the aerosol number concentration are well correlated with the development and dissipation of snowfall radar echoes due to the convergence and divergence of horizontal wind fields near the surface boundary layer in the inland during the snowfall.

• Transactions on Electrical and Electronic Materials
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• v.5 no.4
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• pp.143-147
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• 2004

Surface defects and bulk defects on SOI wafers are studied. Two new metrologies have been proposed to characterize surface and bulk defects in epitaxial layer transfer (ELTRAN) wafers. They included the following: i) laser scattering particle counter and coordinated atomic force microscopy (AFM) and Cu-decoration for defect isolation and ii) cross-sectional transmission electron microscope (TEM) foil preparation using focused ion beam (FIB) and TEM investigation for defect morphology observation. The size of defect is 7.29 urn by AFM analysis, the density of defect is 0.36 /cm$^2$ at as-direct surface oxide defect (DSOD), 2.52 /cm$^2$ at ox-DSOD. A hole was formed locally without either the silicon or the buried oxide layer (Square Defect) in surface defect. Most of surface defects in ELTRAN wafers originate from particle on the porous silicon.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.7
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• pp.834-841
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• 2004

Experimental study on the three-dimensional topology of hairpin packet structures in turbulent boundary layers were carried out. Two different Reynolds number based on momentum thickness, Re$\sub$$\theta$/=514 and 934 were generated in a blowing type wind tunnel under the condition of zero pressure gradient. Simultaneous measurements of velocity fields at a wall-normal plane and wall-parallel plane by a plane PIV and a Stereo-PIV systems. The two Nd:Yag laser systems and three CCD cameras were synchronized to obtain instantaneous velocity fields at the same time. To avoid optical noise at the crossing line by the two laser light sheets, a new optical arrangement using polarization was applied. The obtained velocity fields show the existence of hairpin packet structure vividly and the idealized hairpin vortex signature is confirmed by experiment. Two counter-rotating vortex pair which reflects the cutting plane of hairpin legs are found both side of a strong streaky structure when the wall-normal plane cuts the hairpin head.