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http://dx.doi.org/10.11627/jkise.2013.36.2.1

A Study of Developing Wear Tester to Measure and Minimize Particle Levels in Cleanroom  

Park, Kwang Hee (Kumoh National Institute of Technology Graduate School of Consulting)
Noh, Kwonhak (LG Display)
Chang, Sung Ho (Kumoh National Institute of Technology Graduate School of Consulting)
Lee, Jonghwan (Kumoh National Institute of Technology Graduate School of Consulting)
Cha, Young Cheul (Kumoh National Institute of Technology Graduate School of Consulting)
Chun, Hae Dong (Kumoh National Institute of Technology Graduate School of Consulting)
Publication Information
Journal of Korean Society of Industrial and Systems Engineering / v.36, no.2, 2013 , pp. 1-7 More about this Journal
Abstract
Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particles and bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies producing precision machines and electrical parts essentially have industrial cloom facilities and clean technologies to produce defects free products due to particles. Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of sub-micro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.
Keywords
Particle Counter; Clean Room;
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  • Reference
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