• 제목/요약/키워드: laser etching

검색결과 256건 처리시간 0.023초

Copper Seed Layer 형성 및 도금 첨가제에 따른 Copper Via Filling (Formation of Copper Seed Layers and Copper Via Filling with Various Additives)

  • 이현주;지창욱;우성민;최만호;황윤회;이재호;김양도
    • 한국재료학회지
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    • 제22권7호
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    • pp.335-341
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    • 2012
  • Recently, the demand for the miniaturization of printed circuit boards has been increasing, as electronic devices have been sharply downsized. Conventional multi-layered PCBs are limited in terms their use with higher packaging densities. Therefore, a build-up process has been adopted as a new multi-layered PCB manufacturing process. In this process, via-holes are used to connect each conductive layer. After the connection of the interlayers created by electro copper plating, the via-holes are filled with a conductive paste. In this study, a desmear treatment, electroless plating and electroplating were carried out to investigate the optimum processing conditions for Cu via filling on a PCB. The desmear treatment involved swelling, etching, reduction, and an acid dip. A seed layer was formed on the via surface by electroless Cu plating. For Cu via filling, the electroplating of Cu from an acid sulfate bath containing typical additives such as PEG(polyethylene glycol), chloride ions, bis-(3-sodiumsulfopropyl disulfide) (SPS), and Janus Green B(JGB) was carried out. The desmear treatment clearly removes laser drilling residue and improves the surface roughness, which is necessary to ensure good adhesion of the Cu. A homogeneous and thick Cu seed layer was deposited on the samples after the desmear treatment. The 2,2'-Dipyridyl additive significantly improves the seed layer quality. SPS, PEG, and JGB additives are necessary to ensure defect-free bottom-up super filling.

상아질 손상 후 흰쥐 대구치 치수의 calcitonin gene-related peptide(CGRP) 함유 신경섬유 분포에 관한 연구 (A STUDY ON THE DISTRIBUTION OF CALCITONIN GENE-RELATED PEPTIDE CONTAINING NERVE FIBERS IN RAT PULP FOLLOWING DENTINAL INJURY)

  • 문주훈;박상진;민병순;최호영;최기운
    • Restorative Dentistry and Endodontics
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    • 제24권1호
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    • pp.100-115
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    • 1999
  • The purpose of this study was to investigate the distribution of calcitonin gene-related peptide containing nerve fibers in rat pulp after dentinl injury by means of immunohistochemistry and confocal laser scanning microscope. The Spague-Dawley rats weighing about 250-300gm were used. The animals were devided into normal control and experimental groups. Experimental animals were sacrified 1, 2, 4, 7, 10, 21days after dentinal injury (dentin cutting, and then acid etching with 35% phosphoric acid) on the maxillary molar teeth. The maxillary teeth and alveolar bone were removed and immersed in the 4% paraformaldehyde in 0.1M phosphate buffer (pH 7.4), then were decalcified with 15% formic acid for 10 days. Serial frozen $50{\mu}m$ thick sections were cut on a cryostat. The rabbit CGRP antibody was used as a primary antibody with a dilution of 1:2000 in 0.01M PB. The sections were incubated for 48 hours at $4^{\circ}C$, and placed into biotinylated antirabbit Ig G as a secondary anti body with dilution of 1:200 in 0.01M PB and incubated in ABC(avidin-biotin complex). The peroxidase reaction was visualized by incubating the sections in 0.05% 3,3 diaminobenzidine tetrahydrochloride containing 0.02% $H_2O_2$. For the confocal laser scanning microscopic examination, Primary antibody reaction was same as immunoperoxidase stainning, but fluorescein isothiocyanate(FITC)-conjugate antirabbit IgG as a secondary antibody was used. The confocal laser scanning microscope was used for the examination. A series of images of optical sections was collected with a 20x objective at $3{\mu}m$ intervals throughout the depth of specimen. FITC fluerescence was registrated through a 488nm and 568nm excitation filter, and images were saved on optical disk. The stereoscopic images and three dimentionnal images were reconstructed by computer software, and then were analyzed. The results were as follows : 1. In normal control group, CGRP containing nerve fibers were coursed through the root with very little branching, and then formed a dense network of terminals in coronal pulp. 2. A slight increase in CGRP containing nerve fibers at 1 and 2day postinjury was noted subjacent to the injury site. In the 4day group, there were an extensive increase in the number of reactive fibers, followed by a partial return toward normal levels at 7~10 day postinjury, and return by 21days. 3. The sprouting of the CGRP containing nerve fibers was evident within 2day after dentinal injury, and by 4days there was a maximal increased, but was decreased at 7days and returned to normal 10~21 day postinjury. 4. In confocal laser scanning microscopic exammination, the distinct distribution pattern and sprouting reaction of CGRP containing nerve fibers were observed in stereoscopic images and three dimentional images. These results suggest that CGRP containing nerve fiber can be important role in the response to dental injury and pain regulation.

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Microtube Light-Emitting Diode Arrays with Metal Cores

  • Tchoe, Youngbin;Lee, Chul-Ho;Park, Junbeom;Baek, Hyeonjun;Chung, Kunook;Jo, Janghyun;Kim, Miyoung;Yi, Gyu-Chul
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.287.1-287.1
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    • 2016
  • Three-dimensional (3-D) semiconductor nanoarchitectures, including nano- and micro- rods, pyramids, and disks, are emerging as one of the most promising elements for future optoelectronic devices. Since these 3-D semiconductor nanoarchitectures have many interesting unconventional properties, including the use of large light-emitting surface area and semipolar/nonpolar nano- or micro-facets, numerous studies reported on novel device applications of these 3-D nanoarchitectures. In particular, 3-D nanoarchitecture devices can have noticeably different current spreading characteristics compared with conventional thin film devices, due to their elaborate 3-D geometry. Utilizing this feature in a highly controlled manner, color-tunable light-emitting diodes (LEDs) were demonstrated by controlling the spatial distribution of current density over the multifaceted GaN LEDs. Meanwhile, for the fabrication of high brightness, single color emitting LEDs or laser diodes, uniform and high density of electrical current must be injected into the entire active layers of the nanoarchitecture devices. Here, we report on a new device structure to inject uniform and high density of electrical current through the 3-D semiconductor nanoarchitecture LEDs using metal core inside microtube LEDs. In this work, we report the fabrications and characteristics of metal-cored coaxial $GaN/In_xGa_{1-x}N$ microtube LEDs. For the fabrication of metal-cored microtube LEDs, $GaN/In_xGa_{1-x}N/ZnO$ coaxial microtube LED arrays grown on an n-GaN/c-Al2O3 substrate were lifted-off from the substrate by wet chemical etching of sacrificial ZnO microtubes and $SiO_2$ layer. The chemically lifted-off layer of LEDs were then stamped upside down on another supporting substrates. Subsequently, Ti/Au and indium tin oxide were deposited on the inner shells of microtubes, forming n-type electrodes of the metal-cored LEDs. The device characteristics were investigated measuring electroluminescence and current-voltage characteristic curves and analyzed by computational modeling of current spreading characteristics.

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Si을 기판으로한 $P_2O_5-SiO_2$ 광도파로의 제작 및 손실측정 (Fabrication and loss measurement of $P_2O_5-SiO_2$ optical waveguides on Si)

  • 이형종;임기건;정창섭;정환재;김진승
    • 한국광학회지
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    • 제3권4호
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    • pp.258-265
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    • 1992
  • 저압화학기상증착법으로 Si 기판에 $P_{2}O_{5}-SiO_{2}$ 광도파박막계를 제작하였다. 제작된 박막의 광도파손실율은 1.65dB/cm이었으나 $1100^{\circ}C$에서 열처리한 뒤에는 0.1dB/cm 이하로 크게 감소하였다. 레이저 노광법과 활성이온식각법으로 광도파로를 제작하여 $1100^{\circ}C$에서 열처리하였다. 열처리 결과 도파로 코어의 모양은 사각형에서 반원형으로 바뀌었으며 0.6328$\mu$m에서 0.03dB/cm 그리고 1.53$\mu$m에서 0.04dB/cm의 낮은 도파손실율을 나타내었다. 도파로의 도파손실율이 감소하는 이유로는 고온 열처리과정에서 첫째 박막조직과 결합하여 광흡수를 일으키는 수소가 확산 방출되고 둘째 광산란을 일으키는 도파로의 거친 계면 및 박막조직이 재형성되며, 셋째 식각법으로 도파로를 만들때 생기는 도파로 코어의 거친 계면이 매끄럽게되어 도파광의 산란손실이 중어들기 때문으로 생각된다.

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GaN계 수직형 발광 다이오드를 위한 N-face n-GaN의 인듐계 저저항 오믹접촉 연구 (Low Resistance Indium-based Ohmic Contacts to N-face n-GaN for GaN-based Vertical Light Emitting Diodes)

  • 강기만;박민주;곽준섭;김현수;권광우;김영호
    • 대한금속재료학회지
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    • 제48권5호
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    • pp.456-461
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    • 2010
  • We investigated the In-based ohmic contacts on Nitrogen-face (N-face) n-type GaN, as well as Ga-face n-type GaN, for InGaN-based vertical Light Emitting Diodes (LEDs). For this purpose, we fabricated Circular Transfer Length Method (CTLM) patterns on the N-face n-GaN that were prepared by using a laser-lift off method, as well as on the Ga-face n-GaN that were prepared by using a dry etching method. Then, In/transparent conducting oxide (TCO) and In/TiW schemes were deposited on the CTLM in order for low resistance ohmic contacts to form. The In/TCO scheme on the Ga-face n-GaN showed high specific contact resistance, while the minimum specific contact resistance was only 3${\times}$10$^{-2}$ $\Omega$-cm$^{2}$ after annealing at 300${^{\circ}C}$, which can be attributed to the high sheet resistance of the TCO layer. In contrast, the In/TiW scheme on the Ga-face n-GaN produced low specific contact resistance of 2.1${\times}$10$^{5}$ $\Omega$-cm$^{2}$ after annealing at 500${^{\circ}C}$ for 1 min. In addition, the In/TiW scheme on the N-face n-GaN also resulted in a low specific contact resistance of 2.2${\times}$10$^{-4}$ $\Omega$-cm$^{2}$ after annealing at 300${^{\circ}C}$. These results suggest that both the Ga-face n-GaN and N-face n-GaN.

산-처리 조건이 RBM처리한 티타늄 임플란트의 표면 특성에 주는 영향 (Effects of acid-treatment conditions on the surface properties of the RBM treated titanium implants)

  • 이한아;석수황;이상혁;임범순
    • 대한치과재료학회지
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    • 제45권4호
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    • pp.257-274
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    • 2018
  • 본 논문에서는 순수 티타늄(cp-Ti) 임플란트를 SLA (Sandblasting with Large grit and Acid) 처리할 때 산-처리 용액의 유형, 산-처리 온도 및 산-처리 시간 등이 티타늄 표면에 주는 영향을 평가하고자 하였다. 원판형의 cp-Ti 시편을 준비하여 표면을 인산칼슘계 세라믹 분말로 RBM (Resorbable Blast Media) 처리하였다. 산-처리 용액으로 염산을 30 vol%로 고정하고 황산의 농도를 10, 20, 30, 35 vol%로 증가시키며 혼합한 용액에 증류수를 추가하여 4종의 산-처리 용액을 준비하였다. 실험군은 4종의 산-처리 용액, 3 종의 처리온도 및 3 종의 처리시간 등 36 가지로 분류하여 실험군당 4개의 시편을 산-처리하였다. 산-처리 전 후 시편 무게를 전자저울로 측정하여 무게 감소비율을 계산하였고, 공초점주사전자현미경으로 표면거칠기를 측정하였다. X-선 회절분석기(XRD)로 XRD 패턴을 측정하였고, 주사전자현미경으로 표면 형상을 관찰하였으며, 에너지 분산형 분석기(EDX)와 광전자분광법(XPS)로 표면성분을 분석하였다. 무게 감소비율과 표면거칠기 측정값은 Tukey-multiple comparison test (p = 0.05)로 통계 분석하여 다음의 결과를 얻었다. 산-처리에 따른 티타늄 시편의 무게 감소는 황산의 농도 및 산-처리 용액의 온도가 높을수록 유의하게 증가하였다. 산-처리한 티타늄의 표면 거칠기는 산-처리 조건(황산 농도, 온도, 시간)에 일정한 영향을 받지 않았다. XRD 분석에서 산-처리한 모든 시편에서 티타늄(${\alpha}-Ti$)과 수소화 티타늄($TiH_2$) 결정상이 관찰되었고, XPS 분석으로 티타늄 표면에 얇은 n산화 티타늄 층이 형성된 것을 알 수 있었다. $90^{\circ}C$ 산-용액에서 처리할 경우 티타늄 표면이 과도하게 용해될 수 있으므로 주의하여야 한다.