• Title/Summary/Keyword: laser drilling

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Laser Processing Technology in Semiconductor and Display Industry (반도체 및 디스플레이 산업에서의 레이저 가공 기술)

  • Cho, Kwang-Woo;Park, Hong-Jin
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.6
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    • pp.32-38
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    • 2010
  • Laser material processing technology is adopted in several industry as alternative process which could overcome weakness and problems of present adopted process, especially semiconductor and display industry. In semiconductor industry, laser photo lithography is doing at front-end level, and cutting, drilling, and marking technology for both wafer and EMC mold package is adopted. Laser cleaning and de-flashing are new rising technology. There are 3 kinds of main display industry which use laser technology - TFT LCD, AMOLED, Touch screen. Laser glass cutting, laser marking, laser direct patterning, laser annealing, laser repairing, laser frit sealing are major application in display industry.

Development of Drill Geometry for Burr Minimization in Drilling (구멍가공시 버형성 최소화를 위한 드릴형상 개발)

  • 장재은;고성림
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.911-914
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    • 1997
  • This Experiment was carried out for bur minimization in drilling. New drill geometries are proposed to minimize the burr formation in drilling operation. Three types of drills are made, champer, round and step drill. The burr formed in first cutting by front cutting edge ca be removed in second cutting by the cutting edges in chamfer, round edge and step. New burrs are formed by second cutting and can be minimized according to the change of drill geometry like, chamfer size and angle, corner radius in round drill and step size and angle in step drill. To measure the burr formed in drilling, laser sensor is used.

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Practical Applications of DNA Marker-Assisted Selection and OPU-Derived IVF Embryo Transfer for the Production of High Quality Meat in Hanwoo II. Production of IVF Embryos Derived Transvaginal Ovum Pick-up from DNA Marker-Proved Hanwoo (유전자 분석을 통하여 선발된 한우로부터 초음파 유래 체외수정란 이식에 의한 고품질 한우 생산기술의 실용화 II. DNA 검정우로부터 초음파 유래 체외수정란의 생산에 관한 연구)

  • 박희성;이지삼;진동인;박준규;홍승표;이명열;정장용
    • Journal of Embryo Transfer
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    • v.16 no.3
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    • pp.193-201
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    • 2001
  • This study was designed to examine the factors affecting in fertilization and development of embryos in vitro, and to examine whether zone drilling by laser irradiation can improve the hatching rate of IVF embryos from DNA marker-proved Hanwoo. DNA markers related to marbling score were identified using DNA fingerprinting with Ml3 probe and restriction enzyme Hae III. Oocytes were aspirated from immature ovarian follicles using a combined method of rectal ovarian-palpation and transvaginal ultrasound-guidance(6.5MHz) under local anesthesia. The aspirated oocytes were washed twice with fresh D-PBS containing 5% FBS and were rewashed 4 to 5 times with TCM-199 containing 5% FBS. A morphological grade of I to IV was assigned to each oocyte. Data were analyzed using the GLM procedure of SAS. Sperm separation methods did not have any significant effect on cleavage or developmental abilities of IVF embryos. Significantly(P<0.05) higher cleavage rate was observed in embryos from GI(60.0%, 3/5), GII(69.2%, 18/26) and GIII(62.1%, 59/95) compared to embryos from GIV oocytes(36.2%, 25/69). And the developmental rate to blastocyst stage was higher(P<0.05) in embryos from GI(33.3%, 1/3) and GII oocytes(38.9%, 7/18) than those from GIII(16.9%,10/59) and GIV oocytes(4.0%, 1/25). There was no significant difference in development of IVF embryos to blastocyst by media for in vitro culture. Proportion of hatched blastocyst was significantly(P<0.05) higher in embryos received zona drilling by laser than those of non-drilled.

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High power CO$_{2}$laser beam welding of ASIA 316 stainless steel

  • 김재도;조용무
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1991.04a
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    • pp.321-327
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    • 1991
  • High power laser beams are used in a wide variety of materials processing applications such as cutting, welding, drilling and surface treatment. The CO$\sub$2/ laser is increasingly used in laser beam welding because of the highly potential advantages. High power laser welding is a high energy density, no filler metals and low heat input process to join metals. As the comparison with the conventiona welding, precision work and good fit-up to join the metals are required and maintenance is expensive at present. The principal variables of laser beam welding are the laser beam power, travel speed and bean spot size. The penetration depth during laser beam welding is directly related to the power density of the laser beam. Generally, for a constant beam size, the penetration depth increases with increasing laser beam power.

Laser Micromachining of Submicron Aperture for Electronbeam Microcolumn Application using Piezo Q-Switched Nd:YAG Laser

  • S.J. Ahn;Kim, D.W.;Park, S.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.78-78
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    • 1999
  • Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

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Material Processing by Laser (레이저를 이용한 재료가공)

  • 황경현;이성국
    • Korean Journal of Optics and Photonics
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    • v.1 no.1
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    • pp.98-106
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    • 1990
  • Lasers are used increasingly for specialized engineering applications such as drilling, profile cutting, welding and surface heat-treatment(hardening, alloying, annealing0 of metals and non-metals. The most important characteristics of lasers used for these materials-processing applications are reviewed, with special emphasis on the importance of the controlled heating process. In addition to these processes, some optical devices and supplementary equipment used in laser processing are introduced. Finally, some examples shows the wide variety of laser capability for substitution of traditional materials processing.

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Excimer laser induced ablation of PMMA and PET (엑시머 레이저를 이용한 PMMA와 PET의 가공)

  • Shin, Dong-Sik;Lee, Je-Hoon;Seo, Jung;Kim, Do-Hoon
    • Laser Solutions
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    • v.6 no.1
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    • pp.33-40
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    • 2003
  • The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.

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Optic Module for Laser Integrated Machine (레이저 복합가공기용 광학모듈의 제작)

  • Shin, Dong-Sig;Lee, Jae-Hoon;Suh, Jeong
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1475-1480
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    • 2007
  • In the last few years, lasers have found new applications in production engineering as tools for surface treatment, cutting, welding, drilling and marking. So far, the laser has mainly been used in special laser processing machines ('laser-only') directly integrated into a production line or serving as stand-alone stations in the workshop. By combining conventional metal cutting technologies with laser processes in one machine, complete processing of a workpiece with different technologies in one setting can be realized. The main advantages are a reduction of the material flow between the production machines, which leads to a reduction in processing time and logistics, and an enhancement of manufacturing quality due to the processing in one setting. In addition to this approach new processing technologies such as laser-assisted machining are possible.

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Laser-induced Thermochemical Wet Etching of Titanium for Fabrication of Microstructures (레이저 유도 열화학 습식에칭을 이용한 티타늄 미세구조물 제조)

  • 신용산;손승우;정성호
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.4
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    • pp.32-38
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    • 2004
  • Laser-induced thermochemical wet etching of titanium in phosphoric acid has been investigated to examine the feasibility of this method fur fabrication of microstructures. Cutting, drilling, and milling of titanium foil were carried out while examining the influence of process parameters on etch width, etch depth, and edge straightness. Laser power, scanning speed of workpiece, and etchant concentration were chosen as major process parameters influencing on temperature distribution and reaction rate. Etch width increased almost linearly with laser power showing little dependence on scanning speed while etch depth showed wide variation with both laser power and scanning speed. A well-defined etch profile with good surface quality was obtained at high concentration condition. Fabrication of a hole, micro cantilever beam, and rectangular slot with dimension of tess than 100${\mu}{\textrm}{m}$ has been demonstrated.