• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.382-386
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• 2012

A femtosecond laser with 775nm central wavelength and 150 fs of temporal pulse width was used for multi layered glass cutting applications. Ultrashort pulse was effectively used for clean glass cutting with $50{\mu}m$ depth and minimum cutting width. Laser beam was split to two stages and focused on the top surfaces of each layer. Ablation threshold of used glass was measured to be $2.59J/cm^2$. In experiments, 200mW laser power and 1mm/s scanning speed was used for preliminary experiment. Air gap was the major defect occurring parameter and laser power was less sensitive to glass cutting in the experiment. The maximum cutting speed was measured to be 60mm/min with 2kHz, however, Maximum 3m/min cutting speed can be achievable with a commercially available laser with 100kHz.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.59-62
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• 2013

At an infra-red (IR) wavelength of 1,064 nm, a diode-pumped Q-switched $Nd:YVO_4$ laser was used for the direct patterning of various transparent conductive oxide (TCO) thin films on glass substrate. With various laser beam conditions, the laser ablation results showed that the indium tin oxide (ITO) film was removed completely. In contrast, zinc oxide (ZnO) film was not etched for any laser beam conditions and indium gallium zinc oxide (IGZO) was only ablated with a low scanning speed. The difference in laser ablation is thought to be due to the crystal structures and the coefficient of thermal expansion (CTE) of ITO, IGZO, and ZnO. The width of the laser-patterned grooves was dependent on the film materials, the repetition rate, and the scanning speed of the laser beam.

• Design & Manufacturing
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• v.15 no.3
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• pp.26-31
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• 2021

In this study, laser-induced periodic surface structure (LIPSS) was fabricated on Ni, Si, and GaAs samples using a flat-top beam with a uniform energy distribution that was fabricated using a Gaussian femtosecond laser with a mechanical slit and tube lens. Unlike the Gaussian beam, the flat-top beam has a uniform beam profile, therefore the center and the periphery of the fabricated LIPSS have similar line periodicity. In addition, LIPSS was obtained not only in metals but also in metalloids and metals and metalloid compounds by using the narrow pulse width characteristic of a femtosecond laser.

• Electrical & Electronic Materials
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• v.9 no.6
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• pp.593-599
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• 1996

Laser scribing of silicon plays an important role in metallization including the grid pattern and the front surface geometry which means aspect ratio of metal contacts. To make a front metal electrode of buried contact solar cell, we used ND:YAG lasers that deliver average 3-4W at TEM$\_$00/ mode power to sample stage. The Q-switched Nd:YAG laser of 1.064 gm wavelength was used for silicon scribing with 20-40.mu.m width and 20-200.mu.m depth capabilities. After silicon slag etching, the groove width and depth for buried contact solar cell are -20.mu.m and 30-50.mu.m respectively. Using MEL 40 Nd:YAG laser system, we can scribe the silicon surface with 18-23.mu.m width and 20-200.mu.m depth controlled by krypton arc lamp power, scan speed, pulse frequency and beam focusing. We fabricated a buried contact Silicon Solar Cell which had an energy conversion efficiency of 18.8 %. In this case, the groove width and depth are 20.mu.m and 50.mu.m respectively.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1121-1126
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• 2014

To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.

• Laser Solutions
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• v.11 no.4
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• pp.7-12
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• 2008

Laser Transformation Hardening(LTH) is one branch of the laser surface modification processes. A lot of energy is needed for the LTH process to elevate workpiece surface to temperature of the austenite transformation($A_3$), which results from utilizing a beam with a larger size and lower power density comparatively. This study is related to the surface hardening for the rod-shaped carbon steel by the high power diode laser whose beam absorptivity is better than conventional types of lasers such as $CO_2$ or Nd:YAG laser. Because a beam proceeds on the rotating specimen, the pretreated hardened-phase can be tempered and softened by the overlapping between hardened tracks. Accordingly, the longitudinal hardness measurement and observation of the micro structure was carried out for an assessment of the hardening characteristics. In addition, a hardening characteristics as a hardenability of materials was compared in the point of view of the hardness distribution and hardening depth and width.

• Korean Journal of Materials Research
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• v.11 no.9
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• pp.792-796
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• 2001

For electron beam lithography and SEM(scanning electron microscopy) applications, miniaturized electrostatic lenses called a microcolumn have been fabricated. In this paper, we report the fabrication technique for 20~30$\mu\textrm{m}$ apertures of electron lenses based on silicon and Mo membrane using an active Q-switched Nd:YAG laser. Experimental conditions of laser micromachining for silicon and Mo membrane are improved. The geometrical structures, such as the diameter and the preciseness of the micron-size aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot.

• Korean Journal of Optics and Photonics
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• v.12 no.6
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• pp.496-502
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• 2001

We generated a nondiffracting beam and investigated its intensity profile on propagation. We first obtained an annular output beam from Nd:YAG laser with a negative branch unstable ring resonator and, using a 1m focal length lens, we generated a Bessel- Gauss beam. The inner radius of the annular output beam was 2.57 mm and the ring width was 0.145 mm. The intensity profile of the nondiffracting beam did not show any appreciable diffraction up to 33 m distance from the focal lens. This result was compared with the theory.

• Laser Solutions
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• v.13 no.2
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• pp.6-9
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• 2010

In printed electronics, printing rolls are used to transfer electronic ink onto a flexible substrate. Generally printing rolls are being made by the indirect laser method which is based on the etch process, thus not environment-friendly and not suitable for making a large printing roll. For the pursuit of making a large printing roll for mass printing of electronic devices, we have directly engraved micro-patterns into a Zn plated printing roll using a 30W pulse-modulated fiber laser. We have successfully engraved line patterns ranging from about 15-30${\mu}m$ in width.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.2
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• pp.216-223
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• 2010

The general way to process the surface by means of the laser was heat treatment for strengthening the surface hardness. They have used the laser for changing the property of the surface, especially for metal. Generally, it is recent increasing tendency to use the thin plate panel for making things smaller and lightweight. However, thin plate should be strengthened or let the thin plate panel have moment of inertia by means of engraving the groove or wave on them for lightweight and strengthening. Therefore it is expected that the thin plate panel can be harder and more stable through processing the metal surface by laser beam irradiation and the hardness of thin plate possibly can be also changed how many parts of them are harden. Through this research, it can be grasped how the hardness and mechanical characteristic changes according to width and depth of groove by laser affect the max stress by the ratio of $A_H/A_T$ (hardening area/total area) and characteristic of displacement and structural characteristic for making the thin plate harder by the strengthening metal surface of thin plate by laser through the experiment and analysis of FEA can be presented.