• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.175-184
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• 2001

In this study, the improved throughput and stability in device fabrication could be obtained by applying CMP process to STi structue in 0.18 um semiconductor device. To employ the CMP process in STI structure, the Reverse Moat Process used to be added after STI Fill, as a result, the process became more complex and the defect were seriously increased than they had been,. Removal rate of each thin film in STI CMP was not uniform, so, the device must have been affected. That is, in case of excessive CMP, the damage on the active area was occurred, and in the case of insufficient CMP nitride remaining was happened on that area. Both of them deteriorated device characteristics. As a solution to these problems, the development of slurry having high removal rate and high oxide to nitride selectivity has been studied. The process using this slurry afford low defect levels, improved yield, and a simplified process flow. In this study, we evaluated the 'High Selectivity Slurry' to do a global planarization without reverse moat step, and also we evaluated EPD(Eend Point Detection) system with which 'in-situ end point detection' is possible.

• Fire Science and Engineering
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• v.32 no.3
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• pp.116-122
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• 2018

In Chemical, Biological, Radiological and Nuclear (CBRN) disaster, integrated and optimized equipment package including stretcher, isolation unit, patient monitoring and treatment equipment is essential to achieve proper treatment and prevent secondary contamination. The purpose of this study was to evaluate the efficiency and ease of use of integrated CBRN disaster equipment package for disaster medical response. This study was a randomized crossover study using a manikin simulation for emergency medical technitian (EMT). All participants used the existing devices and prototype of integrated CBRN disaster equipment package alternately. Efficiency was measured by time from vital sign change to detection or treatment application. Ease was use was measured by questionnaires for each patient monitor, stretcher care and isolation unit. 12 EMTs were enrolled. hypoxia-detection time of integrated equipment group was significantly shorter than existing equipment group (4.9 s (3.8-3.9) vs 3.5 s (2.5-3.9), p < 0.05). There was decreasing tendency of ECG change detection and facial mask oxygen supply but no statistical significance was observed. Overall satisfaction of patient monitoring device in integrated equipment group was significantly higher than existing devices (4(3.5-5) vs 3(3-3), p < 0.05). The use of integrated CBRN disaster equipment package shortened the hypoxia detection time and improved usability of vital sign monitor compared to existing devices.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.25 no.5
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• pp.313-320
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• 2015

A 2-axis gimbal-type X-band antenna has been widely used to effectively transmit the high resolution image data from the observation satellite to the desired ground station. However, a discontinuous stepper motor activation for rotating the pointing mechanism in azimuth and elevation directions induces undesirable micro-vibration disturbances which can result in the image quality degradation of a high-resolution observation satellite. To enhance the image quality of the observation satellite, attenuating the micro-vibration induced by an activation of the stepper motor for rotational movements of the antenna is important task. In this study, we proposed a low-rotational-stiffness blade gear applied to the output shaft of the stepper motor to obtain the micro-vibration isolation performance. The design of the blade gear was performed through the structure analysis such that this gear is satisfied with the margin of safety rule under the derived torque budget. In addition, the micro-vibration isolation performance of the blade gear was verified through the micro-vibration measurement test using the dedicated micro-vibration measurement device proposed in this study.

• Computers and Concrete
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• v.21 no.5
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• pp.495-504
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• 2018

The possibility of earthquakes in vulnerable regions indicates that efficient technique is required for seismic protection of buildings. During the recent decades, the concept is moving towards the insertion of base isolation on seismic prone buildings. So, investigation of structural behavior is a burning topic for buildings to be isolated in base level by bearing device. This study deals with the incorporation of base isolation system and focuses the changes of structural responses for different types of Lead Rubber Bearing (LRB) isolators. A number of sixteen model buildings have been simulated selecting twelve types of bearing systems as well as conventional fixed-base (FB) scheme. The superstructures of the high-rise buildings are represented by finite element assemblage adopting multi-degree of freedoms. Static and dynamic analyses are carried out for FB and base isolated (BI) buildings. The dynamic analysis in finite element package has been performed by the nonlinear time history analysis (THA) based on the site-specific seismic excitation and compared employing eminent earthquakes. The influence of the model type and the alteration in superstructure behavior of the isolated buildings have been duly assessed. The results of the 3D multistory structures show that the lateral forces, displacement, inertia and story accelerations of the superstructure of the seismic prone buildings are significantly reduced due to bearing insertion. The nonlinear dynamic analysis shows 12 to 40% lessening in base shear when LRB is incorporated leading to substantial allowance of horizontal displacement. It is revealed that the LRB isolators might be potential options to diminish the respective floor accelerations, inertia, displacements and base shear whatever the condition coincides. The isolators with lower force intercept but higher isolation period is found to be better for decreasing base shear, floor acceleration and inertia force leading to reduction of structural and non-structural damage. However, LRB with lower isolator period seems to be more effective in dropping displacement at bearing interface aimed at reducing horizontal shift of building structure.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.8
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• pp.5288-5293
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• 2014

This paper presents the characterization of the wavelength selective switch using a LCOS display instead of a MEMS device, which is a core technology for the next generation ROADM. We constructed a five-port WSS, and examined the basic characteristics of the WSS, such as the response time, beam steering, insertion loss, and channel isolation. The response time of WSS was 11.6 mS and the beam steering characteristics of LCOS was well performed. The measured insertion loss at 40 channels in the c-band were 5.5~12.7 dB and channel isolation was 16~18 dB. Although the characteristics of LCOS-based WSS are inferior to the conventional MEMS-based WSS, it can be improved by additional experiments that secure the technology competitiveness.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.505-508
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• 2004

단열완충재 제품간의 경량충원 저감성능 평가를 객관적이고 신속하게 판별하기 위하여 실험실용 시험장치를 개발하였다. EVA계열 및 EPPㆍEPS계열의 단열완충재들에 대한 경량충격원 시험에서 제품간의 성능비교가 가능하였으며, 동탄성계수 및 손실계수 측정과 병행함으로써 제품들간의 우열성을 보다 정밀하게 평가할 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.406-407
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• 2009

In this paper, presents the Wilkinson power divider used integrated passive device (IPD) technology with excellent performance for personal communication services (PCS). The insertion loss of this power divider is 0.4 dB and the port isolation greater than 25 dB over the entire band. Return losses input and output ports are 18 dB and 19 dB, respectively. The power divider based on SI-GaAs substrate is designed within die size of about $0.775\times0.53\;mm^2$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.50-51
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• 2009

This paper presents integrated passive device (IPD) based on Wilkinson power divider. The simulated 2-way power divider has the insertion loss of 3.123 dB, output isolation of -24.576 dB, input return loss of 26.415 dB, and output return loss of 33.478 dB. The power divider is based on IPD process design simulation at 2.5 GHz for WiMAX (Worldwide Interoperability for Microwave Access) applications. The chip size of power divider is $1\;\times\;1.2\;mm^2$, which is under fabrication.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.28A no.9
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• pp.743-751
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• 1991

This paper presents the 1.5\ulcorner PSA bipolar device which establishes the performance improvement such as the reduction of emitter resistance and substrate junction capacitance. To achieve the above electrical characteristics, RTA process and trench isolation technology were adapted. The emitter resistance and substrate capacitance of npn transistor having 1.5$[\times}6{\mu}m^{2}$emitter area was measured with 63$\Omega$and 28fF, respectively. The minimum propagation delay time shows 121ps at 0.7mW from the measurement of 31 stage ring oscillator.

• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.975-976
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• 2006

The passive type RFID (Radio Frequency Identification) System using Surface Acoustic Wave (SAW) tag at 900 MHz in the range of more than 1 m was fabricated. To improve interrogation range of the system propose a method to increase isolation between transmitter and receiver. This method using a direct conversion architecture achieves a leakage rejection of 10 dB increased compared with conventional system. Measured interrogation range is more than 1 m.