• 한국산업보건학회지
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• 제31권4호
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• pp.342-352
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• 2021

Objectives: This study analyzed the local exposure levels of radiation emitted from the equipment with soft X-ray ionizers to investigate the radiation exposure levels in Liquid Crystal Display(LCD) manufacturing processes. Methods: This study measured the local radiation levels for the equipment installed in two LCD manufacturing companies. The equipment were installed at diverse processes and equipped with various number of ionizers. The local radiation levels were measured on the surface of the equipment by using direct reading equipment, and the measurements were converted into annual effective dose by considering the radiation exposure time of workers. Statistical analyses were performed to investigate the radiation exposure characteristics. Results: Annual effective doses for 97.6% of the equipment being measured were less than 1 mSv. However, the range of annual effective doses was 0.004 mSv ~ 2.167 mSv, which indicated a large variation among the equipment. Statistical analyses of the study found that this large variation was raised due to improper shielding of the equipment rather than process and/or equipment characteristics. To pinpoint the cause of this large variation in annual effective dose, this study improved the shielding of the equipment being radiated over 1 mSv and found that their average effective dose was reduced from 1.604 mSv to 0.126 mSv after shielding improvement. Conclusions: Relatively high exposure levels of radiation were observed in some equipment where their shielding were insufficiently thick and/or sealed. This finding implies that the shielding of the equipment is an important engineering countermeasure to control the radiation exposure levels in industries.

• 한국재료학회지
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• 제29권4호
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• pp.241-251
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• 2019

There are several manufacturing techniques for developing thermionic cathodes for vacuum ultraviolet(VUV) ionizers. The triple alkaline earth metal emitters(Ca-Sr-Ba) are formulated as efficient and reliable thermo-electron sources with a great many different compositions for the ionizing devices. We prepare two basic suspensions with different compositions: calcium, strontium and barium. After evaluating the electron-emitting performance for europium, gadolinium, and yttrium-based cathodes mixed with these suspensions, we selected the yttrium for its better performance. Next, another transition metal indium and a lanthanide metal neodymium salt is introduced to two base emitters. These final composite metal emitters are coated on the tungsten filament and then activated to the oxide cathodes by an intentionally programmed calcination process under an ultra-high vacuum(${\sim}10^{-6}torr$). The performance of electron emission of the cathodes is characterized by their anode currents with respect to the addition of each element, In and Nd, and their concentration of cathodes. Compared to both the base cathodes, the electron emission performance of the cathodes containing indium and neodymium decreases. The anode current of the Nd cathode is more markedly degraded than that with In.

• 한국안전학회지
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• 제31권3호
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• pp.42-46
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• 2016

In LCD Display or semiconductor manufacturing processes, the anti-static technology of glass substrates and wafers becomes one of the most difficult issues which influence the yield of the semiconductor manufacturing. In order to overcome the problems of wafer surface contamination various issues such as ionization in decompressed vacuum and inactive gas(i.e. $N_2$ gas, Ar gas, etc.) environment should be considered. Soft X ray radiation is adequate in air and $O_2$ gas at atmospheric pressure while UV radiation is effective in $N_2$ gas Ar gas and at reduced pressure. At this point of view, the "vacuum ultraviolet ray ionization" is one of the most suitable methods for static elimination. The vacuum ultraviolet can be categorized according to a short wavelength whose value is from 100nm to 200nm. this is also called as an Extreme Ultraviolet. Most of these vacuum ultraviolet is absorbed in various substances including the air in the atmosphere. It is absorbed substances become to transit or expose the electrons, then the ionization is initially activated. In this study, static eliminator based on the vacuum ultraviolet ray under the above mentioned environment was tested and the results show how the ionization performance based on vacuum ultraviolet ray can be optimized. These vacuum ultraviolet ray performs better in extreme atmosphere than an ordinary atmospheric environment. Neutralization capability, therefore, shows its maximum value at $10^{-1}{\sim}10^{-3}$ Torr pressure level, and than starts degrading as pressure is gradually reduced. Neutralization capability at this peak point is higher than that at reduced pressure about $10^4$ times on the atmospheric pressure and by about $10^3$ times on the inactive gas. The introductions of these technology make it possible to perfectly overcome problems caused by static electricity and to manufacture ULSI devices and LCD with high reliability.

• 한국입자에어로졸학회지
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• 제18권1호
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• pp.9-21
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• 2022

In this study, a novel antiviral coating method for the air filtration system of subway station was investigated. Using dry aerosol coating process, we developed a high-performance antiviral air filter with spark discharger and carbon brush type ionizer. Silver nanoparticles were produced by a spark discharge generation system with ion injection system and were used as antiviral agents coated onto a medium grade air filter. The pressure drop, filtration efficiency, and antiviral ability of the filter against aerosolized MS2 virus particles as a surrogate of SARS-CoV-2 virus were tested with dust contamination. Dust contamination caused the increase of the filtration efficiency and pressure drop, while the antiviral agents (in this study, silver nanoparticles) coating did not have any significant effect on the filtration efficiency and pressure drop. Using these properties, we suggested a novel method to maximize the antiviral performance of the antiviral air filter that was contaminated by dust particles. Moreover theoretical analysis of antiviral ability with dust contamination and re-coated antiviral agents was carried out using a mathematical model to calculate the time-dependent antiviral effect of the filter under actual conditions of subway station. Our model can be used to apply on antiviral air filtration system of subway station for prevention of pandemic diffusion, and predict the life cycle of an antiviral filter.