• Title/Summary/Keyword: ion plating

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The Effects of Additional Gases(C,H,O) on Adhesive strength Ti$_{x}$N Films Prepared by the DC Magetron Suttering Method (DC Magetron Suttering법으로 제작한 Ti$_{x}$N 박막의 밀착력에 미치는 첨가원소(C,H,O))

  • 김학동;조성식
    • Journal of the Korean institute of surface engineering
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    • v.31 no.3
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    • pp.142-150
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    • 1998
  • Stainless steel is being used widely for various purposes due to its good corrosion resistance. There has been much research to produce colored stainless steel by several methods such as anodizing and ion plating. In this experiment, we coated TiN(C,O,H)films SUS304 substraate with the DC magnetron spttering system made by Leybold Heraeus and studied the interlater structure and abhesive strength of the films as a function of additional gases, acetylene, hydrogen and oxygen. When the acetylene gas was added into the chamber, the specimen with the interlayer phase had good adhesion due to the toughness of the $\gamma'-Fe_4N$ plase induced from a solid solution of carbon atoms, while low adhesion appeared on the specimen of the non interlayer phase. The formation of the interlayer phase($\gamma'-Fe_4N$) was due to hydrogen embrittlement and internal stress induced by $\gamma'-Fe_4N$ formation in the interlayer. We could fine the interlayer phase ($\gamma'-Fe_4N$) at the interface between the film and the substrate of the TEM image when $\gamma'-Fe_4N$ was detected by the X-ray duffraction metheod.

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Analyses of Oxide Scales Formed on TiCrN Coatings (TiCrN 박막의 고온 산화시 생성되는 산화막 분석)

  • 이동복;이영찬;김성훈;권식철
    • Journal of the Korean institute of surface engineering
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    • v.34 no.4
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    • pp.321-326
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    • 2001
  • The TiCrN Coatings haying three kinds of Compositions of $Ti_{36}$ $Cr_{26}$ $N_{38}$ , $Ti_{31}$ $Cr_{35}$ $N_{34}$ / and $Ti_{14}$ $Cr_{52}$ $N_{34}$ were deposited on STD 61 steel substrate by arc ion plating and were oxidized between 700 and 100$0^{\circ}C$ to identify the oxide scales formed on the coatings. The oxide scales were then analyzed using EPMA, XRD and GAXRD. During oxidation, the coatings consisting of TiN and CrN phases were reduced to TiO2 and $Cr_2$$O_3$, respectively. Titania tended to form at the outer oxide layer, whereas chromia tended to form at the inner oxide layer, owing to the different oxygen affinity. The substrate elements as well as coating elements diffused outwardly toward the oxide layer due to the concentration gradient. The growth of oxide from the TiCrN coatings was schematically expressed on the basis of thickness measurement of the reacted and unreacted coatings. The Cr element showed its stronger role to keep the TiCrN coatings from oxidation, when compared with Ni.

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A Study on Formation and Evaluation of he Thin Films for Improvement of Tribology Properties (Tribology특성 향상을 위한 Ag 박막의 형성과 평가에 관한 연구)

  • 이경황;이상기;송복한;정병진;박창남;문경만;이명훈
    • Journal of the Korean institute of surface engineering
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    • v.33 no.5
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    • pp.319-328
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    • 2000
  • Silver is known to have such characteristics as low shear strength, good transfer-film forming tendency, and good corrosion resistance. Silver thin films have been prepared by ion plating of physical vapour deposition (PVD) using both argon gas pressure and bias voltage of processing condition. After the silver films were prepared, the properties in them were examined by gas pressure and bias voltage of substrate. Their morphology and crystal orientation were investigated by scanning electron microscopy (SEM) and X-ray diffractor. The properties of film were, also, studied to relate with morphology, X-ray diffraction pattern, and friction coefficient at vacuum ambient. The friction coefficient was stabilized remarkably on deposited films with increasing argon pressure for deposition. Also, the effect of increasing of the bias voltage for deposition resulted in lower friction coefficient and stability in $1.7$\times$10^{-4}$ torr. On the contrary, behavior of friction coefficient was stabilized on deposited films with decreasing the bias voltage in $1.7$\times$10^{-5}$ torr for deposition.

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Effects of Coating and Additivw Gases on the corrosion Properties of Ti$_{x}$N Films Preapered with DC Magneton Sputtering Method (DC Magnetron Sputtering법으로 제작한 Ti$_{x}$N박박의 부식특성에 미치는 코팅조건과 첨가원소의 영향)

  • 김학동;이봉상;조성석
    • Journal of the Korean institute of surface engineering
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    • v.31 no.5
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    • pp.251-260
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    • 1998
  • Stainless Steel is being used widely for various purposes due to its good corrosion resistance. There have been many researches to produce colored stainless steel by several methods such as anodizing and ion-plating. In this experiment, we $Ti_XN$(C,O) on the films SUS304, aluminium, and glass substrates with DC magentron sputterinng system made by Leybold Hereus, and strdied the structur, corrsion and pit characture of the TiXN observed by TeM image was black and whink and white columnar hed a very fine(200$\AA$) dense sturcture,and the diffraction resistance at the $3{\times}10_6A/\textrm{cm}^2$ and $10_{10}\times{cm}^2$current density were obtained in the under-stoichiometry $Ti_xN$ compound of Ar/$N_2$(Ar:$N_2$=100:6, titanium-rich compound) and the over-stoichiometry compound of Ar/$N_2$((Ar:$N_2$=60:15) respectively. When the thiness was over 1.64$\mu\textrm{m}$, good pit resistance could be obtained and its improvement was especially affected by perfect surfaceface. Typical TiN anodic polarzation curves of very unstable corrosion were observed by $Ti_xN$ film on the glass and perfect film of 3.28$\mu\textrm{m}$ thickness.

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A study on life decision factors of TiN films coated by Cathode Arc ion Plating Method (음극 아크 이온플레이팅법으로 코팅된 TiN 박막의 수명결정요인에 관한 연구)

  • 최석우;백영남
    • Journal of the Korean institute of surface engineering
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    • v.33 no.4
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    • pp.222-228
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    • 2000
  • The life time of cutting tool was studied in the relation with the properties of TiN coating tools. The purpose of this study is to compare the cutting conditions of the TiN coated tools with those of the non-coated tools and to find out the optimal cutting condition of the TiN coated tool. The coated tools were prepared by the sputtering process at $4$\times$10^{-3}$Torr. When the cutting speed is increased 22.2% from 90m/min, the limited life of coating bite was decreased by 60.61%, but non-coating bite was decreased by 64.05%. In the tool lifetime equation of the coated tools "a"(exponent of feed rate) was not much changed in comparison with that of the non-coated tools but "n" (exponent of tool′s life) was increased by 9.3% and "b" (exponent of cutting depth) was increased by 2.4%. It was thought to be that TiN coated tools was used for higher cutting speed than non-coated tools to improve the lifetime of the coated tools.

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Tribological Behavior Analysis of CrMoN Coating by XPS (XPS 분석을 통한 CrMoN 코팅의 마찰마모 거동 연구)

  • Yang, Young-Hwan;Lyo, In-Woong;Park, Sang-Jin;Lim, Dea-soon;Oh, Yoon-Suk
    • Korean Journal of Metals and Materials
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    • v.50 no.8
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    • pp.549-556
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    • 2012
  • The tribological behavior of CrMoN films with respect to surface chemistry was investigated by using X-ray photoelectron spectroscopy (XPS). All of the films were prepared from a hybrid PVD system consisting of DC unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) sources. The tribological property of the films was evaluated by a friction coefficient using a Ball-on-disk type tribometer. The chemistry of wear track was analyzed by energy dispersive spectroscopy (EDS) and XPS. The friction coefficient was measured to be 0.4 for the CrMoN film, which is lower than that of a monolithic CrN film. EDS and XPS results imply the formation of an oxide layer on the coating surface, which was identified as molybdenum oxide phases, known to be a solid lubricant during the wear test.

Characteristics of TiAlCrSiN coating to improve mold life for high temperature liquid molding (고온 액상 성형용 금형 수명 향상을 위한 TiAlCrSiN 코팅의 특성)

  • Yeo, Ki-Ho;Park, Eun-Soo;Lee, Han-Chan
    • Journal of the Korean institute of surface engineering
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    • v.54 no.5
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    • pp.285-293
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    • 2021
  • High-entropy TiAlCrSiN nano-composite coating was designed to improve mold life for high temperature liquid molding. Alloy design, powder fabrication and single alloying target fabrication for the high-entropy nano-composite coating were carried out. Using the single alloying target, an arc ion plating method was applied to prepare a TiAlCrSiN nano-composite coating had a 30 nm TiAlCrSiN layers are deposited layer by layer, and form about 4 ㎛-thickness of multi-layered coating. TiAlCrSiN nano-composite coating had a high hardness of about 39.9 GPa and a low coefficient of friction of less than about 0.47 in a dry environment. In addition, there was no change in the structure of the coating after the dissolution loss test in the molten metal at a temperature of about 1100 degrees.

An Investigation of the Current Squeezing Effect through Measurement and Calculation of the Approach Curve in Scanning Ion Conductivity Microscopy (Scanning Ion Conductivity Microscopy의 Approach Curve에 대한 측정 및 계산을 통한 Current Squeezing 효과의 고찰)

  • Young-Seo Kim;Young-Jun Cho;Han-Kyun Shin;Hyun Park;Jung Han Kim;Hyo-Jong Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.31 no.2
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    • pp.54-62
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    • 2024
  • SICM (Scanning Ion Conductivity Microscopy) is a technique for measuring surface topography in an environment where electrochemical reactions occur, by detecting changes in ion conductivity as a nanopipette tip approaches the sample. This study includes an investigation of the current response curve, known as the approach curve, according to the distance between the tip and the sample. First, a simulation analysis was conducted on the approach curves. Based on the simulation results, then, several measuring experiments were conducted concurrently to analyze the difference between the simulated and measured approach curves. The simulation analysis confirms that the current squeezing effect occurs as the distance between the tip and the sample approaches half the inner radius of the tip. However, through the calculations, the decrease in current density due to the simple reduction in ion channels was found to be much smaller compared to the current squeezing effect measured through actual experiments. This suggests that ion conductivity in nano-scale narrow channels does not simply follow the Nernst-Einstein relationship based on the diffusion coefficients, but also takes into account the fluidic hydrodynamic resistance at the interface created by the tip and the sample. It is expected that SICM can be combined with SECM (Scanning Electrochemical Microscopy) to overcome the limitations of SECM through consecutive measurement of the two techniques, thereby to strengthen the analysis of electrochemical surface reactivity. This could potentially provide groundbreaking help in understanding the local catalytic reactions in electroless plating and the behaviors of organic additives in electroplating for various kinds of patterns used in semiconductor damascene processes and packaging processes.

Technology Trends of Metal Recovery from Wastewater (폐수(廢水) 중(中) 유가금속(有價金屬) 회수기술(回收技術) 동향(動向))

  • Hwang, Young-Gil;Kil, Sang-Cheol;Kim, Jong-Heon
    • Resources Recycling
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    • v.22 no.3
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    • pp.91-99
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    • 2013
  • Steel industry which has been accomplishes the base of our country economy, automobile and electronic industry are taking charge of the role, whose electroplating is important. Large amount of wastewater and various metal salts, including hazardous materials was generated from the electroplating pre-treatment, plating, washing and post-plating. Currently, the general wastewater follows in the environmental law and neutralization after controlling, sludge where the various metal is mixed reclaims below multiple regulative and trust it is controlling. The sludge which includes the gas price metal reclaims in the field and trust it controls. a reclamation price of land it is insufficient but and the control expense holds plentifully and it loses the gas price metal which is valuable. Consequently, The research regarding to recover a gas price metal actively from this waste water, it is advanced. A new method to recover valuable metals from electroplating wastewater synthesis of metal sulfides using topical methods utilizing iron oxidizing bacteria, reagent of sulfides and solvent extraction using an organic solvent, such as the development of the law to recover these metals and metal sulfides of wastewater using selective recovery have been studied. By using these wastewater treatment method under frequency above 95%, it has been obtained the valuable metal from the wastewater, where the metal ion of Fe, Cu, Zn and Ni complexes was mixed. As we discuss the wastewater, which has been discharged from electroplating process, it is important and will be applied to the resources of metal in the urban mine.

Study of Stress Changes in Nanocrystalline CoW Thin/Thick Film Alloys Eletrodeposited from Citrate Baths (Citrate Baths로부터 전기도금된 나노결정립 CoW 합금 박막/후막의 응력변화에 대한 연구)

  • Cho, Ik-Jong;Park, Deok-Yong;Ihn, Hyun-Man
    • Journal of the Korean Electrochemical Society
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    • v.9 no.4
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    • pp.141-150
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    • 2006
  • Nanocrystalline CoW thin/thick film alloys were electodeposited from citrate baths to investigate the influences of metal ion concentration, current density and solution pH on chemical composition, current efficiency, residual stress, surface morphology, and microstructure of the film. Deposit W (tungsten) content in CoW thin/thick film increased with increasing W ion concentration, current density, and solution pH in the plating bath. It was observed that residual stress in CoW thin/thick film decreased with increasing W ion concentration and solution pH. CoW thin film exhibited mixed phases of hop Co [(100) and (002)] and hcp $Co_3W$ [(002) and (201)] at W ion concentration with 0.02 to 0.08 M. The microstructure of CoW thin film at W ion concentration of 0.1 to 0.2 M was close to amorphous phase. The dominant phases were found to be hop Co (002) and hop $Co_3W$ [(200), (002) and (201)] at the current densities of 5, 10, 25, and $100mA{\cdot}cm^{-2}$ CoW thin film at the current densities of 50 and $75mA{\cdot}cm^{-2}$ was close to amorphous phase. At solution pH 8.7, CoW thin film exhibited hcp Co (002) and hop $Co_3W$ [(200), (002) and (201)]. Below solution pH 8.7, CoW thin film exhibited amorphous microstructure. The optimum electrodeposition conditions for CoW thin/thick film were found to be W ion concentration of 0.08 M, current density of $10mA{\cdot}cm^{-2}$, and solution pH 8.7.