• Proceedings of the KSME Conference
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• 2005.11a
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• pp.237.1-237.1
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• 2005

• Proceedings of the Korean Magnestics Society Conference
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• 1998.10a
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• pp.18-19
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• 1998

• 한국전자현미경학회:학술대회논문집
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• 2002.05a
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• pp.61-62
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• 2002

• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.167-172
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• 2005

In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.

• Journal of the Korean Ceramic Society
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• v.31 no.4
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• pp.448-456
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• 1994

The reaction-sintered alumina and zirconia-alumina ceramics were fabricated from the Al/Al2O3 or Zl/ZrO2(Ca-PSZ) powder mixtures via the attrition milling. And the effects of the milling characteristics of used raw powders on reaction sintering were investigated. After attrition milling and isopressing at 400 MPa the Al/Al2O3 specimen was oxidated at 1200℃ for 8 hours followed by sintering at 1550℃ for 3 hours. Because mixed powders of flake-type Al with coarse alumina was much more effectively comminuted than the globular-type Al with coarse alumina powders, it's sintered body of more than 97% theoretical density was achived, but low contents of Al leads to relatively higher shrinkage of about 8%. And because coarse alumina particles was much more beneficial in cutting and reducing the ductile Al particles, using the coarse alumina powder was much more effective in reaction sintering. Fused Ca-PSZ powder was reaction sintered with Al at 1550℃ for 3 hours and low shrinkage ZrO2-Al2O3 composites were fabricated. But because Al/Ca-PSZ powder mixtures were not effectively milled the reaction sintering and densification was difficult. And the Ca ion in Ca-PSZ grains diffused into alumina grains during sintering so that the unstabilization of Ca-PSZ body was occured which gave the microcracks in the specimens.

• Bulletin of the Korean Chemical Society
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• v.29 no.2
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• pp.309-312
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• 2008

Two different anode composite materials comprising of Fe, Cu and Si prepared using high energy ball milling (HEBM) were explored for their capacity and cycling behaviors. Prepared powder composites in the ratio Cu:Fe:Si = 1:1:2.5 and 1:1:3.5 were characterized through X-Ray diffraction (XRD) and scanning electron microscope (SEM). Nevertheless, the XRD shows absence of any new alloy/compound formation upon ball milling, the elements present in Cu(1)Fe(1)Si(2.5)/Graphite composite along with insito generated Li2O demonstrate a superior anodic behavior and delivers a reversible capacity of 340 mAh/g with a high coulombic efficiency (98%). The higher silicon content Cu(1)Fe(1)Si(3.5) along with graphite could not sustain capacity with cycling possibly due to ineffective buffer action of the anode constituents.

• Applied Chemistry for Engineering
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• v.9 no.5
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• pp.781-785
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• 1998

Material and electrochemical characteristics of petroleum coke of the nongraphitic carbon prepated with attrition milling for 6~48 hours and heat-treatment at $700^{\circ}C$ for 1 hour was investigated. The milling condition affects the particle size distribution, BET specific surface area and interlayer distance of petroleum cokes. Carbon electrode with petroleum cokes prepared at the milling time of 12~24 hours and having average particle size of $6{\sim}8{\mu}m$ showed best electrochemical characteristics form the investigation of cyclic voltammogram and charge-discharge characteristics.

• Corrosion Science and Technology
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• v.21 no.4
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• pp.250-257
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• 2022

Transition metal sulfide materials have emerged as a new anode material for Li secondary batteries owing to their high capacity and rate capability facilitated by fast Li-ion transport through the layered structure. Among these materials, niobium disulfide (NbS₂) has attracted much attention with its high electrical conductivity and high theoretical capacity (683 mAh g^-1). In this study, we propose a facile synthesis of Fe_xNbS₂/C composite via simple ball milling and heat treatment. The starting materials of FeS and Nb were reacted in the first milling step and transformed into an Fe-Nb-S composite. In the second milling step, activated carbon was incorporated and the sulfide was crystallized into Fe_xNbS₂ by heat treatment. The prepared materials were characterized by X-ray diffraction, electron spectroscopies, and X-ray photoelectron spectroscopy. The electrochemical test results reveal that the synthesized Fe_xNbS₂/C composite electrode demonstrates a high reversible capacity of more than 600 mAh g^-1, stable cycling stability, and excellent rate performance for Li-ion battery anodes.

• Journal of the Korea Institute of Military Science and Technology
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• v.14 no.6
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• pp.1107-1113
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• 2011

In this paper, ion beam technology was investigated through the published papers. Ion beam technology is mainly used by the focused ion beams. There are two different types of application methods. One method is to remove the material from the substrate, the other one is to deposit the materials on the surface of the substrate or specimen. Based on the literature review there are 1.5 times more published research papers related to the deposition than those of the removal.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.77-77
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• 2011

These days, a growing demand for memory device is filled up with the flash memory and the dynamic random access memory (DRAM). Although DRAM is a reasonable solution for current demand, the universal novel memory with high density, high speed and nonvolatility, needs to be developed. Among various new memories, the magnetic random access memory (MRAM) device is considered as one of good candidate memories because of excellent features including high density, high speed, low operating power and nonvolatility. The etching of MTJ stack which is composed of magnetic materials and insulator such as MgO is one of the vital process for MRAM. Recently, MgO has attracted great interest in the MTJ stack as tunneling barrier layer for its high tunneling magnetoresistance values. For the successful realization of high density MRAM, the etching process of MgO thin films should be investigated. Until now, there were some works devoted to the investigations on etch characteristics of MgO thin films. Initially, ion milling was applied to the etching of MgO thin films. However, ion milling has many disadvantages such as sidewall redeposition and etching damage. High density plasma etching containing the magnetically enhanced reactive ion etching and high density reactive ion etching have been employed for the improvement of etching process. In this work, inductively coupled plasma reactive ion etching (ICPRIE) system was adopted for the improvement of etching process using MgO thin films and etching gas mixes of $CH_4$/Ar and $CH_4$/$O_2$/Ar have been employed. The etch rates are measured by a surface profilometer and etch profiles are observed using field emission scanning emission microscopy (FESEM). The effects of gas concentration and etch parameters such as coil rf power, dc-bias voltage to substrate, and gas pressure on etch characteristics will be systematically explored.