• Title/Summary/Keyword: interdiffusion

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The Etching Mechanism of $CeO_2$ Thin Films using Inductively Coupled Plasma (유도 결합 플라즈마를 이용한 $CeO_2$ 박막의 식각 메카니즘)

  • 오창석;김창일
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.695-699
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    • 2001
  • Cerium dioxide (CeO$_2$) was used as the intermediate layer between the ferroelectric thin film and Si substrate in a metal-ferroelectric-semiconductor field effect transistor (MFSFET), to improve the interface property by preventing the interdiffusion of the ferroelectric material and the Si substrate. In this study, CeO$_2$ thin films were etched with a CF$_4$/Ar gas combination in inductively coupled plasma (ICP). The maximum etch rate of CeO$_2$ thin films was 270$\AA$/min under CF$_4$/(CF$_4$+Ar) of 0.2, 600 W/-200V, 15 mTorr, and $25^{\circ}C$. The selectivities of CeO$_2$ to PR and SBT were 0.21, 0.25, respectively. The surface reaction in the etching of CeO$_2$ thin films was investigated with x-ray photoelectron spectroscopy (XPS). There is a chemical reaction between Ce and F. Compounds such as Ce-F$_{x}$ remains on the surface of CeO$_2$ thin films. Those products can be removed by Ar ion bombardment. The results of secondary ion mass spectrometry (SIMS) were consistent with those of XPS. Scanning electron microscopy (SEM) was used to examine etched profiles of CeO$_2$ thin films. The etch profile of over-etched CeO$_2$ films with the 0.5${\mu}{\textrm}{m}$ line was approximately 65$^{\circ}$.>.

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The Effects of $TiO_2$ Underlayer on Magnetic Properties of Hexagonal Barium-Ferrite(BaM) Thin Films (Hexagonal Barium-Ferrite(BaM) 박막의 미세구조와 자기적 특성에 미치는 $TiO_2$하지층의 효과)

  • 김동현;남인탁;홍양기
    • Journal of the Korean Magnetics Society
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    • v.11 no.3
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    • pp.129-133
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    • 2001
  • In this paper, we studied structural and magnetic properties of Ba-ferrite thin film deposited on Si(100) substrate with TiO$_2$ underlayer. Ba-ferrite thin films with TiO$_2$ underlayer were deposited by reactive RF/DC magnetron sputtering system at room temperature. TiO$_2$ underlayer was reactive sputtered with $O_2$. After deposition, the thin films were annealed at vatious temperatures to get the crystallized sample. Underlayer was used to prevent interdiffusion from Ba-ferrite thin film to substrate. The growth of Ba-ferrite thin films was influenced by TiO$_2$ underlayer. Easy magnetization direction is in-plane. From these results the Ba-ferrite film with TiO$_2$ underlayer can be used as longitudinal recording media.

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Microstructure and Magnetic Properties of Hexagonal Barium-Ferrite (BaM) Thin Films with Various Underlayers (여러 하지층을 첨가한 Hexagonal Barium-Ferrite(BaM) 박막의 미세구조와 자기적 특성)

  • 김동현;남인탁;흥양기
    • Journal of the Korean Magnetics Society
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    • v.11 no.3
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    • pp.122-128
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    • 2001
  • In this paper, we studied structural and magnetic properties of Ba-ferrite thin film deposited on Si(100) substrate with various underlayers. Ba-ferrite thin films with various underlayers were deposited by reactive RF/DC magnetron sputtering system at room temperature. various underlayers was reactive sputtered with O$_2$. After deposition, the thin films were annealed at 850 $^{\circ}C$ to get the crystallized sample. Underlayers were used to prevent interdiffusion from Ba-ferrite thin film to substrate. The growth of Ba-ferrite thin films was influenced by underlayers. Easy magnetization direction is in-plane. From these results the Ba-ferrite film with various underlayers can be used as longitudinal recording media.

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Magnetic Domain Structure in Laser-Annealed NiFe/FeMn Bilayers (FeMn/NiFe에서 Laser 열처리에 의한 자구연구)

  • Choi, S.D.;Kim, S.W.;Jin, D.H.;Lee, M.S.;Ahn, J.H.;Joo, H.W.;Kim, Y.S.;Lee, K.A.;Lee, S.S.;Hwang, D.G.
    • Journal of the Korean Magnetics Society
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    • v.14 no.6
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    • pp.224-227
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    • 2004
  • We have studied local magnetization reversal by laser annealing in exchange biased NiFe/FeMn bilayer. Local magnetization reversal was performed by using the DPSS laser under external magnetic field of 600G. When the laser illuminated the patterned film with the power of above 300 mW during 15 min, a magnetoresistance (MR) curve with symmetric peaks at the opposite field was obtained due to the local reversal of exchange biasing. The direction of exchange anisotropy in the locally reversed region can be restored by local laser annealing under alternating magnetic field, even if its MR peak was reduced by the damage and interdiffusion. The magnetic domain structure of the locally reversed region was measured by MFM. The new domains were generated by laser annealing near the exposed area.

Characteristics of Magnetic Tunnel Junctions Incorporating Nano-Oxide Layers (나노 산화층을 사용한 자기터널접합의 특성)

  • Chu, In-Chang;Chun, Byong-Sun;Song, Min-Sung;Lee, Seong-Rae;Kim, Young-Keun
    • Journal of the Korean Magnetics Society
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    • v.16 no.2
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    • pp.136-139
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    • 2006
  • The tunneling magnetoresistance (TMR) ratios of magnetic tunnel junctions (MTJs), in general, decrease abruptly above 250$^{\circ}C$ due to Mn interdiffusion from an antiferromagnet IrMn layer to a ferromagnetic CoFe and/or a tunnel barrier. To improve thermal stability, we prepared MTJs with nano-oxide layers. Using a MTJ structure consisting of underlayer CoNbZr 4/bufferlayer CoFe 10/antiferromaget IrMn 7.5/pinned layer CoFe 3/tunnel barrier AlO/freelayer CoFe 3/capping CoNbZr 2 (nm), we placed a nano-oxide layer (NOL) into the underlayer or bufferlayer. Then, the thermal, structural and magneto-electric properties were measured. The TMR ratio, surface flatness, and thermal stability of the MTJs with NOLs were promoted.

Effect of Welding Condition on Microstructure of Transient Zone in Overlay Weld of 3Cr-1Mo Steel/STS-309L (3Cr-1Mo강/STS-309L 오버레이 용접부의 천이영역 조직에 미치는 용접조건의 영향)

  • 김동진;김병훈;지병하;김정태;김성곤;강정윤;박화순
    • Journal of Welding and Joining
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    • v.18 no.2
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    • pp.49-56
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    • 2000
  • Recently developed Austenite stainless steel, 309L was used to overlay on 3Cr-1Mo-V-Ti-B steels, using Electroslag welding process, which wide electrodes were adopted. Transition region in welding interlayer relating to disbonding crack was investigated. Also, the effect of welding condition on the width of transition region and coarsening grains of the austenite were studied. 1) With increasing welding speed the width of martensite at transient region was increased, but the amount of delta ferrite in weld metal was reduced, being fine grained. 2) The form of martensite at the transition region was occurred by reversible transformation during cooling since the interdiffusion of Cr and Ni from weld metal and Fe and C from base metals at the transition region, causes to lowering the concentration of Cr and Ni at the transition region, leading to increasing Ms point. 3) With increasing welding speed, the grain of austenite formed at the welding interface was finer. With increasing welding current under the same welding speed, the grain size of the austenite was finer. At high current, original grain size of the austenite is coarse, but the austenite has fine grains because the austenite was transformed to martensite during cooling. 4) In the case of high welding speed, the width of martensite at the welding interface was increased, but the grain size of austenite at the welding interface was finer. This indicates that the inhibition of disbonding crack may be achieved through dispersening fine carbides in the gain boundary.

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Effect of Li2O-Bi2O3 Addition on the Piezoelectric Properties of Pb(Mg1/3Nb2/3)0.65Ti0.35O3 Ceramics (Li2O-Bi2O3 첨가가 Pb(Mg1/3Nb2/3)0.65Ti0.35O3 세라믹의 압전 특성에 미치는 영향)

  • Kim, Jae Hyuk;Kim, Shi Yeon;Choi, Jeoung Sik;Yeo, Dong-Hun;Shin, Hyo-Soon;Nahm, Sahn
    • Journal of Powder Materials
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    • v.26 no.5
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    • pp.405-409
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    • 2019
  • Piezoelectric ceramic specimens with the $Pb(Mg_{1/3}Nb_{2/3})_{0.65}Ti_{0.35}O_3$ (PMN-PT) composition are prepared by the solid state reaction method known as the "columbite precursor" method. Moreover, the effects of the $Li_2O-Bi_2O_3$ additive on the microstructure, crystal structure, and piezoelectric properties of sintered PMN-PT ceramic samples are investigated. The addition of $Li_2O-Bi_2O_3$ lowers the sintering temperature from $1,200^{\circ}C$ to $950^{\circ}C$. Moreover, with the addition of >5 wt.% additive, the crystal structure changes from tetragonal to rhombohedral. Notably, the sample with 3 wt.% additive exhibits excellent piezoelectric properties ($d_{33}=596pC/N$ and Kp = 57%) and a sintered density of $7.92g/cm^3$ after sintering at $950^{\circ}C$. In addition, the sample exhibits a curie temperature of $138.6^{\circ}C$ at 1 kHz. Finally, the compatibility of the sample with a Cu electrode is examined, because the energy-dispersive X-ray spectroscopy data indicate the absence of interdiffusion between Cu and the ceramic material.

Cr Electroplating Technology to prevent Interdiffusion between Metallic Fuel and Clad Material (금속연료-피복재 상호확산 방지를 위한 크롬 도금법 적용 연구)

  • Kim, Jun Hwan;Lee, Kang Soo;Yang, Seong Woo;Lee, Byoung Oon;Lee, Chan Bock
    • Korean Journal of Metals and Materials
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    • v.49 no.12
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    • pp.937-944
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    • 2011
  • Studies have been carried out in order to reduce fuel-cladding chemical interaction (FCCI) behavior of metallic fuel in sodium-cooled fast reactors (SFR) using an electroplating technique. A $20{\mu}m$ thick Cr layer has been plated by the electrochemical method in the Sargent bath over the HT9 (12Cr-1Mo) clad material and diffusion couple tests of the U-10Zr metallic fuel as well as the rare earth alloy (70Ce-29La) have been conducted. The results show that the Cr plating can prevent FCCI behavior along the fuel-clad interface. However, cracks developed through the thickness during plating, which resulted in the migration of some fuel constituents. Variation of bath temperature, application of pulse current, and post heat treatment have been conducted to control such cracks. We found out that some conditions like the pulse current and the post heat treatment enhanced the layer property by reducing the internal cracks and improving the diffusion couple test.

Effect of Dewpoints on Annealing Behavior and Coating Characteristics in IF High Strength Steels Containing Si and Mn (Si, Mn함유 IF 고강도강의 소둔거동 및 도금특성에 미치는 이슬점 온도의 영향)

  • Jeon, Sun-Ho;Shin, Kwang-Soo;Sohn, Ho-Sang;Kim, Dai-Ryong
    • Korean Journal of Metals and Materials
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    • v.46 no.7
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    • pp.427-436
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    • 2008
  • The effect of dewpoints on annealing behavior and coating characteristics such as wettability and galvannealing kinetics was studied by annealing 0.3wt%Si - 0.1~0.4wt% Mn added interstitial-free high strength steels(IF-HSS). The 0.3wt%Si-0.1wt%Mn steel exhibited good wettability with molten zinc and galvannealing kinetics after annealing when the dewpoint of $H_2-N_2$ mixed gas was above $-20^{\circ}C$. It is shown that the wettability and galvannealing kinetics are directly related to the coverage of the external(surface) oxide formed by selective oxidation during annealing. At $N_2-15%H_2$ annealing atmosphere, the increase of dewpoint results in a gradual transition from external to internal selective oxidation. The decrease of external oxidation of alloying elements with a concurrent increase of their subsurface enrichment in the substrate, showing a larger surface area that was free of oxide particles, contributed to the improved wettability and galvannealing kinetics. On the other hand, the corresponding wettability and galvannealing kinetics were deteriorated with the dewpoints below $-20^{\circ}C$. The continuous oxide layer of network and/or film type was formed on the steel surface, leading to the poor wettability and galvannealing kinetics. It causes a high contact angle between annealed surface and molten zinc and plays an interrupting role in interdiffusion of Zn and Fe during galvannealing process.

Effect of Hot Isostatic Pressing on the Stellite 6 Alloy prepared by Directed Energy Deposition (DED 적층 제조된 Stellite 6 조성합금의 열간등방압성형 후처리 )

  • Joowon Suh;Jae Hyeon Koh;Young-Bum Chun;Young Do Kim;Jinsung Jang;Suk Hoon Kang;Heung Nam Han
    • Journal of Powder Materials
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    • v.31 no.2
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    • pp.152-162
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    • 2024
  • The directed energy deposited (DED) alloys show higher hardness values than the welded alloys due to the finer microstructure following the high cooling rate. However, defects such as microcracks, pores, and the residual stress are remained within the DED alloy. These defects deteriorate the wear behavior so post-processing such as heat treatment and hot isostatic pressing (HIP) are applied to DED alloys to reduce the defects. HIP was chosen in this study because the high pressure and temperature uniformly reduced the defects. The HIP is processed at 1150℃ under 100 MPa for 4 hours. After HIP, microcracks are disappeared and porosity is reduced by 86.9%. Carbides are spherodized due to the interdiffusion of Cr and C between the dendrite and interdendrite region. After HIP, the nanohardness (GPa) of carbides increased from 11.1 to 12, and the Co matrix decreased from 8.8 to 7.9. Vickers hardness (HV) decreased by 18.9 % after HIP. The dislocation density (10-2/m2) decreased from 7.34 to 0.34 and the residual stress (MPa) changed from tensile 79 to a compressive -246 by HIP. This study indicates that HIP is effective in reducing defects, and the HIP DED Stellite 6 exhibits a higher HV than welded Stellite 6.