The Etching Mechanism of $CeO_2$ Thin Films using Inductively Coupled Plasma
(유도 결합 플라즈마를 이용한 $CeO_2$ 박막의 식각 메카니즘)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.14 no.9
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- pp.695-699
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- 2001