• 제목/요약/키워드: inorganic insulator

검색결과 46건 처리시간 0.02초

ICP 장치를 이용한 초전도 자속 흐름 트랜지스터의 링크 제작 (Fabrication of the Superconducting Flux Flow Transistor Using the ICP Etching Method)

  • 강형곤;임연호;임성훈;최효상;한윤봉;한병성
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권10호
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    • pp.494-499
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    • 2001
  • The effects of accelerated Ultraviolet (UV) radiation on High temperature vulcanized (HTV), Room temperature vulcanized (RTV) silicone rubber and two types of ethylene propylene diene terpolymer (EPDM) used for composite insulator were investigated by hydrophobicity class (HC), surface voltage decay after corona charging, SEM-ES, FTIR and XPS. The contact angle in two kinds of silicone rubber was scarcely change, but EPDM occurred to the loss of hydrophobicity followed by surface cracking and chalking. The surface voltage decay on UV-treated silicone rubber and EPDM showed a different decay trend with UV treatment. EDS and XPS analysis indicated that the oxygen content increased with UV treatment time in all samples. For silicone rubber, the oxidized groups of inorganic silica-like structure increased with UV treatment time. The oxidized carbon of C=O, O=C-O in EPDM increased. These oxidized surface for each material had different electrostatic characteristics, so deposited charges were expected to have different impacts on their surface hydrophobicity. The degradation mechanism based on our results was discussed.

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Passivation Layers for Organic Thin-film-transistors

  • Lee, Ho-Nyeon;Lee, Young-Gu;Ko, Ik-Hwan;Kang, Sung-Kee;Lee, Seong-Eui;Oh, Tae-Sik
    • Transactions on Electrical and Electronic Materials
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    • 제8권1호
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    • pp.36-40
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    • 2007
  • Inorganic layers, such as SiOxNy and SiOx deposited using plasma sublimation method, were tested as passivation layer for organic thin-film-transistors (OTFTs). OTFTs with bottom-gate and bottom-contact structure were fabricated using pentacene as organic semiconductor and an organic gate insulator. SiOxNy layer gave little change in characteristics of OTFTs, but SiOx layer degraded the performance of OTFTs severely. Inferior barrier properties related to its lower film density, higher water vapor transmission rate (WVTR) and damage due to process environment of oxygen of SiOx film could explain these results. Polyurea and polyvinyl acetates (PVA) were tested as organic passivation layers also. PVA showed good properties as a buffer layer to reduce the damage come from the vacuum deposition process of upper passivation layers. From these results, a multilayer structure with upper SiOxNy film and lower PVA film is expected to be a superior passivation layer for OTFTs.

$Poly-\gamma-Benzyl\;_L-Glutamate$ 유기초박막의 정전용량특성 (Capacitance Properties of $Poly-\gamma-Benzyl\;_L-Glutamate$ in Organic Ultra Thin Films)

  • 김병근;김창복;김영근;최영일;이경섭
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.147-149
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    • 2002
  • Recently, the study on development of electrical and electronic device is done to set miniature, high degrees of integration and efficiency by using inorganic materials the study of Langmuir-Boldgett(LB) method that uses organic materials because of the limitation for the ultrasmall size. The structure of MIM(Metal-Insulator-Metal) device is Cr-Au/PBLG/ Al. the number of accumulated layers are 1, 3, 5, 7, 9. The I-V characteristic of the device is measured from 0[V] to 2[V] and the characteristic of current-time of the devices. We have investigated the capacitance because PBLG system have a accumulated layers the maximum value of measured current is increased as the number of accumulated layers are decreased. The capacitor properties of a thin film is better as the distance between electrodes is smaller. The results have shown the insulating materials and could control the conductivity by accumulated layers.

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용액공정으로 제작한 PVP-IZO TFT의 UV-O3 처리를 통한 전기적 특성 향상 연구 (Study on Electrical Characteristic Improvement of PVP-IZO TFT Prepared by Solution Process Using UV-O3 Treatment)

  • 김유정;정준교;박정현;정병준;이가원
    • 반도체디스플레이기술학회지
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    • 제16권2호
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    • pp.66-69
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    • 2017
  • In this paper, solution based Indium Zinc Oxide thin film transistors (IZO TFTs) were fabricated with PVP gate dielectric. To enhance the electrical properties, UV-O3 treatment is proposed on solution based IZO TFTs. The gate leakage current and interface trap density is compatible with conventional ZnO-based TFT with inorganic gate insulator. Especially, the UV-treated device shows improved electrical characteristics compared to the untreated device. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which shows that the oxygen vacancy of UV-O3 treatment is higher than that of no treatment.

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입체표면 폴리실리콘 전극에서 PECVD $Ta_2O_5$ 유전박막의 전기적 특성 (Electrical Characteristics of PECVD $Ta_2O_5$ Dielectic Thin Films on HSG and Rugged Polysilicon Electrodes)

  • 조영범;이경우;천희곤;조동율;김선우;김형준;구경완;김동원
    • 한국진공학회지
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    • 제2권2호
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    • pp.246-254
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    • 1993
  • DRAM 커패시터에서 축정용량을 증대시키기 위한 기초연구로서 2가지 방법을 시도하였다. 첫째로, 커패시터의 유효 표면적을 증대시키기 위해 HSG(hemispherical grain)와 rugged 형태의 표면형상을 갖는 폴리실리콘 전극을 저압 화학기상증착법을 이용하여 제잘하였다. 그 결과 기존의 평평한 폴리실리콘 전극에 비하여 유효면적이 증대된 폴리실리콘 전극이 형성되었다. 둘째로, 고유 전상수를 갖는 $Ta_2O_5$ 박막을 각각의 전극에 플라즈마 화학기상증착법으로 증착시키고 후열처리한 후 전기적 특성변화를 조사하였다. MIS(metal-insulator-semiconductor) 구조의 커패시터를 제작하여 전기적 특성을 측정한 결과, HSG와 rugged 형상의 표면을 갖는 전극에서 기존의 평평한 표면을 갖는 전극에 비하여 축전용량은 1.2~1.5배까지 증대하였으나, 주설전류는 표면적의 증가에 따라 함께 증가함을 보였다. TDDB 특성에서도 HSG와 rugged 형상의 표면을 갖는 전극들이 평평한 표면형상에 비하여 더 열화되었음을 보여주었다. 이상과 같은 결과는 $Ta_2O_5$ 유전박막을 이용한 차세대 DRAB 커패시터 연구에 기초자료로 이용될 수 있을 것으로 본다.

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Solution-Processed Inorganic Thin Film Transistors Fabricated from Butylamine-Capped Indium-Doped Zinc Oxide Nanocrystals

  • Pham, Hien Thu;Jeong, Hyun-Dam
    • Bulletin of the Korean Chemical Society
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    • 제35권2호
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    • pp.494-500
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    • 2014
  • Indium-doped zinc oxide nanocrystals (IZO NCs), capped with stearic acid (SA) of different sizes, were synthesized using a hot injection method in a noncoordinating solvent 1-octadecene (ODE). The ligand exchange process was employed to modify the surface of IZO NCs by replacing the longer-chain ligand of stearic acid with the shorter-chain ligand of butylamine (BA). It should be noted that the ligand-exchange percentage was observed to be 75%. The change of particle size, morphology, and crystal structures were obtained using a field emission scanning electron microscope (FE-SEM) and X-ray diffraction pattern results. In our study, the 5 nm and 10 nm IZO NCs capped with stearic acid (SA-IZO) were ligand-exchanged with butylamine (BA), and were then spin-coated on a thermal oxide ($SiO_2$) gate insulator to fabricate a thin film transistor (TFT) device. The films were then annealed at various temperatures: $350^{\circ}C$, $400^{\circ}C$, $500^{\circ}C$, and $600^{\circ}C$. All samples showed semiconducting behavior and exhibited n-channel TFT. Curing temperature dependent on mobility was observed. Interestingly, mobility decreases with the increasing size of NCs from 5 to 10 nm. Miller-Abrahams hopping formalism was employed to explain the hopping mechanism insight our IZO NC films. By focusing on the effect of size, different curing temperatures, electron coupling, tunneling rate, and inter-NC separation, we found that the decrease in electron mobility for larger NCs was due to smaller electronic coupling.