A Study on the characteristics of Electron Energy Distribution function of the Radio-Frequency Inductively Coupled Plasma (고주파 유도결합 플라즈마의 전자에너지 분포함수 특성에 관한 연구)
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- Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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- 1998.11a
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- pp.131-133
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- 1998