• Nuclear Engineering and Technology
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• v.51 no.7
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• pp.1828-1834
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• 2019

The performance of a plastic scintillator for use in an in situ measurement system was analyzed using simulation and experimental methods. The experimental results of four major pure beta-emitting radionuclides, namely $^3H$, $^{14}C$, $^{32}P$, and $^{90}Sr/^{90}Y$, were compared with those obtained using a Monte Carlo N-particle (MCNP) code simulation. The MCNP simulation and experimental results demonstrated good agreement for $^{32}P$ and $^{90}Sr/^{90}Y$, with a relative difference of 1.95% and 0.43% between experimental and simulation efficiencies for $^{32}P$ and $^{90}Sr/^{90}Y$, respectively. However, owing to the short range of beta particles in water, the efficiency for $^{14}C$ was extremely low, and $^3H$ could not be detected. To directly measure the low-energy beta radionuclides considering their short range, a system where the source could flow directly to the scintillator was developed. The optimal thickness of the plastic scintillator was determined based on the suggested diameter. Results showed that the detection efficiency decreases with an increase in the depth of the water. The detection efficiency decreased drastically to approximately 10 cm, and the tendency was gradually constant.

• Journal of Astronomy and Space Sciences
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• v.35 no.3
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• pp.175-183
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• 2018

Many recent satellites have mission periods longer than 10 years; thus, satellite-based local space weather monitoring is becoming more important than ever. This article describes the instruments and data applications of the Korea Space wEather Monitor (KSEM), which is a space weather payload of the GeoKompsat-2A (GK-2A) geostationary satellite. The KSEM payload consists of energetic particle detectors, magnetometers, and a satellite charging monitor. KSEM will provide accurate measurements of the energetic particle flux and three-axis magnetic field, which are the most essential elements of space weather events, and use sensors and external data such as GOES and DSCOVR to provide five essential space weather products. The longitude of GK-2A is $128.2^{\circ}E$, while those of the GOES satellite series are $75^{\circ}W$ and $135^{\circ}W$. Multi-satellite measurements of a wide distribution of geostationary equatorial orbits by KSEM/GK-2A and other satellites will enable the development, improvement, and verification of new space weather forecasting models. KSEM employs a service-oriented magnetometer designed by ESA to reduce magnetic noise from the satellite in real time with a very short boom (1 m), which demonstrates that a satellite-based magnetometer can be made simpler and more convenient without losing any performance.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Geomechanics and Engineering
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• v.14 no.3
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• pp.211-224
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• 2018

In this paper, a predictive method accounting for the scaling effects of rockfill materials in the numerical deformation analysis of rockfill dams is developed. It aims to take into consideration the differences of engineering properties of rockfill materials between in situ and laboratory conditions in the deformation analysis. The developed method is based on the modification of model parameters used in the chosen material model, which is, in this study, an elasto-plastic model with double yield surfaces, i.e., the modified Hardening Soil model. Datasets of experimental tests are collected from previous studies, and a new dataset of the Nam Ngum 2 dam project for investigating the scaling effects of rockfill materials, including particle size, particle gradation and density, is obtained. To quantitatively consider the influence of particle gradation, the coarse-to-fine content (C/F) concept is proposed in this study. The simple relations between the model parameters and particle size, C/F and density are formulated, which enable us to predict the mechanical properties of prototype materials from laboratory tests. Subsequently, a 3D finite element analysis of the Nam Ngum 2 concrete face slab rockfill dam at the end of the construction stage is carried out using two sets of model parameters (1) based on the laboratory tests and (2) in accordance with the proposed method. Comparisons of the computed results with dam monitoring data indicate that the proposed method can provide a simple but effective framework to take account of the scaling effect in dam deformation analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.338-338
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• 2010

공정 중 발생하는 입자는 반도체 생산 수율에 가장 큰 영향을 끼치는 원인으로 파악되며, 생산 수율을 저하시키는 원인 중 70% 가량이 이와 관련된 것으로 알려져 있다. 현재 반도체 공정에서 입자를 계측하는데 사용하는 PWP (Particle per Wafer Pass) 방법은 표준 측정방법으로 널리 쓰이고 있으나, 실시간으로 입자의 양을 측정할 수 없고, Test wafer 사용에 따른 비용증가의 단점이 있어 공정 중에 입자를 실시간으로 측정할 수 있는 대안기술이 필요한 실정이다. ISPM (In-Situ Particle Monitoring)은 레이저 산란방식을 이용한 실시간 입자측정 장비로서 오염원 발생에 대한 즉각적인 대처와 조치가 가능하고 부가적인 추가 비용이 발생하지 않기 때문에 실시간 모니터링 장비가 없는 현재의 반도체 공정에 충분히 적용될 가능성이 있다. 특히 CVD 공정은 반도체 공정의 약 30%를 차지할 만큼 중요한 단계로 생성되는 오염입자 모니터링을 통해 공정 불량 유무를 판단할 수 있을 것으로 기대된다. 본 연구에서는 Silane 가스를 이용한 PECVD (Plasma Enhanced Chemical Vapor Deposition) 공정 중 발생되는 오염입자를 ISPM을 이용하여 실시간으로 측정하였다. 챔버 배기구에 두 가지 타입의 ISPM을 설치하고 공정압력, 유량, 플라즈마 파워를 공정변수로 하여 각각의 조건에서 발생되는 오염입자의 분포 변화를 실시간으로 측정하였으며 결과를 비교 분석하였다.

• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.161-168
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• 2014

A real-time monitoring of immersed antenna type inductively coupled plasma (ICP) was done with a homemade 2 dimensional voltage probe array to check the uniformity of the plasma. Measured voltage values with a high impedance voltmeter are close to the floating potential of the plasma. As the substrate carrier was moving into a magnetron sputtering plasma diffusive from a $125mm{\times}625mm$ size cathode, measured results showed reliably separation of plasma into the upper and lower empty space over the carrier. Infra red thermal imaging camera was used to observe the cross corner effect in situ without eroding a target to the end of the usage. 3 dimensional particle trace model was used to analyze the magnetron discharge's behavior.

• Proceedings of the KSRS Conference
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• 2003.11a
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• pp.667-669
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• 2003

A bio-optical model was developed specific for turbid and shallow waters. Special studies were carried out to estimate absorption and scattering properties as well as backscattering probability of suspended matter. The inversion of bio-optical model allows for direct retrieval of turbidity and chlorophyll- a from the visible-near infrared (VNIR) range sensor. Time-series satellite imagery from ASTER AM-1 sensor, were used to monitor the Laguna de Bay water quality condition. Spatial distribution of temperature for the lake was extracted from the thermal infrared (TIR) sensor. Corresponding field surveys were conducted to parameterize the bio -optical model. In-situ measurements include suspended particle and chlorophyll-a concentrations profiles from nephelometric devices and processing of water samples. Hyperspectral measurements were used to validate results of the bio -optical model and satellite- based estimation. This study provides a theoretical basis and a practical illustration of applying space- based measurements on an operational basis.

• Journal of Soil and Groundwater Environment
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• v.7 no.2
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• pp.35-44
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• 2002

In order to determine the contamination of the aromatic hydrocarbons in soil, a fiber-optic sensing technique with fluorescence detector has been proposed. Previous researches have shown that the optimal condition for detecting benzene, toluene, ethylbenzene, xylene (BTEX) was 260 nm /290 nm (excitation/emission wavelength). However, broader fluorescence spectra of BTEX-polluted soil sample ranging from 300 nm to 600 nm were observed. Additionally, the intensity of fluorescence increased with increasing BTEX concentration, which was conspicuous in the fine-particle soil, The overall results indicated that the suggested technique could be useful for in-situ monitoring system for subsurface oil-storage tank.

• Journal of the Korean Applied Science and Technology
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• v.34 no.3
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• pp.643-649
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• 2017

Biodegradable enzymes such as lipase and proteinase can hydrolyze not only fatty acid esters and triglycerides, but also aliphatic polyesters. We measured the biodegradability that biodegradable enzymes have an important role in the degradation of natural aliphatic poly material such as PLA, corn starch, and polyethylene glycol in the natural environment. However, we investigated on the biodegradability of PLA, PLA and Polyethylene acrylate blended, and PLAcoPolyethylene polymerized with PLA graft copolymer Polyethylene glycol acrylate. When prepared biodegradable polymers. the Mechanical properties of them were measured on Biodegradability, thermal properties, real time in-situ electrical monitoring of polymers resin. Therefore BOD and biodegradation of PLAcoPolyethylene was graft copolymerized with PLA and polyethylene acrylate were measured at a lower rate than the other samples.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.112-117
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• 2012

With the development of nanotechnology, nano-consumer products have been popularized. For the past 10 years, potential risk of nanomaterials to human and environment have been raised carefully. Especially, workers, who directly handle nanomaterials in laboratories and manfacturers, will lead to direct exposure of nanomaterials. Therefore, direct exposure assessment and field monitoring of nanomaterials are required to assess and manage the nanomaterial exposure to human and environment. In this work, two nano-manufacturing companies, which had plasma and sol-gel processes, were selected to analyze the main exposure source and process with in-situ SMPS (scanning mobility particle sizer) and ex-situ TEM (transmission electron microscopy). The results showed that the colloidal nanoparticle in liquid phase was easily evaporated and monitored by SMPS. Most serious thing is that the workers does not know about the potential risk of nanomaterials, and thus they are not taking proper protection activities, such as PPE (personal protective equipment). Therefore, exposure assessment for nanomaterial handling facilities should be additionally carried out, and nano-safety management protocols are also provided.