• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.17-17
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• 2010

This paper address technical issues in calibrating discharge coefficients of sonic nozzles used to measure the volume flow rate of low vacuum dry pumps. The first challenging issue comes from the technical limit that their calibration results available from the flow measurement standard laboratories do not fully cover the low vacuum measurement range although the use of sonic nozzles for precision measurement of gas flow has been well established in NMIs. The second is to make an ultra low flow sonic nozzlesufficient to measure the throughput range of 0.01 mbar-l/s. Those small-sized sonic nozzles do not only achieve the noble stability and repeatability of gas flow but also minimize effects of the fluctuation of down stream pressures for the measurement of the volume flow rate of vacuum pumps. These distinctive properties of sonic nozzles are exploited to measure the pumping speed of low vacuum dry pumps widely used in the vacuum-related academic and industrial sectors. Sonic nozzles have been standard devices for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two small-sized sonic nozzles of diameter 0.03 mm and 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter (CVFM) readily set up in the Vacuum center of KRISS was used to calibrate the discharge coefficients of the machined nozzles. The calibration results were shown to determine them within the 3% measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process. Both calibrated sonic nozzles are demonstrated to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of low vacuum dry pumps in the semiconductor and flat display processes.

• Tunnel and Underground Space
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• v.28 no.3
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• pp.258-276
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• 2018

The accurate and quantitative ground information on the hydraulic conductivity characteristics of rock mass is one of the key factors for evaluation of the hydro-geological behaviour of rock mass around an excavated opening under high water pressure. For tunnel and rock structures in seabed, where the sea acts as an infinite source of water, its importance become greater with increasing construction depth below sea level. In this study, to improve the problems related with poor system configuration and incorrect data acquisition of previous hydraulic packer testing equipment, we newly developed an integrated main frame and 30 bar level waterproof downhole sonde apparatus, which were optimized for deep hydraulic packer test in seabed rock mass. Integration of individual test equipment into one frame allows safe and efficient field testing work on a narrow offshore drilling platform. For the integrated type main frame, it is possible to make precise stepwise control of downhole net injection pressure at intervals of $2.0kg_f/cm^2$ or less with dual hydraulic oil volume controller. To ensure the system performance and the operational stability of the prototype mainframe and downhole sonde apparatus, the field feasibility tests were completed in two research boreholes, and using the developed apparatus, the REV(Representative Elementary Volume) scale deep hydraulic packer tests were successfully carried out at a borehole located in the basalt region, Jeju. In this paper, the characteristics of the new testing apparatus are briefly introduced and also some results from the laboratory and in-situ performance tests are shown.

• Journal of the Korea Concrete Institute
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• v.13 no.3
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• pp.228-236
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• 2001

Even though numerous researches have been performed for the prediction of thermal stresses in mass concrete structures by both analytical and experimental means, the limitations exist for both approaches. In analytical approach, the fundamental limitation is derived from the difficulty of predicting concrete properties such as modulus of elasticity, coefficient of thermal expansion, etc.. In experimental approach, there are many uncertainties related to in-situ conditions, because a majority of researches have focused on measuring thermal stresses in actual and simulated structures. In this research, an experimental device measuring thermal stresses directly in a laboratory setting is developed. The equipment is located in a temperature chamber that follows the temperature history previously obtained from temperature distribution analysis. Thermal strains are measured continuously by a strain gauge in the device and the corresponding thermal stresses are calculated simply by force equilibrium condition. For the verification of the developed device, a traditional experiment measuring thermal strains from embedded strain gauges is performed simultaneously. The results show that the thermal strain values measured by the newly developed device agree well with the results from the benchmark experiment.

• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.32-36
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• 2021

The number of processes in the manufacture of semiconductors, displays and solar cells is increasing. And as the processes is performed, multiple layers of films and various patterns are formed on the wafer. At this time, substrate warpage occurs due to the difference in stress between each film and pattern formed on the wafer. the substrate warping phenomenon occurs due to the difference in stress between each film and pattern formed on the wafer. We developed a new warpage measurement method to measure wafer warpage during real-time processing. We performed an experiment to measure the presence and degree of warpage of the substrate in real time during the process by adding only measurement equipment for applying additional electrical signals to the existing ESC and detecting the change of the additional electric signal. The additional electrical measurement signal applied at this time is very small compared to the direct current (DC) power applied to the electrostatic chuck whit a frequency that is not generally used in the process can be selectively used. It was confirmed that the measurement of substrate warpage can be easily separated from other power sources without affecting.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.6
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• pp.4276-4283
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• 2015

The purpose of this research is to identify the effectiveness of injection with soil conditions by injecting CaCO3(created by microorganism reaction), which was recreated with equipment in similar situ condition. To analyze our research, we made 2 cases of single-layer (SP, SW) in D 150mm ${\times}$ H 300mm. Layers were made by RC 70, 80, 85, 90, 95% of soil condition. We measured uniaxial compression strength with cone penetrometer and watched injection range by checking a bulb formation around the injection nozzle. As a result, the relative compaction(RC) in more 85% were not injected in SW, we could identify the effect of bio-grouting technology on ground in relative compaction(RC) of injection ratio and cementation range.

• Journal of Korea Water Resources Association
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• v.55 no.11
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• pp.931-939
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• 2022

In Korea, about two-thirds of the precipitation is concentrated in the summer season, so the problem of turbidity in the summer flood season varies from year to year. Concentrated rainfall due to abnormal rainfall and extreme weather is on the rise. The inflow of turbidity caused a sudden increase in turbidity in the water, causing a problem of turbidity in the dam reservoir. In particular, in Korea, where rivers and dam reservoirs are used for most of the annual average water consumption, if turbidity problems are prolonged, social and environmental problems such as agriculture, industry, and aquatic ecosystems in downstream areas will occur. In order to cope with such turbidity prediction, research on turbidity modeling is being actively conducted. Flow rate, water temperature, and SS data are required to model turbid water. To this end, the national measurement network measures turbidity by measuring SS in rivers and dam reservoirs, but there is a limitation in that the data resolution is low due to insufficient facilities. However, there is an unmeasured period depending on each dam and weather conditions. As a sensor for measuring turbidity, there are Optical Backscatter Sensor (OBS) and YSI, and a sensor for measuring SS uses equipment such as Laser In-Situ Scattering and Transmissometry (LISST). However, in the case of such a high-tech sensor, there is a limit due to the stability of the equipment. Therefore, there is an unmeasured period through analysis based on the acquired flow rate, water temperature, SS, and turbidity data, so it is necessary to develop a relational expression to calculate the SS used for the input data. In this study, the AEM3D model used in the Water Resources Corporation SURIAN system was used to improve the accuracy of prediction of turbidity through the turbidity-SS relationship developed based on the measurement data near the dam outlet.

• The Journal of Engineering Geology
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• v.19 no.3
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• pp.417-422
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• 2009

Tunnels that have recently been constructed are characterized by longer length than ever before and furthermore they frequently go through the ground area with poor conditions such as fractured zones. If ground strength is weak, plastic deformation of tunnel occurs, and occasionally a big fall may be brought about. Up to now, the construction work of tunneling has been executed as a sequential method placing the lining concrete after completion of excavation. Such a method requires a long time and much money to complete the tunnel. It is hard to ensure the stability of tunnel if tunnel is left undone for a long time after excavation in fracture zones or plastic grounds. For this reason, we tried to take simultaneous construction of tunnel excavation and lining concrete in order to not only shorten construction schedule but also stabilize the tunnel at the highly fractures zone as soon as possible. As preliminary consideration for simultaneous construction, in-situ tests are performed to calculate the isolation distance over which blasting vibration does not influence the strength of lining concrete. Improvement of ling form, placing method of concrete, ventilation using a dust collector, together with equipment arrangement, was made to assure the simultaneous construction work.

• Journal of Biosystems Engineering
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• v.36 no.2
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• pp.96-108
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• 2011

Several methods of in-field measurements of Nitrogen and other soil properties using cores extracted by a hydraulic soil sampler were evaluated. A prototype core scanner was built to accommodate Veris Technologies commercial Vis-NIRS equipment. The testing result for pH, P and Mg were close to RPD (Ratio of Prediction to Deviation = Standard deviation/RMSE) of 2, however the scanner could not achieve the goal of RPD of 2 on some other properties, especially on nitrate nitrogen ($NO_3$) and potassium (K). In situ NIRS/EC probe showed similar results to the core scanner; pH, P and Mg were close to RPD of 2, while $NO_3$ and K were RPD of 1.5 and 1.2, respectively. Correlations between estimations using the probe and the core scanner were strong, with $r^2$ > 0.7 for P, Mg, Total N, Total C and CEC. Preliminary results for mid-IR spectroscopy showed an $r^2$ of 0.068 and an RMSE for nitrate (N) of 18 ppm, even after the removal of calcareous samples and possible N outlier. After removal of calcareous samples on a larger sample set, results improved considerably with an $r^2$ of 0.64 and RMSE of 6 ppm. However, this was only possible after carbonate samples were detected and eliminated, which would not be feasible under in-field measurements. Testing of $NO_3$ and K ion-selective electrodes (ISEs) revealed promising results, with acceptable errors measuring soil solutions containing nitrate and potassium levels that are typical of production agriculture fields.

• Journal of Advanced Marine Engineering and Technology
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• v.39 no.9
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• pp.973-980
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• 2015

With their wide geographical distribution, unconventional resources are continuously compared against conventional resources, but their development is expanding because TRRs (Technical Recoverable Resources) are similar to conventional resources. In particular, there is active development of unconventional gas resources such as shale gas, tight gas, CBM (coalbed methane) and gas hydrate. However, it is difficult to calculate the material properties of unconventional resources, especially the gas content, with current geophysical logging technology. Additionally, some overseas companies have monopolies on related equipment and materials. Therefore, this study developed a reservoir PCS (Pressure Core Sampler). It can collect core samples without gaseous loss by maintaining high pressure from the moment the core is sampled and record pressure and temperature in real time. Successful performance testing was also carried out for official verification of the manufactured PCS. The reservoir PCS will contribute to the acquisition of geophysical well logging data as well as accurate and reliable cores.

• Asian Pacific Journal of Cancer Prevention
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• v.16 no.3
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• pp.1129-1133
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• 2015

Background: The tissue microarray (TMA) is widely accepted as a fast and cost-effective research tool for in situ tissue analysis in modern pathology. However, the current automated and manual TMA techniques have some drawbacks restricting their productivity. Our study aimed to introduce an improved manual tissue miniarray (TmA) technique that is simple and readily applicable to a broad range of tissue samples. Materials and Methods: In this study, a conventional TV/radio telescopic antenna was used to punch tissue cores manually from donor paraffin embedded tissue blocks which were pre-incubated at $40^{\circ}C$. The cores were manually transferred, organized and attached to a standard block mould, and filled with liquid paraffin to construct TmA blocks without any use of recipient paraffin blocks. Results: By using a conventional TV/radio antenna, it was possible to construct TmA paraffin blocks with variable formats of array size and number ($2-mm{\times}42$, $2.5-mm{\times}30$, $3-mm{\times}24$, $4-mm{\times}20$ and $5-mm{\times}12$ cores). Up to $2-mm{\times}84$ cores could be mounted and stained on a standard microscopic slide by cutting two sections from two different blocks and mounting them beside each other. The technique was simple and caused minimal damage to the donor blocks. H&E and immunostained slides showed well-defined tissue morphology and array configuration. Conclusions: This technique is easy to reproduce, quick, inexpensive and creates uniform blocks with abundant tissues without specialized equipment. It was found to improve the stability of the cores within the paraffin block and facilitated no losses during cutting and immunostaining.