• Title/Summary/Keyword: in-situ Monitoring

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Real-time Contaminant Particle Monitoring for Chemical Vapor Deposition of Borophosphosilicate and Phosphosilicate Glass Film by using In-situ Particle Monitor and Particle Beam Mass Spectrometer (ISPM 및 PBMS를 이용한 BPSG 및 PSG CVD 공정 중 발생하는 오염입자의 실시간 측정)

  • Na, Jeong Gil;Choi, Jae Boong;Moon, Ji Hoon;Lim, Sung Kyu;Park, Sang Hyun;Yi, Hun Jung;Chae, Seung Ki;Yun, Ju Young;Kang, Sang Woo;Kim, Tae Sung
    • Particle and aerosol research
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    • v.6 no.3
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    • pp.139-145
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    • 2010
  • In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM) and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.

Modeling of Suspended Solids and Sea Surface Salinity in Hong Kong using Aqua/MODIS Satellite Images

  • Wong, Man-Sing;Lee, Kwon-Ho;Kim, Young-Joon;Nichol, Janet Elizabeth;Li, Zhangqing;Emerson, Nick
    • Korean Journal of Remote Sensing
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    • v.23 no.3
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    • pp.161-169
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    • 2007
  • A study was conducted in the Hong Kong with the aim of deriving an algorithm for the retrieval of suspended sediment (SS) and sea surface salinity (SSS) concentrations from Aqua/MODIS level 1B reflectance data with 250m and 500m spatial resolutions. 'In-situ' measurements of SS and SSS were also compared with coincident MODIS spectral reflectance measurements over the ocean surface. This is the first study of SSS modeling in Southeast Asia using earth observation satellite images. Three analysis techniques such as multiple regression, linear regression, and principal component analysis (PCA) were performed on the MODIS data and the 'in-situ' measurement datasets of the SS and SSS. Correlation coefficients by each analysis method shows that the best correlation results are multiple regression from the 500m spatial resolution MODIS images, $R^2$= 0.82 for SS and $R^2$ = 0.81 for SSS. The Root Mean Square Error (RMSE) between satellite and 'in-situ' data are 0.92mg/L for SS and 1.63psu for SSS, respectively. These suggest that 500m spatial resolution MODIS data are suitable for water quality modeling in the study area. Furthermore, the application of these models to MODIS images of the Hong Kong and Pearl River Delta (PRO) Region are able to accurately reproduce the spatial distribution map of the high turbidity with realistic SS concentrations.

MULTI-SENSOR INTEGRATION SYSTEM FOR FOREST FIRE PREVENTION

  • Kim Eun Hee;Chi Jeong Hee;Shon Ho Sun;Jung Doo Young;Lee Chung Ho;Ryu Keun Ho
    • Proceedings of the KSRS Conference
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    • 2005.10a
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    • pp.450-453
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    • 2005
  • A forest fire occurs mainly as natural factor such as wind, temperature or human factor such as light. Recently, the most of forest fire prevention is prediction or prevision against forest fire by using remote sensing technology. However in order to forest fire prevention, the remote sensing has many limitations such as high cost and advanced technologies and so on. Therefore, we need to multisensor integration system that utilize not only remote sensing but also in-situ sensing in order to reduce large damage of forest fire though analysis of happen cause and prediction routing of occurred forest fire. In this paper we propose a multisensor integration system that offers prediction information of factors and route of forest fire by integrates collected data from remote sensor and in-situ sensor for forest fire prevention. The proposed system is based on wireless sensor network for collect observed data from various sensors. The proposed system not only offers great quality information because firstly, raw data level fuse different format of collected data from remote and in-situ sensor but also accomplish information level fusion based on result of first stage. Offered information from our system can help early prevention of factor and early prevision against occurred forest fire which transfer to SMS service or alert service into monitoring interface of administrator.

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Optical Structures of Multilayer Coatings of Antireflection Lenses and their Transmission Characteristics (무반사 렌즈용 다층박막의 광학적 구조 및 광투과 특성)

  • 김상열;최성숙
    • Korean Journal of Optics and Photonics
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    • v.6 no.4
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    • pp.259-265
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    • 1995
  • Antireflection coatings on optical lenses commertially available in domestic market are optically analyzed. Transmission spectra and reflection spectra are collected using spectrophotometers. The apparent absorption spectra around the absorption band edge are dominated by the substrate absorption. The reflection spectra and the apparent absorption spectra at visible region between 400nm and 700nm show very strong correlation to each other except a couple samples. The discrepency observed in the latters are due to an increased absorption in visible region by the substrate, which is negative effect of these samples. An antireflection coating consisted of $SiO_2/TiO_2/SiO_2/ZrO_2/Cr$ is made on c-Si substrate for spectroscopic ellispometry analysis. A film-by-film coating is accomplished and between each film deposition, ex-situ spectroscopic ellipsometry measurements are made. The analysis of the spectroscopic ellipsometry data reveals that the average film densities of $ZrO_2$ and $TiO_2$ reach only 80% of their respective packing densities and thick films are inhomogeneous along film growth direction. Discussions are made toward in-situ, real-time monitoring of the film growth so that a real-time feedback is possible to achieve a post-correction to minor deviations occured in the previous step. step.

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Calibration System for Three-Cup Anemometers (현장용 교정 장치를 이용한 3-컵 풍속계의 교정 방법)

  • Chun, Se-Jong;Lee, Saeng-Hee;Choi, Yong-Moon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.34 no.3
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    • pp.325-331
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    • 2010
  • Three-cup anemometers are popular devices for measuring wind speeds in automated weather stations, environmental monitoring systems, and wind turbines. Cup anemometers usually suffer from lack of long-term stability owing to the wear of the bearing systems that support the rotational parts. The bearing systems are susceptible to external pollutants, vibrations, and gusts. Therefore, these anemometers have to be calibrated regularly to maintain the desired characteristics for measuring wind speed. In the present study, a new in-situ calibration system to help reduce cost and save time by calibrating the cup anemometers at the installation site is proposed. A portable in-situ calibrator was fabricated. After the characteristics of this calibrator were verified, it was used to calibrate cup anemometers. Some of the calibration results were compared with the data obtained by wind tunnel testing.

Study on deep Si etching mechanism using in-situ surface temperature monitoring in $SF_6/O_2$ plasma

  • Im, Yeong-Dae;Lee, Seung-Hwan;Yu, Won-Jong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.405-405
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    • 2010
  • Thermocouple 을 통해 Inductively coupled plasma 에 노출된 실리콘 기판 표면온도를 공정조건 변화 에 따라 실시간 (in-situ) 측정하였다. 이를 바탕으로 공정변화에 따른 플라즈마 내 활성종의 거동을 연구하였다. 더 나아가 기판의 표면온도변화 및 활성종의 거동해석을 토대로 공정변화에 의한 딥 실리콘 구조형성 메커니즘을 해석하였다. 플라즈마에 노출된 기판표면 온도를 상승시키는 주 활성종은 positive ion 이며 ICP power, Bias power, 플라즈마 압력 변화에 따라 positive ion 의 밀도 및 가속에너지가 변화하는데 이러한 거동변화는 기판의 표면온도를 변화시킴을 알 수 있었다. 딥 실리콘 구조의 측벽 및 바닥에 형성되어 있는 passivaiton layer 즉 $SiO_xF_y$(silicon oxyflouride) 는 온도에 매우 민감한 물질이며 이는 딥 실리콘 구조 내부로 입사하는 positive ion 거동변화에 따라 그 성질이 변화하여 deep Si 구조 형상을 변화시킴을 알 수 있었다. 기판표면 온도가 $0^{\circ}C$ 이하의 극저온으로 유지된 상황에서 플라즈마를 방전할 경우 positive ions 의 가속에너지로 인해 기판표면온도가 상승하며 액화질소 유량증가를 통해 다시 기판의 표면온도를 유지시킬 수 있었다. 이를 통해 플라즈마 방전 전과 방전 후의 기판 표면온도는 상온의 기판뿐만 아니라 극저온의 기판에서도 다름을 알 수 있었다. 냉각환경 변화에 따른 딥 실리콘 구조형성 메커니즘을 positive ions 거동 그리고 온도 감소에 의한 $SiO_xF_y$ 성질 변화를 이용해 해석할 수 있었다.

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Application of Back Analysis for Tunnel Design by Modified In Situ Rock Model (현장암반 모델을 적용한 터널의 역해석)

  • Kim, Hak-Mun;Lee, Bong-Yeol;Hwang, Ui-Seok;Kim, Tae-Hun
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.2 no.3
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    • pp.25-36
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    • 2000
  • The purpose of this research work is to propose an analytical method of tunnel design based on reasonable site data. Therefore the proposed design method consists of monitoring data and Modified In Situ Rock Model. Also the Rock Mass Rating for very poor quality rock is very difficult to estimate, the balances between the ratings may no longer gives a reliable basis for the rock mass strength. But in reality Rock Mass Rating is only the property which can be obtained from face mapping records of the exposed tunnel face during construction stage. Evaluation of rock parameters for the actual design prior to tunnel construction should be corrected during tunnelling process in particularly complex ground conditions. This study intends to investigate application of in-situ rock model to soft rock tunnelling (weathered rock) by face mapping results and site measurement data that are obtained at the costraction site of Seoul Subway Tunnel. For the preparation of more reliable ground parameters, the Rock Mass Rating values for the weathered rocks were modified and readjusted in accordance with the measurement data. The modified input parameters obtained by the proposed method are used for the prediction of the tunnel behavior at subsequent construction stages. The results of this study revealed that more reasonable feed back tunnel analysis can be possible as suggested. Ample measurement data would be able to confirm the new proposed technique in this research work.

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Effects of Yeast Culture Supplementation on Rice Straw Digestibility and Cellulolytic Bacterial Community in the Rumen (볏짚 조사료에 대한 효모 배양물 첨가가 반추위 소화율 및 섬유소 분해균의 군락 변화에 미치는 영향)

  • Sung, Ha Guyn
    • Journal of Animal Science and Technology
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    • v.55 no.1
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    • pp.41-49
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    • 2013
  • In vitro and in situ incubation studies were conducted to determine effects of yeast culture supplements (Saccharomyces cerevisiae) on cellulolytic bacterial function and fiber digestion in rice straw. In vitro dry matter digestibility of rice straw gradually increased according to supplemental levels of yeast culture (0.0, 0.2, 0.4, 0.6, 0.8 and 1.0%). Digestibility of rice straw started to increase apparently when yeast culture was added more than 0.6% level (p<0.05). Also, we reconfirmed that in vitro dry matter digestibility was significantly increased by 0.6% of yeast culture addition in 4% NaOH treated and non-treated rice straws (p<0.05). When in situ dry matter digestibility was tested in Korean native goats fed basal diet or experimental diet which contained 1.0% of yeast culture, the yeast culture feeding improved in situ dry matter digestibility in both 4% NaOH treated and non-treated rice straws (p<0.05). In case of real-time PCR monitoring cellulolytic bacterial function, the bacterial population attached on rice straw showed the increasing trends with higher level of yeast culture spraying on rice straw. F. succinogenes and R. flavefaciens were significantly increased in accordance to spraying levels of yeast culture (0.0, 0.1 and 0.3%) at both 12 and 24 hrs of in situ incubation (p<0.05). R. albus was significantly higher population in yeast culture spraying than non-soraying at 12 hrs of in situ incubation (p<0.05). These bacterial populations were showed the increasing trends with digestibility enhancement of rice straw according to the higher levels of yeast culture supplement. Overall, these results clearly suggest that the presence of yeast culture result in noticeable increase of rice straw digestion, which is modulated via good effect on cellulolytic bacterial attachment to fiber substrates.

An Automated Water Nitrate Monitoring System based on Ion-Selective Electrodes

  • Cho, Woo Jae;Kim, Dong-Wook;Jung, Dae Hyun;Cho, Sang Sun;Kim, Hak-Jin
    • Journal of Biosystems Engineering
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    • v.41 no.2
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    • pp.75-84
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    • 2016
  • Purpose: In-situ water quality monitoring based on ion-selective electrodes (ISEs) is a promising technique because ISEs can be used directly in the medium to be tested, have a compact size, and are inexpensive. However, signal drift can be a major concern with on-line management systems because continuous immersion of the ISEs in water causes electrode degradation, affecting the stability, repeatability, and selectivity over time. In this study, a computer-based nitrate monitoring system including automatic electrode rinsing and calibration was developed to measure the nitrate concentration in water samples in real-time. Methods: The capabilities of two different types of poly(vinyl chloride) membrane-based ISEs, an electrode with a liquid filling and a carbon paste-based solid state electrode, were used in the monitoring system and evaluated on their sensitivities, selectivities, and durabilities. A feasibility test for the continuous detection of nitrate ions in water using the developed system was conducted using water samples obtained from various water sources. Results: Both prepared ISEs were capable of detecting low concentrations of nitrate in solution, i.e., 0.7 mg/L $NO_3-N$. Furthermore, the electrodes have the same order of selectivity for nitrate: $NO_3{^-}{\gg}HCO_3{^-}$ > $Cl^-$ > $H_2PO_4{^-}$ > $SO{_4}^{2-}$, and maintain their sensitivity by > 40 mV/decade over a period of 90 days. Conclusions: The use of an automated ISE-based nitrate measurement system that includes automatic electrode rinsing and two-point normalization proved to be feasible in measuring $NO_3-N$ in water samples obtained from different water sources. A one-to-one relationship between the levels of $NO_3-N$ measured with the ISEs and standard analytical instruments was obtained.

Prediction and Assessment on Consolidation Settlement for Soft Ground by Hydraulic Fill (준설매립 연약지반에 대한 압밀침하 예측 및 평가)

  • Jeon, Je-Sung;Koo, Ja-Kap;Oh, Jeong-Tae
    • Journal of the Korean Geotechnical Society
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    • v.24 no.9
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    • pp.33-40
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    • 2008
  • This paper describes the performance of ground improvement project using prefabricated vertical drains of condition, in which approximately 10m dredged fill overlies original soft foundation layer in the coastal area composed of soft marine clay with high water content and high compressibility. From field monitoring results, excessive ground settlement compared with predicted settlement in design stage developed during the following one year. In order to predict the final consolidation behavior, recalculation of consolidation settlements and back analysis using observed settlements were conducted. Field monitoring results of surface settlements were evaluated, and then corrected because large shear deformation occurred by construction events in the early stages of consolidation. To predict the consolidation behavior, material functions and in-situ conditions from laboratory consolidation test were re-analyzed. Using these results, height of additional embankment is estimated to satisfy residual settlement limit and maintain an adequate ground elevation. The recalculated time-settlement curve has been compared with field monitoring results after additional surcharge was applied. It might be used for verification of recalculated results.