• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 추계학술대회 논문집
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• pp.54-58
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• 1994

H$_2$ bake and GeH$_4$ clean are used as a in-situ pre-clean method in low temperature Si based epitaxial growth technology using rapid thermal processing chemical vapor deposition (RTPCVD). In this paper, the H$_2$ bake and GeH$_4$ clean processes are optimized for low surface defect density using Taguchi method. In H$_2$ bake process, the epitaxial growth temperature affects dominantly on the surface defect density, and the next affecting factors are H$_2$ bake temperature and rinse time in de-ionised water. In GeH$_4$ clean process, GeH$_4$ clean temperature affects most strongly on the surface defect density, and the minor factor is GeH$_4$flow rate. The optimum process conditions predicted fly Taguchi method agree well with tile experimental data in both in-situ clean processes.

• 펄프종이기술
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• 제46권5호
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• pp.27-34
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• 2014

In-situ $CaCO_3$ formation onto recycled wood pulp was studied to improve optical properties and ash attachment to the fiber furnish in papermaking. We controlled initial reaction temperature of in-situ $CaCO_3$ formation method from $30^{\circ}C$ to $50^{\circ}C$. It was found that the attachment of newly formed $CaCO_3$ to recycled fibers, old newspaper (ONP) in this case, was stronger than that of ground calcium carbonate (GCC, mean dia. $2.4{\mu}m$) addition case, but was not much different among those formed at different temperature. Morphologies of newly formed $CaCO_3$ were changed according to the reaction temperature. More aragonite shape was seen at higher temperature. In-situ $CaCO_3$ formation increased brightness and lowered ERIC value of ONP sheet greatly at the same level of ash contents when compared to GCC addition method, but gave equivalent ERIC and brightness when compared to those of the precipitated calcium carbonate (PCC) addition method. However, tensile strength of the handsheets of the in-situ $CaCO_3$ formation method were much greater than those of the PCC addition method.

• Corrosion Science and Technology
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• 제22권4호
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• pp.265-272
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• 2023

The aim of this study was to develop a new in-situ observation method and instrument in micro-scale to investigate the mechanism of stress corrosion cracking (SCC) initiation of Ni-base alloys in a high temperature water environment of pressurized water reactors (PWRs). A laser confocal microscope (LCM), an autoclave with diamond window view port, and a slow strain-rate tester with primary water circulation loop system were components of the instrument. Diamond window, one of the core components of the instrument, was selected based on its optical, chemical, and mechanical properties. LCM was used to observe the specimen in micro-scale, considering the experimental condition of a high-temperature primary water environment. Using in-situ method and instrument, it is possible to observe oxidation and deformation of specimen surface in micro-scale through the diamond window in a high-temperature primary water in real-time. The in-situ method and instrument developed in this work can be utilized to investigate effects of various factors on SCC initiation in a high-temperature water environment.

• Transactions on Electrical and Electronic Materials
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• 제6권3호
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• pp.106-109
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• 2005

We have investigated the generation of pretilt angle for a nematic liquid crystal (NLC) alignment with in-situ photoalignment method on polyimide (PI) surfaces using polymer films. Especially, we studied in-situ photoalignment changing heating temperature from $50^{\circ}C\;to\;120^{\circ}C$ on the polymer film. The LC aligning capabilities and pretilt angle on the polymer substrates were better than those on the glass substrate using in-situ photoalignment method. It is considered that this increase in pretilt angle may be attributed to the roughness of the micro-groove substrate induced by the in-situ photoalignment. As temperature of heated subtrate and UV exposure time increase, pretilt angle of the cell used polymer film increased. It is considered that the heating temperature of substrate is attributed to generate pretilt angle. Also, electro-optical performances of the in-situ photoaligned TN cell using the polymer substrate are almost the same as that of the TN cell using the glass substrate.

• 대한원격탐사학회지
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• 제21권4호
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• pp.253-271
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• 2005

Landsat 시계열 영상과 실측수온자료를 이용하여 한강 수계 댐호들의 표면수온과 계절적 성층현상을 분석하였다. 1994년에서 2004년까지 29회에 걸쳐 얻어진 Landsat-5, 7 열적외선 영상으로부터 NASA 경험식을 이용하여 호수의 표면수온을 추출하였고, 이를 하천형 댐호인 파로호, 춘천호, 의암호, 청평호, 팔당호의 표층수온, 그리고 호소형 댐호인 소양호의 상층수온(수심 10m) 자료와 비교하였다. 십 수 년간 매월 1회 측정된 수온자료를 위성관측 날짜에 보간하여 사용하였음에도 불구하고, 하천형 댐호들에서는 수온오차(위성관측수온-실측보간수온)의 표준 편차가 $2^{\circ}C$ 이하인 영상이 94개로서, 새로운 통계적 대기보정을 적용할 수 있었다. 실측보간수온과 위성관측수온의 상관계수는 소양호가 0.915 (대기보정 후 0.950), 다른 호수는 0.951-0.980 (대기보정 후 0.979-0.997)로서, 높은 상관성을 보여주었다. 이는 수심이 얕고 인위적인 물의 유입과 유출이 연중 계속되는 하천형 댐호의 표층에는 혼합층이 상시 존재하고 수온의 일변화 및 월변화가 비교적 연속적이기 때문인 것으로 해석되었다. 그러나 소양호에서는 4-7월에 위성관측수온이 실측보간수온보다 $3-5^{\circ}C$ 더 높게 나타나는 이상 수온오차가 관찰되었다. 한강 수계의 최상류에 위치하며 수심이 깊고 자연적인 유입량만이 존재하는 소양호에서 이 시기는 상층수의 물리적 혼합현상이 없이 매우 안정적이고, 일조량 증가에 따라 호수 상층부에 수온약층이 발달하기 때문에, 수심 10m에서 측정된 실측수온보다 위성으로 관측된 표면수온이 연중 비교적 건조한 이 시기에 더 높게 나타나는 것으로 밝혀졌다.

• 센서학회지
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• 제26권6호
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• pp.438-444
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• 2017

In this paper, we focus on optimization of the in-situ phosphorous (P) doping of low-pressure chemical vapor deposited (LPCVD) poly Si resistors for obtaining near-zero temperature coefficient of resistance (TCR) at temperature range from 25 to $600^{\circ}C$. The deposited poly Si films were annealed by rapid thermal anneal (RTA) process at the temperature range from 900 to $1000^{\circ}C$ for 90s in nitrogen ambient to relieve intrinsic stress and decrease the TCR in the poly Si layer and get the Ohmic contact. After the RTA process, a roughness of the thin film was slightly changed but the grain size and crystallinity of the thin film with the increase in anneal temperature. The film annealed at $1,000^{\circ}C$ showed the behavior of Schottky contact and had dislocations in the films. Ohmic contact and TCR of $334.4{\pm}8.2$ (ppm/K) within 4 inch wafer were obtained in the measuring temperature range of 25 to $600^{\circ}C$ for the optimized 200 nm thick-poly Si film with width/length of $20{\mu}m/1,800{\mu}m$. This shows the potential of in-situ P doped LPCVD poly Si as a resistor for pressure sensor in harsh environment applications.

• 한국재료학회지
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• 제14권5호
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• pp.305-309
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• 2004

Mechanical alloying (MA) of Ti-25.0～37.5at%Si powders was carried out in a high-energy ball mill, and in situ thermal analysis was also made during MA. In order to classify the synthesis behavior of the powders with respect to at%Si, the synthesis behavior during MA was investigated by in situ thermal analysis and X-ray diffraction (XRD). In situ thermal analysis curves and XRD patterns of Ti-25.0～26.1at%Si powders showed that there were no peaks during MA, indicating $Ti_{5}$ $Si_3$ was synthesised by a slow reaction of solid state diffusion. Those of Ti-27.1～37.5at%Si powders, however, showed that there were exothermic peaks during MA, indicating $_Ti{5}$ $Si_3$ and$ Ti_3$Si phase formation by a rapid exothermic reaction of self-propagating high-temperature synthesis (SHS). For Ti-27.1～37.5at%Si powders, the critical milling times for SHS decreased from 38.1 to 18.5 min and the temperature rise, ΔT (= peak temperature - onset temperature) increased form $19.5^{\circ}C$ to $26.7^{\circ}C$ as at%Si increased. The critical composition of Si for SHS reaction was found to be 27.1at% and the critical value of the negative heat of formation of Ti-27.1at%Si to be -1.32 kJ/g.

• 한국재료학회지
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• 제14권5호
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• pp.310-314
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• 2004

Mechanical alloying (MA) of Ti-50.0～66.7at%Si powders was carried out in a high-energy ball mill, and in situ thermal analysis was also made during MA. In order to classify the synthesis behavior of the powders with respect to at%Si, the synthesis behavior during MA was investigated by in situ thermal analysis and X-ray diffraction (XRD). In situ thermal analysis curves and XRD patterns of Ti-50.0～59.6at%Si powders showed that there were exothermic peaks during MA, indicating TiSi, $TiS_2$, and $Ti_{5}$ $Si_4$ phase formation by a rapid exothermic reaction of self-propagating high-temperature synthesis (SHS). Those of Ti-59.8～66.7 at%Si powders, however, showed that there were no peaks during MA, indicating any Ti silicide was not synthesised until MA 240 min. For Ti-50.0～59.6at%Si powders, the critical milling times for SHS increased from 34.5 min to 89.5 min and the temperature rise, $\Delta$T (=peak temperature-onset temperature) decreased form $26.2^{\circ}C$ to $17.1^{\circ}C$ as at%Si increased. The critical composition of Si for SHS reaction was found to be 59.6at% and the critical value of the negative heat of formation of Ti-59.6at%Si to be -1.48 kJ/g.

• 소성∙가공
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• 제16권3호
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• pp.210-214
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• 2007

Manufacturing bulk nanostructured materials with least grain growth from initial powders is challenging because of the bottle neck of bottom-up methods using the conventional powder metallurgy via compaction and sintering. In the study, densification behavior of nano Cu powders during pressureless sintering was investigated using an in-situ optical dilatometer technique. The initial heating and steady temperature stages during the sintering of nano Cu powder compacts were observed. At the initial heating stage, the powder compact has many porosities and full densification needs high temperature and/or high pressure sintering. In the experimental analysis, changes in geometry and density were measured and discussed for optimal consolidation and densification by the in-situ optical dilatometer.

• Applied Microscopy
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• 제43권2호
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• pp.88-97
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• 2013

Technical investigation to figure out the problems arising during in-situ heating electron backscatter diffraction (EBSD) analysis inside scanning electron microscopy (SEM) was carried out. EBSD patterns were successfully acquired up to $830^{\circ}C$ without degradation of EBSD pattern quality in steels. Several technical problems such as image drift and surface microstructure pinning were taking place during in-situ experiments. Image drift problem was successfully prevented in constant current supplying mode. It was revealed that the surface pinning problem was resulted from the $TiO_2$ oxide particle formation during heating inside SEM chamber. Surface pinning phenomenon was fairly reduced by additional platinum and carbon multi-layer coating before in-situ heating experiment, furthermore was perfectly prevented by improvement of vacuum level of SEM chamber via leakage control. Plane view in-situ observation provides better understanding on the overall feature of recrystallization phenomena and cross sectional in-situ observation provides clearer understanding on the recrystallization mechanism.