• Journal of the Semiconductor & Display Technology
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• v.16 no.2
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• pp.75-78
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• 2017

We reports improved monitoring performance of Self plasma-optical emission spectroscopy (SP-OES) by augmenting a by-pass tube to a conventional straight (or single) tube type self plasma reactor. SP-OES has been used as a tool for the monitoring of plasma chemistry indirectly in plasma process system. The benefits of SP-OES are low cost and easy installation, but some semiconductor industries who adopted commercialized SP-OES product experiencing less sensitivity and slow sensor response. OH out-gas chemistry monitoring was performed to have a direct comparison of a conventional single type tube and a by-pass type tube, and fluid dynamic simulation on the improved hardware design was also followed. It is observed faster pumping out of OH from the chamber in the by-pass type SP-OES.

• Journal of the Korean Vacuum Society
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• v.8 no.1
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• pp.20-25
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• 1999

The effect of different plasma surface preparation and oxidation processes for the formation of $SiO_2-Si$(100) interfaces was studied using angle resolved uv-photoelectron spectroscopy. The surface preparation processes included ex situ preclean as well as in situ hydrogen plasma, which were compared to the processes of UHV annealing at high temperature. The spectral position of the oxide valence band features, with respect to the Fermi level. Were found to shift according to the different processes of surface preparation and oxidation. The shifts were analyzed in terms of band bending in the Si. Origins of the spectral shifts were considered to include defects at the $SiO_2Si$ interfaces and surface morphology(roughness) dependent on the surface preparation processes. From comparison of the ARUPS results of the various processes, it was concluded that the interface bonding of the silicon oxide-showed the lowest band bending.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.689-690
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• 2012

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.141-141
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• 1999

전기화학과 초고진공(ultra-high vacuum, UHV) 분광법을 이용하여 고체/액체의 계면에서 일어나는 현상을 분자단위에서 이해하고 조절하기 위한 연구를 수행하였다. 이들 중 전기화학으로 형성된 구리 및 은 금속(sub)monlayer 박막을 그 예로 선택하여 소개한다. 초박막 금속의 흡착량은 cyclic voltammogram과 새로 개발된 Auger electron spectroscopy (AES) 정량법을 통해 얻어졌고, 이 값들은 low energy electron diffraction (LEED) 및 in-situ atomic force microscopy (AFM)법을 이용한 구조 분석결과와 비교되어졌다. 또한 화학상태를 확인하기 위하여 core-level electron energyy loss spectroscopy (CEELS)를 사용하였다. 먼저 황산 전해질에서 금(111) 단결정 전극상에 전기화학적으로 형성된 굴의 계면특성을 조사하였다. 특정 전위값에서 2/3 ML의 구리와 1/3 ML의 음이온이 상호 흡착하여 ({{{{ SQRT { 3} }}$\times${{{{ SQRT { 3} }}) 격자 구조를 보였고, 전위값이 커지거나 줄어들면, 이 구조가 사라지는 현상이 관찰되었다. 즉 이 ({{{{ SQRT { 3} }}}}$\times${{{{ SQRT { 3} }}}}) 흡착구조는 첫 번째 UPD underpotential deposition) 피크에 특이하게 관련되어 있음을 알 수 있었다. 금속 초박막 형성에 미치는 음이온의 영향을 좀 더 확인하기 위해 초박막 은이 증착된 금 단결정 전극상의 황산 음이온에 관하여 연구하였다. 은의 증착이 일어날 수 없는 양전위값 영역에서 ({{{{ SQRT { 3} }}}}$\times${{{{ SQRT { 3} }}}})의 규칙적인 음이온의 구조를 보였다. 그리고 은의 장착은 세척 과정과 용액의 농도에 따라 p(3$\times$3)과 p(5$\times$5)의 규칙적인 두가지 구조를 가졌다. in-situ AFM에서는 p(3$\times$3)의 은 증착 구조만 나타났고, 음 전위값으로 옮겨가면 p(1$\times$1) 구조로 바뀌었다. ex-situ 초고진공 결과와 이 AFM의 in-situ 결과를 상호 비교 논의할 것이다. 음이온의 흡착이 없는 묽은 플로르산(HF) 전해질에서 은은 전위값을 음전위 쪽으로 이동해 감에 따라 p(3$\times$3), p(5$\times$5), (5$\times$5), (6$\times$6), 그리고 (1$\times$1)의 연속적 구조 변화를 보였다. 이 다양한 구조들을 AES로부터 얻어진 표면 흡착량과 연결시켰더니 정량적으로 잘 일치되는 결과를 보였다. 전기화학적인 증착에서는 기존의 진공 증착과 비교할 때 음이온의 공흡착이 금속 초박막 형성 메카니즘에 큰 영향을 미침을 알 수 있었다. 또한 은의 전기화학적 다층박막 성장은 MSM (monolayer-simultaneous-multilayer) 메카니즘을 따름을 확인하였다. 마지막으로 구조 및 양이 규칙적으로 조절되는 전극의 응용가능성이 간단히 논의될 것이다.

• Journal of the Korean Physical Society
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• v.73 no.10
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• pp.1546-1549
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• 2018

We have investigated core-levels of ZnO thin films at the interface with the graphene on Cu foil using in-situ X-ray Photoelectron Spectroscopy (XPS). Spectral evolution of C 1s, Zn 2p, and O 1s are observed in real time during RF sputtering deposition. We found binding energy (BE) shifts of Zn 2p and 'Zn-O' state of O 1s depending on ZnO film thickness. Core-levels BE shifts of ZnO will be discussed on the basis of electron transfer at the interface and it may have an important role in the electronic transport property of the ZnO/graphene-based electronic device.

• Journal of the Korean Electrochemical Society
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• v.3 no.4
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• pp.211-218
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• 2000

The effects of alloying elements, Cr, Mo, and N on repassivation characteristics of stainless steels were investigated by using the abrading electrode technique and a.c impedance spectroscopy. The role of alloying elements on the stability of passive film and their repassivation characteristics were examined using alloy steels such as Fe-Cr, Fe-Cr-Mo, 304, 304LN, 316, and 316LN. The electrochemical characteristics of the passive film were investigated by in-situ d.c. and a.c. electrochemical methods. Localized corrosion resistance is believed to have much to do with the stability and repassivation characteristics of the passive film. The effects of alloying elements on the current transients and repassivation kinetics were systematically examined by using the abrading electrode technique and a.c. impedance spectroscopy. The experimental results were analyzed in order to elucidate the relationship between passive film stability, repassivation characteristics, and alloying elements.

• Elastomers and Composites
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• v.53 no.2
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• pp.57-66
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• 2018

Styrene-butadiene rubber (SBR), reinforced with different contents of silica (with or without modification using silane coupling agents), was prepared by a modified sol-gel method involving hydrolyzation of tetraethoxysilane over an acid catalyst. The structures of the as-prepared samples were characterized using various techniques, such as scanning electron microscopy, X-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, and thermogravimetric analysis. The mechanical properties of the as-prepared samples were discussed in detail. The results revealed an increasing of the storage modulus (G') with increase in the silica content without modification. In contrast, G' decreased after modification using silane coupling agents, indicating a reduction in the silica-silica interaction and improved dispersion of silica in the SBR matrix. Both tensile stress and hardness increased with increase in the silica content (with modification) in the SBR matrix, albeit with low values compared to the samples with un-modified silica, except for the case of silica modified using (3-glycidyloxypropyl) trimethoxysilane (GPTS). The latter observation can be attributed to the special structure of GPTS and the effort of oxygen atom lone-pair.

• Corrosion Science and Technology
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• v.18 no.4
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• pp.121-128
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• 2019

Electrochemical Impedance Spectroscopy (EIS) was used to predict corrosion behaviour of metallic Cultural Heritage assets in two monitoring campaigns: 1) an iron bar chain exposed indoor from over 500 years in the Notre Dame Cathedral in Amiens (France); and 2) a large weathering steel sculpture exposed outdoor from tens of years in Ferrara (Italy). The EIS portable instrument employed was battery operated. In situ EIS measurements on the iron chain could be used to investigate the phenomena involved in the electrochemical interfaces among various corrosion products and assess and predict their corrosion behaviour in different areas of the Cathedral. Meanwhile, the sculpture of weathering steel, like most outdoor artefacts, showed rust layers of different chemical composition and colour depending on the orientation of metal plates. The EIS monitoring campaign was carried out on different areas of the artefact surface, allowing assessment of their protective effectiveness. Results of EIS measurements evidenced how employing a simple test that could be performed in situ without damaging the artefacts surface is possible to quickly gain knowledge of the conservation state of an artefact and highlight potential danger conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.132-132
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• 2013

Colloidal synthesis of nanoparticles with well-controlled size, shape, and composition, together with development of in situ surface science characterization tools, such as ambient pressure X-ray photoelectron spectroscopy (APXPS), has brought new opportunities to unravel the surface structure of working catalysts. Recent studies suggest that surface oxides on transition metal nanoparticles play an important role in determining the catalytic activity of CO oxidation. In this talk, I will outline the recent studies on the influence of surface oxides on Rh, Pt, Ru and Co nanoparticles on the catalytic activity of CO oxidation [1-3]. Transition metal nanoparticle model catalysts were synthesized in the presence of poly(vinyl pyrrolidone) polymer capping agent and deposited onto a flat Si support as two-dimensional arrays using the Langmuir-Blodgett deposition technique. APXPS studies exhibited the reversible formation of surface oxides during oxidizing, reducing, and CO oxidation reaction [4]. General trend is that the smaller nanoparticles exhibit the thicker surface oxides, while the bigger ones have the thin oxide layers. Combined with the nature of surface oxides, this trend leads to the different size dependences of catalytic activity. Such in situ observations of metal nanoparticles are useful in identifying the active state of the catalysts during use and, hence, may allow for rational catalyst designs for practical applications. I will also show that the surface oxide can be engineered by using the simple surface treatment such as UV-ozone techniques, which results in changing the catalytic activity [5]. The results suggest an intriguing way to tune catalytic activity via engineering of the nanoscale surface oxide.

• Membrane Journal
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• v.27 no.5
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• pp.434-440
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• 2017

Electrical impedance spectroscopy is used to detect membrane fouling in-situ in reverse electrodialysis. The impedance data for the AMX membrane being fouled in the reverse electrodialysis are plotted and analyzed by Nyquist and admittance method. The meaningful graphical analyses for the fouling phenomena could be done by both Nyquist and admittance method. In addition, the unstable initial fouling stage was identified by the admittance data with high standard deviation, and the structural change of the fouling layer formed at the surface of anion-exchange membranes with the operation time of reverse electrodialysis was also detected.