• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.362-362
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• 2014

Atomic layer deposition (ALD) can be regarded as a special variation of the chemical vapor deposition method for reducing film thickness. ALD is based on sequential self-limiting reactions from the gas phase to produce thin films and over-layers in the nanometer scale with perfect conformality and process controllability. These characteristics make ALD an important film deposition technique for nanoelectronics. Tantalum pentoxide ($Ta_2O_5$) has a number of applications in optics and electronics due to its superior properties, such as thermal and chemical stability, high refractive index (>2.0), low absorption in near-UV to IR regions, and high-k. In particular, the dielectric constant of amorphous $Ta_2O_5$ is typically close to 25. Accordingly, $Ta_2O_5$ has been extensively studied in various electronics such as metal oxide semiconductor field-effect transistors (FET), organic FET, dynamic random access memories (RAM), resistance RAM, etc. In this experiment, the variations of chemical and interfacial state during the growth of $Ta_2O_5$ films on the Si substrate by ALD was investigated using in-situ synchrotron radiation photoemission spectroscopy. A newly synthesized liquid precursor $Ta(N^tBu)(dmamp)_2$ Me was used as the metal precursor, with Ar as a purging gas and $H_2O$ as the oxidant source. The core-level spectra of Si 2p, Ta 4f, and O 1s revealed that Ta suboxide and Si dioxide were formed at the initial stages of $Ta_2O_5$ growth. However, the Ta suboxide states almost disappeared as the ALD cycles progressed. Consequently, the $Ta^{5+}$ state, which corresponds with the stoichiometric $Ta_2O_5$, only appeared after 4.0 cycles. Additionally, tantalum silicide was not detected at the interfacial states between $Ta_2O_5$ and Si. The measured valence band offset value between $Ta_2O_5$ and the Si substrate was 3.08 eV after 2.5 cycles.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.221.1-221.1
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• 2015

The vapor-liquid-solid (VLS) method, where the "liquid" catalytic droplets collecting atoms from vapor precursors build the solid crystal layers via supersaturation, is a ubiquitous technique to synthesize 1-dimensional nanoscale materials. However, the lack of fundamental understanding of chemical information governing the process inhibits the rational route to the structural programming. By combining the in situ or operando IR spectroscopy with post-growth high resolution electron microscopy, we show the strong correlation between the surface chemical species concentration and nanowire structures. More specifically, the critical role of surface adsorbed hydrogen, generated from the decomposition of Si2H6 precursor on the interplay between nanowire / kinking and the defect propagation is demonstrated. Our results show that adsorbed hydrogen atoms are responsible for selecting -oriented growth and indicate that a twin boundary imparts structural coherence. The twin boundary, only continuous at / kinks, reduces the symmetry of the trijunction and limits the number of degenerate directions available to the nanowire. These findings constitute a general approach for rationally engineering kinking superstructures and also provide important insight into the role of surface chemical bonding during VLS synthesis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1211-1214
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• 2003

The film is prepared by electron cyclotron resonance chemical vapor deposition (ECRCVD) employing CH$_4$ and H$_2$ gases. It is deposited by the control of microwave plasma power, gas flow ratio, deposition pressure, and In-situ thermal treatment temperature. The structure of a-C:H (hydrogenated amorphous carbon) thin film is analysed by FT-IR spectroscopy. The fraction sp$^3$ versus sp$^2$ bonding is very important to clear up the surface and interrace of a-C:H film properties such as nano-scale friction behavior. The sp$^3$ versus sp$^2$ bonding of a-C:H thin film is dependent on the deposition conditions, therefore. nano-scale friction behavior is dependent on the deposition conditions.

• 대한화학회지
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• 제37권12호
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• pp.995-1002
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• 1993

TMA와 $NH_3$와의 기상 열분해 반응을 in-situ FTIR 분광법으로 관찰하였다. 사용한 spectroscopic reaction cell은 stainless-steel제로 자체 제작한 hexagonal-port chamber로서 2개의 NaCl window를 평행하게 설치하여 1100$^{\circ}C$까지 가열할 수 있으며 또한 이와 같은 높은 온도에서 분광분석이 가능하였다. TMA와 $NH_3$는 혼합 즉시 반응하여 TMA:$NH_3$adduct를 생성하였으며, 500$^{\circ}C$에서그 adduct가 완전분해됨을 FTIR로 확인하였다. TMA와 TMA:$NH_3$adduct의 열분해는 주생성물로$CH_4$을 방출하였다. 기상의 TMA,$NH_3$ 및 TMA:$NH_3$ adduct에 대하여 상온에서 관찰한 IR band들은 문헌값과 대조하여 assign하였다. TMA의 열분해에 대한 kinetic data로부터 이 반응이 1차식으로 일어남을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.251-251
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• 2013

고 유전 박막을 이용하여 초고집적 DRAM용 캐패시터를 만들고자 하는 연구가 전세계 메모리 반도체 산업계에 걸쳐 활발히 이루어지고 있다. 본 연구는 High-k의 precursor인 Tetrakis (EthylMethylAmino) Zirconium) TEMAZ와 새로운 전구체인 Tris (dimethylamino) cyclopentadienyl Zirconium) CpZr (DMA)3의 열 안정성과 증착 특성을 비교하였다. in-situ Fourier tramsform infrared spectroscopy (FTIR)을 통해 long-term 열안정성을 확인하였다. 증착과 동시에 자체개발한 FTIR-cell을 이용하여 Gas phase를 실시간으로 확인하였다. 증착 sample은SEM과 AFM을 통해 박막 특성 비교를 하였다.

• Bulletin of the Korean Chemical Society
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• 제32권7호
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• pp.2351-2357
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• 2011

Three new metal-organic copper(II) complexes, $[Cu(H_2PZTC)_2]_n{\cdot}2nH_2O$ (1), $[Cu(HPZTC){\cdot}2H_2O]_n{\cdot}2nH_2O$ (2), and $Cu_2[(PZHD)(OH)(H_2O)_2]_n$ (3) ($H_3PZTC$ = pyrazine-2,3,5-tricarboxylic acid, $PZHD^{3-}$ = 2-hydroxypyrazine-3,5-dicarboxylate), have been synthesized from $Cu(II)/H_3PZTC$ system under different synthetic conditions, and characterized by single-crystal X-ray diffraction, elemental analysis, IR spectroscopy and thermogravimetric analysis. In complexes 1 and 2, $H_3PZTC$ ligands loose one and two protons, which were transformed into $H_2PZTC^-$ anion and $HPZTC^{2-}$ dianion under different preparation condition, respectively. Furthermore, two ligands coordinate with Cu(II) cations in different modes, leading to the formation of the different chain structures. In complex 3, $H_3PZTC$ ligand was converted into a new ligand-PZHD by in situ decarboxylation and hydroxylation under a higher pH value than that for complexes 1 and 2. PZHD ligands link the Cu(II) cations to form a 2D layer structure. These results demonstrate that the preparation conditions, including pH value and reaction temperature etc, play an important role in the construction of complexes based on $H_3PZTC$ ligand.

• Macromolecular Research
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• 제15권4호
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• pp.343-347
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• 2007

Novel composite membranes, which delivered high separation performance for propylene/propane mixtures, were developed by coating inert poly(ethylene-co-propylene) rubber (EPR) onto a porous polyester substrate, followed by the physical distribution of $AgBF_4$. Scanning electron microscopy-wavelength dispersive spectrometer (SEM-WDS) revealed that silver salts were uniformly distributed in the EPR layer. The physical dispersion of the silver salts in the inert polymer matrix, without specific interaction, was characterized by FT-IR and FT-Raman spectroscopy. The high separation performance was presumed to stem from the in-situ dissolution of crystalline silver ionic aggregates into free silver ions, which acted as an active propylene carrier within a propylene environment, leading to facilitated propylene transport through the membranes. The membranes were functional at all silver loading levels, exhibiting an unusually low threshold carrier concentration (less than 0.06 of silver weight fraction). The separation properties of these membranes, i.e. the mixed gas selectivity of propylene/propane ${\sim}55$ and mixed gas permeance ${\sim}7$ GPU, were stable for several days.

• Journal of Microbiology and Biotechnology
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• 제31권10호
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• pp.1366-1372
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• 2021

Bacterial nanocellulose (BNC) is a biocompatible material with a lot of potential. To make BNC commercially feasible, improvements in its production and surface qualities must be made. Here, we investigated the in situ fermentation and generation of BNC by addition of different cellulosic substrates such as Avicel and carboxymethylcellulose (CMC) and using Komagataeibacter sp. SFCB22-18. The addition of cellulosic substrates improved BNC production by a maximum of about 5 times and slightly modified its structural properties. The morphological and structural properties of BNC were investigated by using Fourier transform-infrared spectroscopy (FT-IR), scanning electron microscopy and X-ray diffraction. Furthermore, a type-A cellulose-binding protein derived from Clostridium thermocellum, CtCBD3, was used in a novel biological analytic approach to measure the surface crystallinity of the BNC. Because Avicel and CMC may adhere to microfibrils during BNC synthesis or crystallization, cellulose-binding protein could be a useful tool for identifying the crystalline properties of BNC with high sensitivity.

• Journal of Industrial and Engineering Chemistry
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• 제67권
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• pp.148-155
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• 2018

To get a better understanding of the effect of physicochemical properties and microstructure on $SO_2$ absorption behavior of DESs with different molar ratios of EmimCl and EG (from 2:1 to 1:2), densities (${\rho}$), viscosities (${\eta}$), speeds of sound (u), refractive indices ($n_D$), and thermal decomposition temperatures ($T_d$) of EmimCl-EG DESs were measured and used to obtain the other derived properties, such as thermal expansion coefficient (${\alpha}_p$) and activation energy for viscous flow ($E_{\eta}$). Moreover, FT-IR spectra and in situ variable-temperature NMR spectroscopy were employed to study the microstructures of DESs. Based on physicochemical and spectroscopic properties, the influence of the concentrations of EmimCl on the interactions in DESs was explored to be associated with their $SO_2$ absorption behavior. The results show that the interactions between $Emim^+$ and $Cl^-$ of EmimCl is gradually weakening with increasing the concentration of EG in DESs by forming of hydrogen bond interaction of $O-H{\cdots}Cl^-$, resulting in a decrease of ${\rho}$, ${\eta}$, u, $n_D$, and $T_d$ of DESs, and hindering the charge-transfer interaction of $SO_2$ with $Cl^-$ and deceasing $SO_2$ capture capacity. Moreover, the $SO_2$ absorption capacity of DESs is proportional to their ${\rho}$ and $E_{\eta}$, respectively.

• 한국재료학회지
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• 제8권4호
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• pp.345-353
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• 1998

음이온 리간드로 hfac이 배위된 세 가지 종류의 구리(l) 전구체들의 열적 안정성, 기상분해 특성, 증착 특성 등을 연구하였다. $^{1}$H-NMR결과로부터 (hfac) Cu(VTMS) (hfac=hexafluoroacetylacetonate, VTMS=vinyltrimethylsilane)와 (hfac)Cu(VTMS) (VTMOS=vinyltrimethoxysilane)는 열적으로 안정한 화합물이라는 것을 확인할 수 있었으며, (hfac)Cu(ATMS)(STMS=allyltrimethylsilane)는 다른 전구체에 비해 열적으로 불안정한 화합물이라는 것을 확인할 수 있었다. In-situ FT-IR을 이용하여 기상 분해 특성을 연구한 결과 (hfac)Cu(VTMS)의 경우 $150^{\circ}C$부근에서 $Cu(hfac)_{2}$, $240^{\circ}C$부근에서 free한 상태의 hfac의 생성을 확인할 수 있었으며, 이러한 특성이 박막의 증착 속도와 물성에 미치는 영향을 확인하였다. 그리고 이들 전구체들의 증착 특성을 연구하였으며 (hfac)Cu(ATMS)의 경우 아르곤 운반 기체하에서 기판 온도가 $60^{\circ}C$일 때 구리 박막이 증착이 시작되는 것을 관찰할 수 있었는데, 이러한 낮은 증착 온도는 상대적으로 약한 구리와 ATMS의 결합력에 의한 것으로 생각된다.