• Journal of the Korean institute of surface engineering
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• v.50 no.2
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• pp.108-113
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• 2017

We investigated the effect of graphite electrode geometry and combination on nanocarbon material synthesis using underwater discharge plasma(UDP). The UDP system consists of two graphite electrodes and beaker filled with de-ionized water. A high voltage of 15 kV with a frequency of 25 kHz is applied to produce UDP using an alternating-current power source. The UDP system with conical electrodes produced the largest amount of products due to the concentration of electrical fields between electrodes. In addition, hollow-shaped stationary electrode and conical-shaped moving electrode stores discharge-induced bubbles and maintains longer reaction time. We found from Raman spectroscopy and electron microscopy that high quality carbon nanomaterials including carbon nanotubes are synthesized by the UDP system.

• Journal of Powder Materials
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• v.30 no.5
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• pp.424-430
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• 2023

YAG phosphor powders were fabricated by the atmospheric plasma spraying method with the spray-dried spherical YAG precursor. The YAG precursor slurry for the spray drying process was prepared by the PVA solution chemical processing utilizing a domestic easy-sintered aluminum oxide (Al₂O₃) powder as a seed. The homogenous and viscous slurry resulted in dense granules, not hollow or porous particles. The synthesized phosphor powders demonstrated a stable YAG phase, and excellent fluorescence properties of approximately 115% compared with commercial YAG:Ce³⁺ powder. The microstructure of the phosphor powder had a perfect spherical shape and an average particle size of approx imately 30 ㎛. As a result of the PKG test of the YAG phosphor powder, the synthesized phosphor powders exhibited an outstanding luminous intensity, and a peak wavelength was observed at 531 nm.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.16.1-16.1
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• 2011

$TiO_2$ is a promising material for gas sensors. To achieve high sensitivities, the material should exhibit a large surface-to-volume ratio and possess the high accessibility of the gas molecules to the surface. Accordingly, a wide variety of porous $TiO_2$ nanomaterials synthesized by wet-chemical methods have been reported for gas sensor applications. Nonetheless, achieving the large-area uniformity and comparability with well-established semiconductor production processes of the methods is still challenging. An alternative method is soft-templating which utilizes nanostructured inorganic or organic materials as sacrificial templates for the preparation of porous materials. Fabrication of macroporous $TiO_2$ films and hollow $TiO_2$ tubes by soft-templating and their gas sensing applications have been reported recently. In these porous materials composed of assemblies of individual micro/nanostructures, the form of links or necks between individual micro/nanostructures is a critical factor to determine gas sensing properties of the material. However, a systematic study to clarify the role of links between individual micro/nanostructures in gas sensing properties of a porous metal oxide matrix is thoroughly lacking. In this work, we have demonstrated a fabrication method to prepare highly-ordered, embossed $TiO_2$ films composed of anatase $TiO_2$ hollow hemispheres via soft-templating using polystyrene beads. The form of links between hollow hemispheres could be controlled by $O_2$ plasma etching on the bead templates. This approach reveals the strong correlation of gas sensitivity with the form of the links. Our experimental results highlight that not only the surface-to-volume ratio of an ensemble material composed of individual micro/nanostructures but also the links between individual micro/nanostructures play a critical role in evaluating the sensing properties of the material. In addition to this general finding, the facileness, large-scale productivity, and compatability with semiconductor production process of the proposed fabrication method promise applications of the embossed $TiO_2$ films to high-quality sensors.

• Clean Technology
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• v.30 no.1
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• pp.55-61
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• 2024

Efforts are actively underway to address the issues related to the high cost of Pt-based catalysts for oxygen reduction reactions by designing high-performance Pt-based alloys through the control of their nanostructures. In this study, a method was proposed to control the nanostructure of Pt-based alloys, either hollow or core-shell, by adjusting the pH of the solution during the galvanic replacement reaction between the carbon-supported nickel-nickel nitride composite and the Pt ions. The physical characteristics, including the state, quantity, and morphology of the metal particles under different preparation conditions, were evaluated through X-ray diffraction, transmission electron microscopy, and inductively coupled plasma. When the prepared catalysts were employed for the oxygen reduction reaction, they exhibited an improvement in area specific-activity compared to a commercial Pt/C, with a 1.7 and 1.9-fold enhancement for the hollow and core-shell structured catalysts, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.254-254
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• 2013

마그네트론 스퍼터링은 그 단순한 구조로 인하여 신뢰성과 확장성이 높은 기술이다, 이로 인해 DLC, ITO 등의 산업 분야에서 많이 사용하는 박막 공정 기술이다. 하지만 인듐과 같은 희토류 금속의 가격이 최근 상승함에 따라 나타난 낮은 타겟 효율성의 문제와 낮은 파워 밀도로 인한 기판의 추가적인 bias 추가에 따른 비용상승, 그리고 reactive 스퍼터링 시 낮은 증착률 등의 문제점들 또한 존재한다. 이러한 단점들을 해결하기 위해 많은 연구들이 이루어 졌으며, 높은 파워 밀도를 위해 High power Impulse Plasma Magnetron Sputtering (HIPIMS) 기술과 타겟 사용률을 높이기 위한 High Target Utilization Sputtering (HITUS) 등의 기술 등이 개발되었다. 본 연구에서는 직류 전원을 사용한 High density Plasma Sputtering System (HIPASS)이라 명하는 고밀도 원거리 플라즈마 소스를 이용한 스퍼터링 이용해 증착한 박막의 특성을 연구 하였다. Hollow cathode discharge에서 발생한 고밀도 플라즈마가 외부 유도 자장 코일에 의하여 타겟 표면까지 도달하게 되며, 스퍼터링 타겟의 고전압 bias에 의해 플라즈마 이온들이 가속이 이루어져 스퍼터링 공정이 이루어 지게 된다. 본 연구의 공정에서 타겟 사용 효율은 최대 90%까지 이며, 원거리 플라즈마 소스에서의 이온으로 스퍼터링을 실시함으로 인해 스퍼터링 전압과 전류의 독립적인 조절이 가능 하다. 본 연구에서 HIPASS을 이용하여 기판에 추가적인 전압 인가 없이 Ti 타겟과 아르곤/질소 혼합가스를 사용하여 TiN 박막을 증착 하였다. TiN의 증착률은 약 44 nm/min였으며, 이 박막의 XRD 분석 결과 TiN (111), (200), (220) 면들이 관찰이 되었다. 높은 스퍼터링 입자 에너지에서 증착 된 TiN 박막에서 우선적으로 나타나는(200)과 (220) 면들이, 본 실험에서는 기판에 추가적인 전압인가 없이도 우선방위 성장을 보였다. 이 박막의 micro-hardness 측정 결과 약 34.7 GPa이며, 이는 UBM 이나 HIPIMS에서 보여주는 결과에 준하거나 그 이상의 수치이다. 이와 같은 결과는 본 연구에서 사용한 HIPASS 증착 공정이 높은 스퍼터링 입자 에너지를 가지기에 고밀도의 TiN 박막이 증착 된 결과로 볼 수 있다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.540-543
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• 2011

This work is devoted to an experimental investigation on conceptual design of dual consecutive stage micro plasma thruster (${\mu}PT$). Optimization study on the thruster configuration has been performed for various electrode gap distances from 1 mm to 2 mm and the hole diameter from 0.3 mm to 2 mm depending on desired operating conditions and corresponding nozzle design requirement. The operation of ${\mu}PT$ at low pressure from $10^{-1}$ Torr to $10^{-4}$ Torr and at various argon flow rates ranging from 5 sccm to 300 sccm has been studied to understand the physic of plasma and the gas dynamics in details. The specific impulse can reach up to 3000-4000 seconds at low power consumptions from 1 to 5 W. Image of exhaust plume from ${\mu}PT$ will be provided and electrical characteristics is also mentioned in this paper.

• Journal of the Korea Institute of Military Science and Technology
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• v.24 no.2
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• pp.211-218
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• 2021

This paper deals with the computational work to characterize the formation and pinching of a plasma in an X-pinch configuration. A resistive magnetohydrodynamic model of a single fluid and two temperature is adopted assuming a hollow conical structure in the (r,z) domain. The model includes the thermodynamic parameter of tungsten from the corrected Thomas-Fermi EOS(equation of state), determining the average ionization charge, pressure, and internal energy. The transport coefficients, resistivity and thermal conductivity, are obtained by the corrected Lee & More model and a simple radiation loss rate by recombination process is considered in the simulation. The simulation demonstrated the formation of a core-corona plasma and intense compression process near the central region which agrees with the experimental observation in the X-pinch device at Seoul National University. In addition, it confirmed the increase in radiation loss rate with the density and temperature of the core plasma.

• Journal of the Korean Chemical Society
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• v.48 no.4
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• pp.351-357
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• 2004

We have investigated the intensity of Cu 510.6 nm emission line in see-through hollow cathode glow discharge (st-HCGD) for the development of medical Cu vapor laser. In order to acquire the stable plasma in st-HCGD cell at high current, several factors such as current, the length and the inner diameter of cathode tube, the shape of the tube, and the range of the sputtering range were tested. An optimum condition in our st-HCGD cell was obtained at 600 V, 700 mA, 2.3 Torr of Ar gas (100 SCCM), and 40 mm of tube with 4-11-4 mm type cathode design. Also, it was indirectly observed that temperature in the cell could reach more than $1,000{\circ}C$ since Cu cathode was melt at the current more than 700 mA (melting point of Cu, $1084{\circ}C$).

• Analytical Science and Technology
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• v.15 no.6
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• pp.514-520
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• 2002

The electrothermal vaporization (ETV) hollow cathode glow discharge atomic emission spectrometer for analysis of liquid sample has been developed and characterized. This system has improved the sample introduction method of electrothermal vaporization and the hollow cathode glow discharge. The sample introduction method was possible to provide high analyte transport efficiency to the plasma by helix coil made of tungsten material. In addition, small volume samples (<$30{\mu}{\ell}$) could be used. The system has glow discharge cell with special design for improvement of precision. The effect of discharge parameters such as discharge power, gas flow rate has been studied to find optimum condition. The emitted light was effectively carried into detector by fiber optic cable in UV region. The calibration curve of Pb, Cd were obtained with 3 samples.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.182.2-182.2
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• 2016

Hollow cathode discharge(중공 음극)는 음극 표면에서 발생되는 2차 전자를 이용하여 높은 밀도의 플라즈마를 만들 수 있는 장점이 있다. 전원으로 microwave, RF, DC, pulsed dc등을 사용할 수 있으며 박막의 증착, 식각 등에 응용 가능하다. 물리적 현상으로는 중공 음극 재료 표면 물질의 가열 및 이온 스퍼터링, 2차 전자의 가열, 자기장 인가 구조의 경우 전자 거동이 있다. PIC(particle-in-cell)방식의 모델링과 fluid model을 이용한 방법이 있는데 본 연구에서는 상용 fluid model software인 ESI사의 CFD-ACE+를 사용하여 모델링 하였다. 구동 주파수는 13.56 MHz의 상용 고주파 전원과 보다 낮은 1 MHz, 100 kHz의 수치 모델을 이용하여 HF, MF, LF 영역에서의 동작 특성을 해석하였다. 1차적으로는 가스 유동의 특성을 2D, 3D로 조사하였고 플라즈마 거동은 2차원을 주로 진행하였으며 계산 시간이 오래 거리는 3차원 모델을 하나 만들어 그 특성을 조사하였다.