• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.212-212
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• 1999

Ar-O2 분위기의 Plasma 표면 처리된 OPP 의 polymer 위에 약 400$\AA$ 정도로 sputter 코팅된 Al의 부착력에 관하여 연구를 하였다. 금속과 polymer와 같이 성질이 서로 다른 물질이 서로 결합할 때 접착력은 제품의 성능과 신뢰도를 결정하는데 매우 중요한 인자이다. 최근 고분자재료의 표면을 플라즈마 처리 (plasma surface treatment)에 의해 고분자와 금속도포(coating) 층간의 접착력향상에 따라, 증착필름 및 인쇄용 필름 등의 기능도 향상시킬 수 있다. 저온 plasma를 이용한 표면처리는 plastic 재료가 가지고 있는 기본적인 특성을 저해하지 않고, 그 표면 층만을 개량하는 plasma 또는 sputter etching 갚은 electrical discharge 방법은 진공 증착 방식에서 많이 사용되고 있다. 7$\mu\textrm{m}$의 두께 OPP polymer를 10m/min의 속도로 OPP의 표면을 연속 plasma pretreatment를 하였다. 5$\times$10-2torr에서, PEM(Plasma Emission Monitor)를 이용하여 plasma intensity에 따른 Ar/O2비를 변화시키면서 test를 하였다. AFM과 XPS를 이용하여 OPP의 표면분석을 하였다. 이 plasma처리는 기존의 D.C plasma 처리 방식과는 달리 Midium frequency AC voltage hollow cathod 방식으로 plasma를 발생된 high energy plasma 분위기를 만들 수 있다. 이러한 방식은 -cycle일 때 plasma로부터 발생된 전자가 polymer 표면을 bombard 하게 되고, +cycle 일 때 polymer 표면이 cathod 가 되어 active ion에 의해 sputtering 이 된다. 이때 plasma 처리기의 polymer 기판 후면에 magnet를 설치하여 높은 ionization을 발생시켜 처리 효과를 한층 높여 주었다. 이 plasma 처리는 표면 청정화, 표면 etching 이 동시에 행하는 것과 함께 장시간 처리에 의해 표면에서는 미세한 과, C=C기, -C-O-의 극성기의 도입에 의한 표면 개량이 된다는 것을 관찰할 수 있다. OPP polymer 표면을 Ar 100%로 plasma 처리한 경우 C-O, C=O 등의 carbonyl가 발생됨을 알 수 있었다. C-O, C=O 등의 carbynyl polor group이 도입됨에 따라 sputter된 Al의 접착력이 향상됨을 알 수 있으며, TEM 관찰 결과 grain size도 상당히 작아짐을 알 수 있었다.

• Transactions of the Korean hydrogen and new energy society
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• v.24 no.6
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• pp.550-557
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• 2013

A glucose hydrothermal method is described for preparing hollow carbon spheres (HCS), which have a regular morphology and a high Brunauer-Emmett-Teller surface area of 28.6 m2/g. Scanning electron microscopy shows that they have thin shells and diameter between 2 and 8 ${\mu}m$. The HCSs were modified for the enhanced room temperature hydrogen storage by employing Ni nanoparticles on their surface. The Ni-decorated HCSs were characterized by X-ray diffraction, transmission electron microscopy coupled with an energy dispersive spectroscope, and an inductively coupled plasma spectrometer, indicating that fine and well-distributed Ni nanoparticles can be accomplished on the HCSs. The hydrogen uptake capacity in HCSs with and without Ni loading was evaluated using a high-pressure microbalance at room temperature under a hydrogen pressure upto 9 MPa. As much as 1.23wt.% of hydrogen can be stored when uniformly distributed Ni nanoparticles are formed on the HCSs, while the hydrogen uptake capacity of as-received HCSs was 0.41 wt.%. For Ni nanoparticle-loaded HCSs, hydrogen molecules could be easily dissociated into atomic hydrogen and then chemically adsorbed by the sorbents, leading to an enhanced capacity for storing hydrogen.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.220.2-220.2
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• 2014

플라즈마 질화 기술은 기존의 침탄 혹은 고주파 표면 경화 기술 대비 낮은 온도에서 열처리 공정이 진행됨에 따라 열 변형을 최소화 시킬 수 있으며, 후 가공을 간소화 시킬 수 있다는 장점으로 인해 자동차 부품 및 기타 응용 산업 분야에 있어 큰 관심을 받고 있다. 그러나 공정 진행에 장시간이 소요되고 복잡한 형상 및 홀 가공에 의한 기능부, 특히 내경부에 대한 균일 질화 처리가 어려워 실제 응용분야 확장에 큰 제약이 따르고 있다. 이를 해결하기 위해 본 연구에서는 일반 글로우 방전 대비 플라즈마 밀도가 10배 이상 높은 공공 음극 방전(Hollow Cathode Discharge, 이하 HCD) 현상을 이용하여 고속 고균일 질화공정을 개발하고자 하였으며, 상용화 적용을 위한 연구를 함께 진행하였다. 사용된 시료로는 실제 자동차 부품으로 사용되는 SCM415 소재의 ring gear와 slip yoke pipe를 사용하였으며, HCD 형성을 위해 특화된 플라즈마 질화장비를 활용, 공정 압력 및 인가 전력 등을 변수로 실험을 진행 하였다. 그 결과 질화 처리 속도에 있어 기존 글로우 방전 플라즈마 질화 대비 1/4 이하 수준으로 그 소요 시간을 단축시킬 수 있었으며, 다량 장입된 시료의 내경 기능부에 있어서도 높은 균일도를 갖는 질화표면이 형성됨을 확인할 수 있었다. 또한 기능부 표면에 형성된 HCD 현상을 열원으로 사용함으로써 외부가열 장치를 사용하지 않으면서도 기존의 hot wall 방식보다 높은 질화 균일도 구현이 가능하였으며, 소요 자원 및 전력 사용 측면에 있어서도 공정 시간 단축 및 외부 가열 공정 제거에 의한 높은 수준의 에너지 절약이 가능하였다.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.1
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• pp.16-21
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• 2002

Ti-0 film is a kind of biocompatible surface materials. In this paper, a new method, glow discharge plasma oxidizing, has been used in synthesizing Ti-O gradient films on Ti6A14V substrates. The effects of ion bombardment and process parameters on the structures of titanium oxide layers have been investigated. The results demonstrate that DC glow plasma oxidizing is more efficient in preparation of dense, hard, and high adhesive Ti-O biomedical films on titanium and its alloys. Samples treated by this method show higher hardness values than by others. Especially, in the condition of hollow cathode discharge, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of titanium.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.11
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• pp.1978-1981
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• 2007

Axial magnetic field was applied into the hollow anode of plasma torch for the purpose of extension of electrode lifetime. The average arc voltage increased because the arc column became longer, the arc voltage ripple frequency became low. The steady state of arc voltage was removed by applied magnetic filed. The lifetime of electrode was 60 times longer than operation without magnetic field.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.437-437
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• 2010

DC Hollow cathode 방전은 약 100여 년 전, Paschen에 의해 실험된 이후로 광원, 스퍼터링 공정, 이온빔 소스 등 다양한 분야에 이용되어 왔다. 최근 태양전지용 마이크로 결정질 실리콘 증착 시, RF CCP의 전극에 복수의 홀 혹은 트렌치 구조를 두어 Hollow cathode 방전 효과를 이용하여 향상된 공정 속도로 공정을 진행한다. 그러나 RF-MHCD (Multi hole cathode discharge) 공정을 위한 최적 규격의 홀 기에 관한 연구는 그 중요성과 응용성에도 불구하고 깊게 이루어지지 못한 바 있다. 그러므로 저자는 Capacitively Coupled Plasma (전극 간격 : 4cm, 전극 직경 : 14cm) 장비에서 평면 전극과 10mm 깊이와 각각 3.5mm, 5mm, 7mm, 10mm 직경의 홀이 있는 4개의 전극을 이용하여 Argon RF-MHCD 방전을 관찰하여 조건 별 최적의 홀 전극 디자인을 도출하였다. 실험 조건은 64.5mTorr ~ 645mTorr압력 범위/ 1A~9A이며, 플라즈마는 전극 사이 중앙에 설치한 RF-compensated Langmuir Probe와, 전극과 전기적으로 접촉하는 1000:1 Probe 와 Voltage-Current Probe를 이용하여 측정되었다. 실험 결과 압력 조건 별로, 최적의 전자 밀도를 유도하는 전극 상 홀의 직경이 달라짐을 확인하였다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.602-605
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• 2008

The anode sheath structure in the hollow anode of an anode-layer type Hall thruster was numerically computed using a fully kinetic 2D3V Particle-in-Cell and Direct Simulation Monte Carlo(PIC-DSMC) code. By treating both ions and electrons as particles, anode surface region, which is electrically non-neutral, was analyzed. In order to analyze in detail, the calculation code was parallelized using Message Passing Interface (MPI). The code successfully simulated the discharge current oscillation. In the low magnetic induction case, ion sheath appears in the anode surface because ionization is enough to maintain the plasma occurs in the anode hollow. As the magnetic induction increases, main ionization region move to outside of the anode. At the same time, anode sheath voltage decreases. In the high magnetic induction case, electron sheath appears on the anode surface periodically because the ionization occurs mainly in the discharge channel. This anode sheath condition shift can be explained using the simple sheath model.

• Journal of Powder Materials
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• v.5 no.1
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• pp.28-34
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• 1998

Plasma sprayed ceramic coatings are widely used in various industrial fields to improve their properties or to reduce the production cost. The ceramic powders for plasma spray coating have been mainly manufactured by spray drying or fused+crushed process. In this study, chromium oxide which has better mechanical properties than those of the other ceramic was selected and agglomerated chromium oxide powders for plasma spray coating were produced by spray drying process with a various processing condition. The large hollow powders and the harsh surfaced powders are formed at high slurry feed rate more than 163 g/min. and low binder concentration less than 2wt%, respectively. These powders cause the considerable decrease of flowability and apparent density. The powders produced by spray drying process have the spherical shape with the mean size of 45 ${\mu}m$, but these are shown lower apparent density and flowability than the powders produced by fused+crushed powders. The plasma spray coated layers by spray dried powders are shown a different microstructure with that by fused+crushed powders in porosity shape, but their properties such as density, hardness and bond strength are similar.

• Journal of the Korean Chemical Society
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• v.39 no.5
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• pp.399-407
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• 1995

Electrothermal-Hollow Cathode Glow Discharge Spectrometry (Et-HCGDS) has been constructed in our laboratory for in-situ monitoring of traceble amounts of rare earth elements and actinides. Et-HCGDS is the portable glow discharge system that can perform the trace analysis of elements. The main structural design of Et-HCGDS was based upon the electrothermal heating and glow discharge techniques. More details on Et-HCGDS are available elsewhere. In this study, air was used as a flow gas for the glow discharge system. As a result, the emission spectra of air were collected and the assignment of air emission lines was performed with helps of pure nitrogen and oxygen emission spectra and previously published results. We found that the emission lines of air plasma were mainly due to nitrogen molecules. This paper includes the complete assignments of the air emission lines observed by using Et-HCGDS. Also, this study will be an useful reference for spectrochemical anaysis including air analysis.

• Korean Chemical Engineering Research
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• v.59 no.2
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• pp.174-179
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• 2021

Recently, hybrid coal research is underway to upgrade low-grade coal. The hybrid coal is made by mixing low-grade coal with bioliquids such as molasses, sugar cane, and lignin. In the case of lignin used here, a large amount of lignin is included in the wastewater of the papermaking process, and thus, research on hybrid coal production using the same is attracting attention. However, since a large amount of metal ions are contained in the lignin wastewater from the papermaking process, substances that corrode the generator are generated during combustion, and the amount of fly ash is increased. To solve this problem, it is essential to remove metal ions in the lignin wastewater. In this study, metal ions were removed by ion exchange with a alumina hollow fiber membrane coated with K-Phillipsite (K-PHI) zeolite. The alumina hollow fiber membrane used as the support was prepared by the nonsolvent induced phase separation (NIPS) method, and K-PHI seeds were prepared by hydrothermal synthesis. The prepared K-PHI seed was seeded on the surface of the support and coated by secondary growth hydrothermal synthesis. The characteristic of prepared coating membrane was analyzed by Scanning Electron Microscope (SEM), X-Ray Diffraction (XRD), Energy Dispersive Spectroscopy (EDX), and the concentration of metal ions before and after ion exchange was measured by Inductively Coupled Plasma Optical Emission Spectrometer (ICP-OES). The extraction amount of K+ is 86 mg/kg, and the extraction amount of Na+ is 54.9 mg/kg. Therefore, K-PHI zeolite membrane has the potential to remove potassium and sodium ions from the solution and can be used in acidic lignin wastewater.