• Title/Summary/Keyword: high-throughput process

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A Study on the Control Algorithm for the 300[mm] Wafer Edge Exposure of ArF Type using A Linear CCD Sensor (선형 CCD 센서를 적용한 ArF 파장대 웨이퍼 에지 노광장비의 제어에 관한 연구)

  • Park, Hong-Lae;Lee, Cheol-Gyu
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.22 no.6
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    • pp.148-155
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    • 2008
  • This study presents a process control of the wafer edge exposure (WEE) used in 300[mm] wafer environment. WEE, as a key module of the overall track system (coater and developer) for making patterns on wafer, is a system to expose the UV-ray on the wafer to remove a photo resist around edge of the wafer. It can measure, memorize and control the distance and angles from wafer center to edge. Recently in the 300[mm] semiconductor fabrication, the track system strongly requires that WEE station has a controller with high throughput and accuracy to increase process efficiency. We have designed and developed the controller, and present here a WEE control algorithm and experimental results.

Rapid and Accurate Detection of Bacillus anthracis Spores Using Peptide-Quantum Dot Conjugates

  • Park, Tae-Jung;Park, Jong-Pil;Seo, Gwi-Moon;Chai, Young-Gyu;Lee, Sang-Yup
    • Journal of Microbiology and Biotechnology
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    • v.16 no.11
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    • pp.1713-1719
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    • 2006
  • A method for the simple, rapid, specific, and accurate detection of Bacillus anthracis spores was developed by employing specific capture peptides conjugated with fluorescent quantum dots (QDs). It was possible to distinguish B. anthracis spores from the spores of B. thuringiensis and B. cereus using these peptide-QD conjugates by flow cytometric and confocal laser scanning microscopic analyses. For more convenient high-throughput detection of B. anthracis spores, spectrofluorometric analysis of spore-peptide-QD conjugates was performed. B. anthracis spores could be detected in less than 1 h using this method. In order to avoid any minor yet false-positive signal caused by the presence of B. thuringiensis spores, the B-Negative peptide, which can only bind to B. thuringiensis, conjugated with another type of QD that fluoresces at different wavelength was also developed. In the presence of mixed B. anthracis and B. thuringiensis spores, the BABA peptide conjugated with QD525 and the B-Negative peptide conjugated with QD585 were able to bind to the former and the latter, specifically and respectively, thus allowing the clear detection of B. anthracis spores against B. thuringiensis spores by using two QD-labeling systems. This capture peptide-conjugated QD system should be useful for the detection of B. anthracis spores.

Prediction of Residual Layer Thickness of Large-area UV Imprinting Process (대면적 UV 임프린팅 공정에서 잔류층 두께 예측)

  • Kim, Kug Weon
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.2
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    • pp.79-84
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    • 2013
  • Nanoimprint lithography (NIL) is the next generation photolithography process in which the photoresist is dispensed onto the substrate in its liquid form and then imprinted and cured into a desired pattern instead of using traditional optical system. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper, with the rolling type imprinting process, a mold, placed upon the $2^{nd}$ generation TFT-LCD glass sized substrate($370{\times}470mm^2$), is rolled by a rubber roller to achieve a uniform residual layer. The prediction of residual layer thickness of the photoresist by rolling of the rubber roller is crucial to design the rolling type imprinting process, determine the rubber roller operation conditions-mpressing force & feeding speed, operate smoothly the following etching process, and so forth. First, using the elasticity theory of contact problem and the empirical equation of rubber hardness, the contact length between rubber roller and mold is calculated with consideration of the shape and hardness of rubber roller and the pressing force to rubber roller. Next, using the squeeze flow theory to photoresist flow, the residual layer thickness of the photoresist is calculated with information of the viscosity and initial layer thickness of photoresist, the shape of mold pattern, feeding speed of rubber roller, and the contact length between rubber roller and mold previously calculated. Last, the effects of rubber roller operation conditions, impressing force & feeding speed, on the residual layer thickness are analyzed with consideration of the shape and hardness of rubber roller.

Melting and draining tests on glass waste form for the immobilization of Cs, Sr, and rare-earth nuclides using a cold-crucible induction melting system

  • Choi, Jung-Hoon;Lee, Byeonggwan;Lee, Ki-Rak;Kang, Hyun Woo;Eom, Hyeon Jin;Park, Hwan-Seo
    • Nuclear Engineering and Technology
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    • v.54 no.4
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    • pp.1206-1212
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    • 2022
  • Cold-crucible induction melting (CCIM) technology has been intensively studied as an advanced vitrification process for the immobilization of highly radioactive waste. This technology uses high-frequency induction to melt a glass matrix and waste, while the outer surface of the crucible is water-cooled, resulting in the formation of a frozen glass layer (skull). In this study, for the fabrication of borosilicate glass waste form, CCIM operation test with 60 kg of glass per batch was conducted using surrogate wastes composed of Cs, Sr, and Nd as a representative of highly radioactive nuclides generated during spent nuclear fuel management. A 60 kg-scale glass waste form was successfully fabricated through melting and draining processes using a CCIM system, and its physicochemical properties were analyzed. In particular, to enhance the controllability and reliability of the draining process, an air-cooling drain control method that can control draining through air-cooling near drain holes was developed, and its validity for draining control was verified. The method can offer controllability on various draining processes, such as molten salt or molten metal draining processes, and can be applied to a process requiring high throughput draining.

High-Speed Maritime Object Detection Scheme for the Protection of the Aid to Navigation

  • Lee, Hyochan;Song, Hyunhak;Cho, Sungyoon;Kwon, Kiwon;Park, Sunghyun;Im, Taeho
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • v.16 no.2
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    • pp.692-712
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    • 2022
  • Buoys used for Aid to Navigation systems are widely used to guide the sea paths and are powered by batteries, requiring continuous battery replacement. However, since human labor is required to replace the batteries, humans can be exposed to dangerous situation, including even collision with shipping vessels. In addition, Maritime sensors are installed on the route signs, so that these are often damaged by collisions with small and medium-sized ships, resulting in significant financial loss. In order to prevent these accidents, maritime object detection technology is essential to alert ships approaching buoys. Existing studies apply a number of filters to eliminate noise and to detect objects within the sea image. For this process, most studies directly access the pixels and process the images. However, this approach typically takes a long time to process because of its complexity and the requirements of significant amounts of computational power. In an emergent situation, it is important to alarm the vessel's rapid approach to buoys in real time to avoid collisions between vessels and route signs, therefore minimizing computation and speeding up processes are critical operations. Therefore, we propose Fast Connected Component Labeling (FCCL) which can reduce computation to minimize the processing time of filter applications, while maintaining the detection performance of existing methods. The results show that the detection performance of the FCCL is close to 30 FPS - approximately 2-5 times faster, when compared to the existing methods - while the average throughput is the same as existing methods.

Reverse link rate control for high-speed wireless systems based on traffic load prediction (고속 무선통신 시스템에서 트래픽 부하 예측에 의한 역방향 전송속도 제어)

  • Yeo, Woon-Young
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.45 no.11
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    • pp.15-22
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    • 2008
  • The cdma2000 1xEV-DO system controls the data rates of mobile terminals based on a binary overload indicator from the base station and a simple probabilistic model. However, this control scheme has difficulty in predicting the future behavior of mobile terminals due to a probabilistic uncertainty and has no reliable means of suppressing the traffic overload, which may result in performance degradation of CDMA systems that have interference-limited capacity. This Paper proposes a new traffic control scheme that controls the data rates of mobile terminals effectively by predicting the future traffic load and adjusting the forward-link control channel. The proposed scheme is analyzed by modeling it as a multi-dimensional Markov process and compared with conventional schemes. The numerical results show that the maximum cell throughput of the proposed scheme is much higher than those of the conventional schemes.

A Resource Allocation Scheme in Spatial Multiplexing Marine Communication Systems Considering Channel Characteristics (공간 다중화 해양 통신 시스템에서 채널 특성을 고려한 자원 할당 기법)

  • Tcha, Wonjung;Lee, Gilsu;Nam, Yujin;Lee, Seong Ro;Jeong, Min-A;So, Jaewoo
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.39C no.7
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    • pp.528-537
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    • 2014
  • As the data traffic between ships and a land station continuously increase through the shipbuilding-IT convergence, several wireless communication technologies are being studied to process large amounts of data traffic. In particular, the multi-antenna system is one of the most expected technologies to provide high throughput. This paper proposes an algorithm for the base station to select the ship in consideration of channel characteristics and the transmission angle for a beam of the land station in spatial multiplexing marine communication systems. We increase the system capacity by maximizing the received signal strength of the ship using clustering characteristic of the radio channel. Also, we reduce the time to select the ship by excluding the ship with the large interference between the beams. On our computer simulation, the proposed scheme dramatically reduces the computational complexity with a little sacrifice of the throughput.

A VLSI Architecture for the Real-Time 2-D Digital Signal Processing (실시간 2차원 디지털 신호처리를 위한 VLSI 구조)

  • 권희훈
    • Information and Communications Magazine
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    • v.9 no.9
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    • pp.72-85
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    • 1992
  • The throughput requirement for many digital signal processing is such that multiple processing units are essential for real-time implementation. Advances in VLSI technology make it feasible to design and implement computer systems consisting of a large number of function units. The research on a very high throughput VLSI architecture for digital signal processing applications requires the development of an algorithm, decomposition scheme which can minimize data communication requirements as well as minimize computational complexity. The objectives of the research are to investigate computationally efficient algorithms for solution of the class of problems which can be modeled as DLSI systems or adaptive system, and develop VLSI architectures and associated multiprocessor systems which can be used to implement these algorithms in real-time. A new VLSI architecture for real-time 2-D digital signal processing applications is proposed in this research. This VLSI architecture extends the concept of having a single processing units in a chip. Because this VLSI architecture has the advantage that the complexity and the number of computations per input does not increase as the size of the input data in increased, it can process very large 2-D date in near real-time.

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An Algorithm for Estimating Ep/No of UWB Signals (UWB 신호의 Ep/No 추정 알고리즘)

  • Im, Sung-Bin
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.29 no.9C
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    • pp.1316-1322
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    • 2004
  • Recently, the UWB (ultra wide-band) wireless communication technology, which provides high data transmission and is capable of linearly trading between throughput and signal-to-noise ratio (SNR), has drawn much attention for short-range wireless networks. Fully exploiting its notable features and minimizing its interference to coexisting other systems require the knowledge of SNR's at receivers In this paper, we propose an algorithm for estimating the pulse energy to noise ratio Ep/No of UWB signal with utilization of outputs from a correlator at a receiver, and evaluate the performance of the proposed algorithm through computer simulation. According to simulation results, the maximum standard deviation is about 1 13 dB with a block size of 500. Except for Ep/No=O and 2 dB cases with a block size of 500, no errors greater than 3 dB were observed in all the remaining experiments. Generally speaking, it improves as the true Ep/No, increases and as the block size increases A notable feature of the proposed algorithm is that it does not reduce the effective throughput because the estimation process does not require sending additional training signal of any specific format.

Differential CORDIC-based High-speed Phase Calculator for 3D Depth Image Extraction from TOF Sensor (TOF 센서용 3차원 깊이 영상 추출을 위한 차동 CORDIC 기반 고속 위상 연산기)

  • Koo, Jung-Youn;Shin, Kyung-Wook
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.3
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    • pp.643-650
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    • 2014
  • A hardware implementation of phase calculator for extracting 3D depth image from TOF(Time-Of-Flight) sensor is described. The designed phase calculator adopts redundant binary number systems and a pipelined architecture to improve throughput and speed. It performs arctangent operation using vectoring mode of DCORDIC(Differential COordinate Rotation DIgital Computer) algorithm. Fixed-point MATLAB simulations are carried out to determine the optimal bit-widths and number of iteration. The phase calculator has ben verified by FPGA-in-the-loop verification using MATLAB/Simulink. A test chip has been fabricated using a TSMC $0.18-{\mu}m$ CMOS process, and test results show that the chip functions correctly. It has 82,000 gates and the estimated throughput is 400 MS/s at 400Mhz@1.8V.