• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.765-770
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• 2003

We have developed a low-temperature, and low-pressure radical induced oxidation (RIO) technology, so that high-quality ultrathin silicon dioxide layers have been effectively produced with a high reproducibility, and successfully employed to realize high performace SiGe heterostructure complementary MOSFETs (HCMOS) lot the first time. The obtained oxide layer showed comparable leakage and breakdown properties to conventional furnace gate oxides, and no hysteresis was observed during high-frequency capacitance-voltage characterization. Strained SiGe HCMOS transistors with a 2.5 nm-thick gate oxide layer grown by this method exhibited excellent device properties. These suggest that the present technique is particularly suitable for HCMOS devices requiring a fast and high-precision gate oxidation process with a low thermal budget.

• Journal of Korea Foundry Society
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• v.22 no.6
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• pp.293-298
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• 2002

The effects of alloying elements added on the microstructure and high temperature oxidation behavior of the electro-slag remelted Fe-22Cr-5Al alloy were investigated. The amount of casting defect was makedly reduced by the electro-slag remelting. The electro-slag remelted ingot had a directionally solidified structure and cleaner surface than that of air-melted one. The high temperature oxidation reststance was greatly improved by the addition of Be and Zr.

• Journal of Korea Foundry Society
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• v.30 no.5
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• pp.179-186
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• 2010

To elucidate the effects of alloying elements on the characteristics of microstructure and high temperature oxidation of cast austenitic stainless steel, a thermodynamic calculation, a cyclic oxidation test, a X-ray diffraction, a scanning electron microscopy-back scattered electron, a electron probe microanalysis were conducted. The thermodynamic calculation for the effect of vanadium (V) addition on the formation of various precipitates leads to a decrease of chromium (Cr)-rich $M_{23}C_6$ carbides due to the formation of M (C, N) carbo-nitrides containing V and / or niobium (Nb). The V added alloy increased the resistance to high temperature oxidation due to a decrease of Cr-depleted zone deteriorating the oxidation resistance and due to the V-enriched oxide layer formed in inner oxide layer blocking the outward transport of cations.

• Journal of Surface Science and Engineering
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• v.26 no.5
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• pp.235-244
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• 1993

The oxidation behavior of a two-phase(Ti3Al+TiAl) intermetallic compound, Ti-33.8wt%Al, has been in-vestigated in air at 800, 900 and $^1000{\circ}C$. Though the isothermal oxidation behavior followed a parabolic law up to 100$0^{\circ}C$ indicating that protective oxide scales were formed, the cyclic oxidation behavior followed a lin-ear law in the entire temperature range tested because flaky or stratified scales were usually spalled from the surface during cooling. During oxidation at 80$0^{\circ}C$, the alloy showed excellent oxidation resistance because continuous protective Al2O3 films were formed on the outermost surface of the alloy. However, above $900^{\circ}C$, the oxidation resistance of the alloy was decreased gradually because relatively non-protective TiO2 scales as well as some of Al2O3 scales were formed on the outer oxide scale. The oxidation mechanism of the alloy at different temperature was proposed.

• Journal of Surface Science and Engineering
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• v.25 no.5
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• pp.235-252
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• 1992

(Ti, Al)N films were deposited on 304 stainless steel sheet by D.C. magnetron sputtering using Al target and Ti plate. The high temperature oxidation of (T, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films was similar to the sputter area ratio of titanium to aluminum target by means of EDS and AES survey. The high temperature oxidation test of (Ti, Al)N showed that (Ti, Al)N has better high temperature resistance than TiN and TiC films. TiC films were cracked at 40$0^{\circ}C$ in air TiN films quickly were oxidised at $600^{\circ}C$, were spalled more than $700^{\circ}C$. But (Ti, Al)N films are relatively stable to$ 900^{\circ}C$. The good resistance to high temperature oxida-tion of (Ti, Al)N films are due to the formation of dense Al2O3 and TiO2 oxide layer. Especially, Al2O3 oxide layer is more important. The results obtained from this study show, it is believe that the (Ti, Al)N film by D.C. magnetron sputtering is promising for the use of high temperature and wear resistance mate-rials.

• Journal of Welding and Joining
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• v.28 no.4
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• pp.61-66
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• 2010

Silicon nitride is widely used as an engineering ceramics because it has high strength, abrasion resistance and corrosion resistance even at high temperature. However, machining of silicon nitride is difficult due to its high hardness and brittleness. Laser assisted machining(LAM) allows effective cutting using CBN tool by locally heating the cutting part to the softening temperature of YSiAlON using the laser beam. The effect of preheating depending on process parameters were studied to find out the oxidation mechanism. If silicon nitride is sufficiently preheated, the surface is oxidized and $N_2$ gas is formed and escapes from the material, thereby making the cutting process more advantageous. During laser preheating process before machining, high temperature results in strong oxidation which makes the bloating, silicate layers and micro cracks. Using the results of these experiments, preheating characteristics and oxidation behavior were found out.

• Journal of Powder Materials
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• v.24 no.1
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• pp.53-57
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• 2017

In this study, we report the microstructure and the high-temperature oxidation behavior of Fe-Ni alloys by spark plasma sintering. Structural characterization is performed by scanning electron microscopy and X-ray diffraction. The oxidation behavior of Fe-Ni alloys is studied by means of a high-temperature oxidation test at $1000^{\circ}C$ in air. The effect of Ni content of Fe-Ni alloys on the microstructure and on the oxidation characteristics is investigated in detail. In the case of Fe-2Ni and Fe-5Ni alloys, the microstructure is a ferrite (${\alpha}$) phase with body centered cubic (BCC) structure, and the microstructure of Fe-10Ni and Fe-20Ni alloys is considered to be a massive martensite (${\alpha}^{\prime}$) phase with the same BCC structure as that of the ferrite phase. As the Ni content increases, the micro-Vickers hardness of the alloys also increases. It can also be seen that the oxidation resistance is improved by decreasing the thickness of the oxide film.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.7 no.2
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• pp.34-41
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• 2011

Wrought nickel-base superalloys are being considered as the structural materials in very-high temperature gas-cooled reactors. To understand the effects of impurities, especially oxygen, in helium coolant on the mechanical properties of Alloy 617, creep tests were performed in high temperature flowing He environments with varying $O_2$ contents at 800, 900, and $1000^{\circ}C$. Also, creep life in static He was measured to simulate the pseudo-inert environment. Creep life was the longest in static He, while the shortest in flowing helium. In static He, impurities like $O_2$ and moisture were quickly consumed by oxidation in the early stage of creep test, which prevented further oxidation during creep test. Without oxidation, microstructural change detrimental to creep such as decarburization and internal oxidation were prevented, which resulted in longer creep life. On the other hand, in flowing He environment, surface oxides were not stable enough to act as diffusion barriers for oxidation. Therefore, extensive decarburization and internal oxidation under tensile load contributed to premature failure resulting in short creep life. Limited test in flowing He+200ppm $O_2$ resulted in even shorter creep life. The oxidation samples showed extensive spallation which resulted in severe decarburization and internal oxidation in those environments. Further test and analysis are underway to clarify the relationship between oxidation and creep resistance.

• Journal of Powder Materials
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• v.20 no.6
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• pp.432-438
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• 2013

In this study, analysis on the oxidation behavior was conducted by a series of high-temperature oxidation tests at both $800^{\circ}C$, $900^{\circ}C$ and 1000 in the air with sintered STS 316L. The weight gain of each oxidized specimen was measured, the oxidized surface morphologies and composition of oxidation layer were analyzed with Scanning Electron Microscope-Energy Dispersive x-ray Spectroscopy (SEM-EDS), finally, the phase change and composition of the oxidized specimen were shown by X-Ray Diffraction (XRD). As a result, the weight gain increased sharply at $1000^{\circ}C$ when oxidation test was conducted for 210 hours. Also, a plentiful of pores were observed in the surface oxidation layers at $900^{\circ}C$ for 210 hours. In addition, the following conclusions on oxidation behavior of sintered STS 316L can be obtained: $Cr_2O_3$ can be formed on pores by influxing oxygen through open-pores, $(Fe_{0.6}Cr_{0.4})_2O_3$ can be generated on the inner oxidation layer, and $Fe_2O_3$ was on the outer oxidation layer. Also, $NiFe_2O_4$ could be precipitated if the oxidation time was kept longer.

• Journal of Surface Science and Engineering
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• v.29 no.6
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• pp.634-639
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• 1996

In oder to improve the wear resistance as well as oxidation resistance at high temperature a AISI H13 steel was treated by a duplex process of calorizing followed by plasma nitriding. The surface properties of the duplex-treated AISI H13 steel was characterized and compared with those treated by single surface process of calorizing and plasma nitriding, in terms of microstruture, microhardness, wear resistance at $500^{\circ}C$, and the oxidation behaviours at $700^{\circ}C$, Duplex process on H13 steel had created duplex layer of approximately $190\mu\textrm{m}$ on the surface, and surface microhardness was measured to be above 1450Hv(0.1Kgf). There was considerable improvement of the high temperature wear resistance at $500^{\circ}C$ in the duplex-treated steel when both wear volume and weight change due to oxidation were considered. In addition the duplex-treated steel showed an improved high temperature oxidation resistance than the plasma nitrided steel at $700^{\circ}C$.