• 한국유체기계학회 논문집
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• 제10권3호
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• pp.47-54
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modem semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 대한기계학회논문집A
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• 제39권10호
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• pp.1029-1037
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• 2015

최근 회전 시스템의 고속화 경향에 따라 회전체 동역학적 안정성의 중요성이 부각되었다. 고속회전 시스템에 적용되는 가스베어링의 동특성을 규명하는 것은 회전체의 거동을 예측하는데 상당히 중요하다. 본 연구에서는 대표적인 가스베어링인 가스포일베어링의 범프 구조에 대하여 가진실험을 수행하고 가진 주파수에 따른 동특성을 측정하였다. 실험 결과, 범프 구조의 강성은 주파수에 따라 증가하였고 감쇠는 감소하였다. 또한, 가압 조건에서의 동특성은 범프 구조의 동특성 보다 낮은 값을 가졌다. 본 실험을 통해 범프 구조의 주파수 의존 동특성의 경향을 파악하였으며 가스포일베어링의 동특성에 윤활막이 미치는 영향에 대해 확인하였다. 또한 두 가지 동특성 계산 방법을 제시하여 실험결과를 통해 효과 적인 동특성 계산 방법에 대해 비교 고찰하고 범프 구조와 윤활막의 동특성을 비교 하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.523-530
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• 2006

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element hearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as veil as the rotor itself. Each resultant hearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 한국소음진동공학회논문집
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• 제17권10호
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• pp.967-975
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300 rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis and experimental modal analysis. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of lateral and torsional critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, unbalance responses under various unbalance locations, and torsional interference diagram. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.