• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.115-116
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• 2002

This study was carried out as one of efforts to overcome difficulties in air bearing design due to low stiffness and low damping. Hydrodynamic effects on hydrodynamic stiffness of a fluid film in a high speed air bearing with tow-row air sources are investigated. The hydrodynamic effects by the high speed over DN 1,000,000 and eccentricity of a proceeding which are not considered in conventional design of an air bearing need to be reconsidered. The hydrodynamic effects, which dominantly influence on the load capacity of air bearing, are caused mainly by proceeding speed, eccentricity, and the source positions. The two-row source arrangement in the air bearing produces quite unique hydrodynamic effects with respect to pressure distribution of the air film. Optimal arrangement of the two-row sources improves performance of an air bearing in film reaction force and loading capacity of high speed spindles. This study compares the pressure distribution by numerical simulation as a function of eccentricity of proceeding and the source positions. The air source position 1/7L form one end of an air bearing was found to be superior to source position of 1/4L. The dynamic stiffness were obtained using a two-dimensional cutting method which can directly measure the cutting reaction forces and the displacements of the spindle in two directions using a tool dynamometer and transducer sensors. Heat generation in the air film can not be negligible over the speed of DN 2,000,000. In order to analysis effects of heat generation on the characteristics of air bearing, high cooling bearing spindle and low cooling bearing spindle were tested and compared. Characteristics of the frequency response of shaft and motion of run out errors were different for the spindle. The test results show that, in the case of low cooling bearing spindle, the stiffness became smaller due to heat generation. The results, which were obtained for high speed region, may be used as a design information for spindle which can be applied to precision devices such as ultra precision grinding and ultra high speed milling.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.998-1002
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• 2003

This paper investigates the characteristics of stiffness and load in the thrust bearing of spindle which could be changeable according to the groove shape of inlet, in order to design a high-stiffness air bearing by selecting a optimal groove shape. In experiments, dead weight and displacement sensor are used to measure the load carrying capacity and the stiffness respectively. Various shapes and different depth of groove of self-restrictor are used as experimental conditions. Comparative study between the theoretical value and the practical one by measuring the value of stiffness and load of the thrust bearing is performed.

• 대한기계학회논문집A
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• 제26권10호
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• pp.1997-2007
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• 2002

Composite air spindles are appropriate for the high-speed and the high-precision machining as small hole drilling of printed circuit board (PCB) or wafer cutting for manufacturing semiconductors because of the low rotational inertia, the high damping ratio and the high fundamental natural frequency of composite shaft. The axial load and stiffness of composite air spindles fur drilling operation are determined by the thrust ben ring composed of the air supply part mounted on the housing and the rotating part mounted on the rotating shaft. At high-speed rotation, the rotating part of the thrust bearing should be designed considering the stresses induced by centrifugal force as well as the axial stiffness and the natural frequency of the rotating shaft to void the shaft from failure due to the centrifugal force and resonant vibration. In this work, the air supply part of the thrust bearing was designed considering the bending stiffness of the bearing and the applied load. The rotating part of the thrust bearing was designed through finite element analysis considering the cutting forces during manufacturing as well as the static and dynamic characteristics under both the axial and con trifugal forces during high-speed rotation.

• 한국정밀공학회지
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• 제17권3호
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• pp.129-135
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• 2000

Air-dynamic bearings are increasingly used in supporting small high-speed rotating bodies. This study investigates the effects of design parameters on the axial stiffness of spiral-grooved air bearings of various curvatures. Design parameters are fundamental clearance, groove depth, and bearing number. The pressure distribution at the clearance between the stator and rotor of the bearing is obtained by solving the Reynolds equation, and the supporting load and the axial linear stiffness are calculated from the pressure distribution. It is found that a larger curvature increases the axial linear stiffness more and that there exist an optimal groove depth for the linear stiffness of the air bearing. It is also found that the linear stiffness has a linear relationship with the bearing number.

• 한국정밀공학회지
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• 제23권4호
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• pp.29-36
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• 2006

Micro drilling by high-speed air bearing spindle is very useful manufacturing technology in electronic industry For the design of high speed air bearing spindle, there are considered stability of air bearing spindle, allowable load of air bearing, run out and tooling system design for micro drill's attach and remove. According to suggested details, we designed and manufactured high-speed air bearing spindle and carried out performance estimation such as run out, temperature change in running air bearing spindle, stiffness, chucking torque. Results are follows; Run out was measured under $5{\mu}m$ at air bearing spindle revolution $20,000\sim125,000rpm$. High speed air bearing spindle's temperature rose about $20^{\circ}C$ after 5 minutes from running and then was fixed. Allowable thrust load of spindle was 17kgf. Chucking torque of collet was 15kgfcm.

• 한국유체기계학회 논문집
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• 제14권1호
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• pp.5-10
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• 2011

MTG(Micro turbine generator) operating at 400,000 rpm is under development and the impact test rig to measure the dynamic stiffness and damping coefficient of air foil bearing for high speed rotor is presented in this study. The stiffness and damping coefficient of air foil bearing depending on the rotational speed can be measured easily and effectively by using the simple configuration of impact test rig which is composed of air gun, gap sensors and high speed motor. The estimation results of stiffness and dampling coefficient using least square estimation method is presented as well.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.82-86
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• 2002

The thermal characteristics of high-speed air spindle system with built-in motor are studied. Experiment and finite difference method analysis obtain temperature rise and temperature distribution of housing. For the analysis, air fluid film model is built and temperature rise and distribution in thermal steady state are computed for each rotational speed. Generally, it is said that the heat generation of air bearing is negligible. But the heat generation in air film by heat dissipation can not be negligible especially into high-speed region of the journal. In case that the heat generation of air spindle system is high, natural frequency of the spindle system becomes lower when the thermal state is in steady-state and it means the changes of air bearing stiffness due to the change of bearing clearance. It is shown that the temperature rise of air spindle system causes thermal expansion and induces the variation of bearing clearance. In consequence the stiffness of air bearing becomes smaller.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.429-434
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• 2001

This paper has been presented the dynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing two row sources position of air bearing is different from previous investigations in the side of pressure distribution of air film by the wedge effects. An experimental study was performed to compare theoretical analysis. The dynamic stiffness was measured in actual cutting. It helps predicting of air spindle s characteristic in machining of die more precisely. The results of investigated characteristics was applied to air spindle for high speed milling.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.1021-1026
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• 2000

The thermal characteristics of high-speed air spindle system with built-in motor are studied. Experiment and finite element method analysis obtain temperature rise and temperature distribution of housing. For the analysis three-dimensional model is built and temperature rise and distribution in thermal steady state are computed for each rotational frequency. Generally. It is said that the heat generation of air bearing is negligible. But it is certain that the heat generation of air bearing can not be negligible especially in high-speed conditions Frequency response test for air spindle system is executed. In case that the heat generation of air spindle system is high, natural frequency of the system becomes lower when it reaches thermal steady-state and it means that the stiffness of air hearing becomes smaller due to the change of bearing clearance. It is shown that the temperature rise of all spindle system causes thermal expansion md induces the variation of hearing clearance. In consequence the st illness of air bearing becomes smaller.

• 한국정밀공학회지
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• 제30권12호
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• pp.1327-1333
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• 2013

Air bearings are widely used in precision stages because of low friction and high motion accuracy, however, they suffer from low stiffness in comparison with rolling bearings or hydrostatic bearings. So, several preloading methods using weight, magnet and vacuum force, and opposing pads have been used to increase the stiffness of the air bearings. In this paper, pressure distributions of the vacuum preloaded porous air bearings are calculated using the proposed method. And then, the load capacity and stiffness are analyzed. For the vacuum preloaded air bearings, the stiffness is increased owing to reduced bearing clearance by vacuum force. The simulation results indicate that variation of vacuum pressure with clearance in the vacuum pocket gives rise to low stiffness, so the vacuum pocket should be designed for pressure to be constantly maintained regardless of the bearing clearance by means of large effective pumping speed.