Abstract
Micro drilling by high-speed air bearing spindle is very useful manufacturing technology in electronic industry For the design of high speed air bearing spindle, there are considered stability of air bearing spindle, allowable load of air bearing, run out and tooling system design for micro drill's attach and remove. According to suggested details, we designed and manufactured high-speed air bearing spindle and carried out performance estimation such as run out, temperature change in running air bearing spindle, stiffness, chucking torque. Results are follows; Run out was measured under $5{\mu}m$ at air bearing spindle revolution $20,000\sim125,000rpm$. High speed air bearing spindle's temperature rose about $20^{\circ}C$ after 5 minutes from running and then was fixed. Allowable thrust load of spindle was 17kgf. Chucking torque of collet was 15kgfcm.
