• 제목/요약/키워드: high-k dielectric

검색결과 1,487건 처리시간 0.03초

Structural and Electrical Properties of ZrO2 Films Coated onto PET for High-Energy-Density Capacitors

  • Park, Sangshik
    • Applied Science and Convergence Technology
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    • 제23권2호
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    • pp.90-96
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    • 2014
  • Flexible $ZrO_2$ films as dielectric materials for high-energy-density capacitors were deposited on polyethylene terephthalate (PET) substrates by RF magnetron sputtering. The growth behavior, microstructure and electrical properties of the flexible $ZrO_2$ films were dependent on the sputtering pressure and gas ratio. Although $ZrO_2$ films were deposited at room temperature, all films showed a tetragonal crystalline structure regardless of the sputtering variables. The surface of the film became a surface with large white particles upon an increase in the $O_2/Ar$ gas ratio. The RMS roughness and crystallite size of the $ZrO_2$ films increased with an increase in the sputtering pressure. The electrical properties of the $ZrO_2$ films were affected by the microstructure and roughness. The $ZrO_2$ films exhibited a dielectric constant of 21~38 at 1 kHz and a leakage current density of $10^{-6}{\sim}10^{-5}A/cm^2$ at 300 kV/cm.

Dielectric Barrier Discharge for Ultraviolet Light Generation and Its Efficient Driving Inverter Circuit

  • Oleg, Kudryavtsev;Ahmed, Tarek;Nakaoka, Mutsuo
    • KIEE International Transactions on Electrophysics and Applications
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    • 제4C권3호
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    • pp.101-105
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    • 2004
  • The efficient power MOSFET inverter applied for a simple and low cost power supply is proposed for driving the dielectric barrier discharge (DBD) lamp load. For decades, the DBD phenomenon has been used for ozone gas production in industry. In this research, the ultraviolet and visible light sources utilizing the DBD lamp is considered as the load for solid-state high frequency power supply. It is found that the simple voltage-source single-ended quasi-resonant ZVS inverter with only one active power switch could effectively drive this load with the output power up to 700 W. The pulse density modulation based control scheme for the single-ended quasi-resonant ZVS inverter using a low voltage and high current power MOSFET switching device is proposed to provide a linear power regulation characteristic in the wide range 0-100% of the full power as compared with the conventional control based Royer type parallel resonant inverter type power supplies.

Hysteresis-free organic field-effect transistors with ahigh dielectric strength cross-linked polyacrylate copolymer gate insulator

  • Xu, Wentao;Lim, Sang-Hoon;Rhee, Shi-Woo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 추계학술발표대회
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    • pp.48.1-48.1
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    • 2009
  • Performance of organic field-effect transistors (OFETs) with various temperature-cured polyacrylate(PA) copolymer as a gate insulator was studied. The PA thin film, which was cured at an optimized temperature, showed high dielectric strength (>7 MV/cm), low leakage current density ($5{\times}10^{-9}\;A/cm^2$ at 1 MV/cm) and enabled negligible hysteresis in MIS capacitor and OFET. A field-effect mobility of ${\sim}0.6\;cm^2/V\;s$, on/off current ratio (Ion/Ioff) of ${\sim}10^5$ and inverse subthreshold slope (SS) as low as 1.22 V/decwere achieved. The high dielectric strength made it possible to scale down the thickness of dielectric, and low-voltage operation of -5 V was successfully realized. The chemical changes were monitored by FT-IR. The morphology and microstructure of the pentacene layer grown on PA dielectrics were also investigated and correlated with OFET device performance.

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AC PDP 유전층의 절연내력과 투명도에 관한 연구 (A STUDY ON THE CHARACTERISTICS OF DIELECTRIC LAYER ON THE DISCHARGE ELECTRODES IN AC PDP)

  • 이성현;김방주;김규섭;박정후;조정수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 E
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    • pp.1788-1790
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    • 1998
  • The dielectric layers in AC plasma display panel(AC PDP) are essential to the discharge cell structure, because they protect metal electrodes from sputtering by positive ion bombarding in discharge plasma and form a sheath of wall charges which are essential to memory function of AC PDP. This layer should have high dielectric strength and also be transparent because the luminance of PDP is strongly correlated this layer. In this paper, we discussed the dielectric strength and transparency of the dielectric layer under various conditions. As a result, on the $15{\mu}m$ thickness, the minimum dielectric strength was $29V/{\mu}m$ and the transmittance coefficient was about 80% after $570^{\circ}C$ firing process. It can be proposed that the resonable dielectric thickness in AC PDP is $15{\mu}m$ because it has about 80V margin on the maximum applied voltage.

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제조 공정별 대형 알루미나 세라믹스의 전기적 특성 (Electrical Properties of Large Alumina Ceramics Prepared by Various Processing)

  • 조경식;이현권;박용일;김미영
    • 한국세라믹학회지
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    • 제49권2호
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    • pp.179-184
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    • 2012
  • The size of various alumina ceramics used in semiconductor and display industry is required to increase with increase in wafer and panel size. In this research, large alumina ceramics were fabricated by uniaxial pressing, cold isostatic pressing and filter pressing with commercial powder and thereafter sintering at $1600^{\circ}C$ in gas furnace. The large alumina ceramics exhibited dense microstructure corresponding to 98.5% of theoretical density and 99.8% of high purity. The impurities and microstructural defects of the alumina were found to influence the resistance and dielectric properties. The volume resistances in these four aluminas were almost the same while the pure alumina was higher value. The dielectric constant, dielectric loss and dielectric strength of aluminas were placed within the range of 10.3~11.5, 0.018~0.036, and 10.1~12.4 kV/mm, respectively.

Improving the dielectric reliability using boron doping on solution-processed aluminum oxide

  • Kim, Hyunwoo;Lee, Nayoung;Choi, Byoungdeog
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.411.1-411.1
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    • 2016
  • In this study, we examined the effects of boron doping on the dielectric reliability of solution processed aluminum oxide ($Al_2O_3$). When boron is doped in aluminum oxide, the hysteresis reliability is improved from 0.5 to 0.4 V in comparison with the undoped aluminum oxide. And the accumulation capacitance is increased when boron was doped, which implying the reduction of the thickness of dielectric film. The improved dielectric reliability of boron-doped aluminum oxide is originated from the small ionic radius of boron ion and the stronger bonding strength between boron and oxygen ions than that of between aluminum and oxygen ions. Strong boron-oxygen ion bonding in aluminum oxide results dielectric film denser and thinner. The leakage current of aluminum oxide also reduced when boron was doped in aluminum oxide.

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Characterization of BST Thin Films using MgO(100) Buffer Layer for Tunable Device

  • Lee Cheol-In;Kim Kyoung-Tae;Kim Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • 제7권2호
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    • pp.67-71
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    • 2006
  • In this paper, we have investigated the structure and dielectric properties of the $(Ba_{0.6}Sr_{0.4})TiO_3$ (BST) thin films fabricated on MgO(100)/Si substrate by an alkoxide-based sol-gel method. Both the structure and morphology of those films were analyzed by x-ray diffraction (XRD) and atomic force microscope (AFM). For the MgO(100)/Si substrate, the BST thin films exhibited highly (100) orientation. The highly (100)-oriented BST thin films showed high dielectric constant, tunability, and figure of merit (FOM). The dielectric constant, dielectric loss and tunability of the BST thin films annealed at $700^{\circ}C$ deposited on the MgO(100)/Si substrate measured at 10 kHz were 515.9, 0.0082, and 54.3%, respectively.

친환경 고전압 전력기기 개발을 위한 GN2의 절연특성 분석 (Analysis on the Dielectric Characteristics of Gaseous Nitrogen for Developing Eco-friendly High Voltage Apparatuses)

  • 방승민;이온유;김준일;강종오;이홍석;고태국;강형구
    • 전기학회논문지P
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    • 제63권4호
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    • pp.356-360
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    • 2014
  • The environmental pollution caused by green-house gases such as $SF_2$ has been becoming the main issue of industrial society. As a part of these efforts, 180 countries signed the Kyoto Protocol in 1997 to cut back on their green-house gas emissions [1]. Therefore, a study on the dielectric characteristics of the $GN_2$ is important for designing a eco-friendly high voltage apparatuses. In this paper, to develop an electrically reliable, stable, and eco-friendly high voltage apparatus, the breakdown voltage and partial discharge inception voltage characteristics in $GN_2$ considering utilization factors are studied for the establishment of insulation design criteria of an high voltage apparatus. Dielectric experiments are performed by using several kinds of sphere-plane electrode systems made of stainless steel. Also, the dielectric characteristics of the $GN_2$ are analyzed by using a Finite Elements Method (FEM) according to various field utilization factors. The results are expected to be applicable to designing the high voltage apparatuses using $GN_2$ as an insulation gas.

The Structural and Electrical Properties of NiCr Alloy for the Bottom Electrode of High Dielectric(Ba,Sr)Ti O3(BST) Thin Films

  • Lee, Eung-Min;Yoon, Soon-Gil
    • Transactions on Electrical and Electronic Materials
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    • 제4권1호
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    • pp.15-20
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    • 2003
  • NiCr alloys are prepared onto poly-Si/ $SiO_2$/Si substrates to replace Pt bottom electrode with a new one for integration of high dielectric constant materials. Alloys deposited at Ni and Cr power of 40 and 40 W showed optimum properties in the composition of N $i_{1.6}$C $r_{1.0}$. The grain size of films increases with increasing deposition temperature. The films deposited at 50$0^{\circ}C$ showed a severe agglomeration due to homogeneous nucleation. The NiCr alloys from the rms roughness and resistivity data showed a thermal stability independent of increasing annealing temperature. The 80 nm thick BST films deposited onto N $i_{1.6}$C $r_{1.0}$/poly-Si showed a dielectric constant of 280 and a dissipation factor of about 5 % at 100 kHz. The leakage current density of as-deposited BST films was about 5$\times$10$^{-7}$ A/$\textrm{cm}^2$ at an applied voltage of 1 V. The NiCr alloys are possible to replace Pt bottom electrode with new one to integrate f3r high dielectric constant materials.terials.

Phase Noise Reduction of Microwave HEMT Oscillators Using a Dielectric Resonator Coupled by a High Impedance Inverter

  • Lee, Moon-Que;Ryu, Keun-Kwan;Yom, In-Bok
    • ETRI Journal
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    • 제23권4호
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    • pp.199-201
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    • 2001
  • The phase noise reduction in a configuration of the HEMT oscillator with a dielectric resonator coupled by a quarter-wavelength impedance inverter is investigated. Two HEMT oscillators for a satellite payload system are manufactured in the same configuration except for the coupling configuration of the dielectric resonator (DR) in order to empirically demonstrate the phase noise reduction. Experimental result shows that a phase noise reduction by 14 dB can be enhanced by increasing the characteristic impedance of a coupling microstrip impedance inverter.

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