• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.97-99
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• 2002

• International journal of advanced smart convergence
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• v.6 no.4
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.49-52
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• 2007

Vacuum facility is required for high altitude space environment test to develop small thruster. We, at Chungnam National University, developed vacuum test facility up to $10^{-5}$ torr to simulate $100{\sim}120km$ altitude environment. Prior to operation, we predict vacuum pump performances and present preliminary calculation and experiments.

• International journal of advanced smart convergence
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• v.12 no.4
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• pp.217-223
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• 2023

In this study, we compared the VacCAD and VacTran, commercial vacuum simulators, to investigate the simulation applicability and efficiency as vacuum simulation software. It was verified on reliability and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and employed vacuum materials. First, usability of simulation schematics was estimated through the modeling tools and the overall simulation characteristics of each simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping performance characteristics of commercial high vacuum system models. In addition, the degree of tolerances on both simulators was also evaluated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacTran has been presented, and it was also expected that the utilization of VacTan in vacuum applications to be increased due to the higher availability of modelling variations.

• International journal of advanced smart convergence
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• v.8 no.4
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• pp.200-206
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• 2019

In this study, we compared the VacCAD and VacSim^(Multi), commercial vacuum simulators, to verify the advantages of VacCAD's efficiency. It was emphasized on immediacy and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and vacuum materials. First, usability of simulation mechanism was estimated through the modeling schematics and obtained simulation results of each employed simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping characteristics of commercially available high vacuum systems. In addition, the degree of tolerances on VacCAD was also investigated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacSim^(Multi) has been presented, and it was expected that the utilization of VacCAD in vacuum applications to be increased.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1313-1316
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• 2006

Demands of high volume dry vacuum pumps on the domestic semiconductor and LCD industries are rapidly increasing as the size of wafers and LCD is increasing. This study introduces a new experimental setup for testing the reliability of vacuum pumps. The test system was designed to measure the acoustic pressure and mechanical vibration levels simultaneously. It is shown that the test system enables the analysis and evaluation of the performance of dry pumps under the different gas-load conditions. Detailed experimental result are shown to enable us to examine the characteristics and performance of dry pumps.

• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.1-9
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• 2010

A dynamic flow system has been developed which can be used for vacuum gauge calibration by comparison method - a calibration method in which the reading of the gauge under calibration is compared to another calibrated vacuum gauge called the "secondary standard" - and other vacuum-related experiments. The chamber of the calibration system is pumped by a turbomolecular pump (TMP), backed by a scroll pump. As maximum acceptable pressure at the inlet of a TMP is 0.1 Pa, above which the TMP decelerates, the pumping speed decreases and it becomes more difficult to adjust pressure under such circumstances. In the present work, high pressures of up to 133 Pa have been generated in the chamber of the newly developed dynamic flow control system by installing a well-designed conductance-reducer in the by-pass line and, at the same time, operating the TMP in safe mode. In addition, the gas flow and pressure distribution within the chamber have been investigated for the entire pressure range (0.1 Pa ~ 133 Pa) while generating pressure dynamically. Maximum deviations in pressure (1.6 %) were observed at point C on the chamber, which is close to the gas inlet port on the top of the chamber.

• Applied Science and Convergence Technology
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• v.24 no.2
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• pp.27-32
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• 2015

We analyzed the destruction patterns of a turbo-molecular pump (TMP) resulting from its sudden exposure of a foreline to the atmospheric pressure due to a destruction of the foreline connecting clamp of an ICP dry etcher for 300 mm wafers during high-vacuum operation ($5{\times}10^{-6}$ Torr). Unlike in the case of view port's breakage, the TMP's rotor module was crashed inside the chamber. The primary damage resulted from the collision of the blades and stators, and the secondary damage resulted from the breaking of the rotor - driving shaft assembly. The fixing screws of the rotor and axial shaft were bent and broken when the TMP controller output the maximum current even after the crash event. Electrical power consumption analysis of the TMP power controller confirmed it. The stress distributions were analyzed by a finite element method using CFD-ACE+ multi physics software. Rotating inertia of each parts and kinetic energies were calculated as well. 68% of the rotational kinetic energy is deposited by the rotor - shaft module.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.11a
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• pp.31-34
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• 2007

Performance tests of supersonic exhaust diffuser were conducted by using hot combustion gas for simulating high-altitude environment. The test rig consists of a combustion chamber, a vacuum chamber, water cooling ring and diffuser. Before combustion experiments, the preliminary leak tests were carried out on the liquid rocket engine and diffuser by using high pressure nitrogen(30barg) and a vacuum pump. The leak test results showed that there was no leaks at high pressure and vacuum pressure conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.153-153
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• 2013

Turbomolecular pump (TMP) is widely used to obtain and maintain high vacuum by spinning turbine rotors to migrate gas molecules to the exhaust of the pump. However, performance of the TMP has not been well observed when it is influenced by strong magnetic field. Such study may give useful information about magnetic field tolerance of TMP, development of magnetic shielding technique for key components of TMP, etc. For this purpose, magnetic field induced by a circular current source was firstly designed and investigated. Using spherical coordinates and vector potential, magnetic field throughout the space including axis of rotation was calculated. Due to the rotational symmetry of the circular current source, induced magnetic field is azimuthally symmetric and, thus, is analyzed by radial and polar components of the magnetic fields. In order to enhance the numerical accuracy for the calculation, magnetic field was expressed by complete elliptic integrals of first and second kinds. According to the calculation, when 1 A of DC-current passes through a 1 turned circular wire with 50 cm of diameter, overall magnitude of the inducedmagnetic field was about 0.02 Gauss, which was used to the determination of the current and the number of turns of wires to fabricate the coil for the study on the magnetic field tolerance of TMP.