Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2002.11a
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- Pages.97-99
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- 2002
Analysis for Design of a High Vacuum Turbomolecular Pump
- Lee, Woo Young (School of Mechanical Engineering, Korea University of Technology and Education) ;
- Jin, Kyoung Bog (Dept. of Control System Engineering, Korea University of Technology and Education)
- Published : 2002.11.01
Abstract
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