• International Journal of Internet, Broadcasting and Communication
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• 제7권2호
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• pp.28-35
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• 2015

Thin film electronic devices which brought the current mobile environment could be fabricated only under the high quality vacuum conditions provided by high vacuum systems. Especially for the development of advanced thin film devices, constant high quality vacuum as the deposition pressure is definitely needed. For this purpose, the variable conductance throttle valves were employed to the high vacuum system. In this study, the effects of throttle valve applications on vacuum characteristics were simulated to obtain the optimum design modelling of variable conductance of high vacuum system. Commercial simulator of vacuum system, $VacSim^{(multi)}$, was used on this investigation. Reliability of employed simulator was verified by the simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure of below $10^{-3}torr$. Simulation results were plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2008년 영문 학술대회
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• pp.866-870
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• 2008

In this study, we designed cold gas propulsion system with minimum 0.25 mm nozzle and micro-thrust measurement system to analyze flow characteristic of micro propulsion system in ambient and vacuum condition. Argon and Nitrogen are used for propellant and the result of experiments is compared with CFD analysis and theory. But there is a point where reduced scale versions of conventional propulsion systems will no longer be practical. Therefore, a fundamentally different approach to propulsion systems was taken. That is thermal transpiration based micro propulsion system. It has no moving parts such as lubricants, pressurizing system and can pump the gaseous propellant by temperature gradient only(cold to hot). We are advancing basic research of propulsion system based on thermal transpiration in vacuum conditions and had tried experiment process and theoretical access in advance. To characterize membrane of Knudsen pump, we select Polyimide material that has low thermal conductivity(0.29 W/mK) and can stand high temperature($300^{\circ}C$) for long time. And we fabricated hole diameter 1, 0.5, 0.2, 0.1 mm using precision manufacturing. Experimental results show that pressure gradient efficiency of Knudsen pump is increased to maximum 82% according to Knudsen number and thick membranes are more effective than thin membranes in transition flow regime.

• 한국진공학회지
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• 제7권1호
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• pp.1-4
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• 1998

이온 펌프의 중심에 네그(Non-Evaporable Getters)가 삽입된 새로운 조합 펌프를 사용하여 극고진공 시스템을 구현하였다. 진공 용기는 터보 분자 펌프만으로도 극고진공에 성공하였던, $450^{\circ}C$에서 잘 산화된 304 스테인레스 스틸 쳄버를 사용하였다. 시스템의 압력은 Leybold사의 EXG(Extractor Gauge)로 측정하였으나, 본 실험에서의 최고 진공도는 이미 그 게이지의 측정 한계인 1~$2\times10^{-12}$torr범위를 훨씬 지나 게이지 지시가 $-0\times10^{-12}$torr를 읽교 있는 극고진공에 도달해 있었다. 이는 효과적인 네그 활성화로 수소 가스에 대한 배기 속도 를 크게 향상시켜준 결과라 볼 수 있다. 또한 본 실험은 극고진공 표면 분석 장치의 실현 가능성을 시사해주는 것으로, 앞으로의 초미세 표면 과학에 있어서 새로운 장을 열어줄 것 으로 기대된다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1078-1083
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• 2000

A high speed rotor balancing machine was developed, which is capable of balancing a flexible rotor in high speed. The machine is largely consisted of vacuum chamber, oil supply system and vacuum pump system. And, in order to investigate performances of the machine, various tests were carried. After high speed rotor balancing of gas turbine engine rotor using influence coefficient method, the flexible engine rotor passed smoothly through its critical speed.

• 조명전기설비학회논문지
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• 제18권3호
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• pp.114-119
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• 2004

차량이라는 특수한 장소에 적용되는 산소 발생 장치는 소형/경량화 및 소음, 충격, 발열에 대한 문제점을 무시할 수 없다. 이러한 문제점을 해결할 방법으로 BLDC를 이용하여 모터의 발열을 줄이고 합성 제올라이트 NaX형을 사용한 베드로 소형에서도 고농도의 산소를 발생시킬 수 있게 하였다. 또한, 합성 제올라이트 NaX형의 특성으로 인한 질소의 강제 탈착을 진공펌프 한 대로 사용하기 위하여 Two Head 진공펌프 Pump Type을 개발하여 소비 전력을 줄이고 소형/경량화 및 저소음, 충격/발열 문제를 해결할 수 있었다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2725-2730
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• 2007

Turbo-type molecular drag pumps ( MDPs ) are used in the liquid crystal display ( LCD ), semiconductor and other thin film industries. Siegbahn ( disk-type ) molecular drag pumps are used as high-pressure stages in the hybrid-type turbomolecular pumps, where they can operate in the viscous, the transition and the free molecular flow regime. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump ( DTDP ) in the molecular transition flow region. The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The test is performed with nitrogen gas ( $N_2$ ).

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.405-408
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• 2008

From the previous researches about flow characteristic of micro-nozzle, we found that viscosity and back pressure induced heavy losses in micro nozzle. To overcome thess losses, we began to study new conceptual micro propulsion system that is thermal transpiration based micro propulsion system. It has no moving parts and can pump the gaseous propellant by temperature gradient only (cold to hot). Most of previous research on thermal transpiration is in its early stage and mainly studied for application to small vacuum facility or gas chromatography in ambient condition using nanoporous material like aerogel. In this study, we focus on basic research of propulsion system based on thermal transpiration using polyimide material in vacuum conditions.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.523-530
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• 2006

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element hearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as veil as the rotor itself. Each resultant hearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 한국유체기계학회 논문집
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• 제10권3호
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• pp.47-54
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modem semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 한국소음진동공학회논문집
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• 제17권10호
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• pp.967-975
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300 rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis and experimental modal analysis. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of lateral and torsional critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, unbalance responses under various unbalance locations, and torsional interference diagram. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.