• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.2
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• pp.133-140
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• 2020

We discuss the method of a high precision range trigger and generation for a high range resolution radar. To verify the designed range resolution performance, we use test-equipments which can absolutely make a precision range shorter than the desined range resolution. The accuracy of generated range is proportional to the system reference clock. However, the system main processor is limited to input reference clocks and a higher available one is expensive in the conventional method. To solve this problem, we proposed that the range trigger and generation method using multi-phase-shiftings and integration. Through a experiment, we verified that the proposed method made problems which can be ocurred in the conventional method clear.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.119-124
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• 2021

In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θ_z alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.