• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.221-221
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• 2013

Vertical LED (VLED) has been recognized as a way to obtain the high-power LED due to their advantages [1]. However, approximately 4% of the light generated from the active region is extracted, if the light extraction from side walls and back side is neglected because of Fresnel reflection (FR) and total internal reflection (TIR) [2,3]. In this study, the optical simulation of the VLED with the various microstructures was performed. Among them, the microlens having the diameter of 3 ${\mu}m$ and the height of 1.5 ${\mu}m$ shown the best result was chosen, and then, optimized microlens was formed on a GaN template using conventional semiconductor process. Various microstructures were proposed to improve the light extraction efficiency (LEE) of the VLED for the simulation. The LEE was simulated using LightTools based on a Monte Carlo ray tracing. The microstructures with hemisphere, cone, truncated and cylinder pattern having diameter of 3 ${\mu}m$ were employed on the top layer of the VLED respectively. The improvement of the LEE by using the microstructure is 87% for the hemisphere, 77% for the cone, 53% for the truncated, 21% for the cylinder, compared with the LEE of the flat surface at the reflectance of 85%. The LEE was increased by 88% at the height of 1.5 ${\mu}m$, compared with the LEE of the flat surface. We found that the microlens on the top layer is the most suitable for increasing the LEE. In order to apply the proposed microlens on n-GaN surface, we fabricated microlens on a GaN template. A photoresist array having hexagonal-closed packed microlens was fabricated on the GaN template. Then, optimization of etching the GaN template was performed using a dry etching process with ICP-RIE. The dry etching carried out using a gas mixture of Cl2 and Ar, each having a flow rate of 16 sccm and 10 sccm, respectively with RF power of 50 W, ICP power of 900 W and chamber pressure of 2 mTorr was the optimum etching condition as shown in Fig. 2(a).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.67-67
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• 2009

Due to the scaling down of the dielectrics thickness, the leakage currents arising from electron tunneling through the dielectrics has become the major technical barrier. Thus, much works has focused on the development of high k dielectrics in both cases of memories and CMOS fields. Among the high-k materials, $Al_2O_3$ considered as good candidate has been attracting much attentions, which own some good properties as high dielectric constant k value (~9), a high bandgap (~2eV) and elevated crystallization temperature, etc. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of BClxOy compound. In this study, the etch characteristic of ALD deposited $Al_2O_3$ thin film was investigated in $BCl_3/N_2$ plasma. The experiment were performed by comparing etch rates and selectivity of $Al_2O_3$ over $SiO_2$ as functions of the input plasma parameters such as gas mixing ratio, DC-bias voltage and RF power and process pressure. The maximum etch rate was obtained under 15 mTorr process perssure, 700 W RF power, $BCl_3$(6 sccm)/$N_2$(14 sccm) plasma, and the highest etch selectivity was 1.9. We used the x-ray photoelectron spectroscopy (XPS) to investigate the chemical reactions on the etched surface. The Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

• Journal of Welding and Joining
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• v.15 no.1
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• pp.101-108
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• 1997

In repaired weldment of ASTM A-470 class 8 high pressure stream turbine rotor steel, creep rupture life was studied in relation with carbide morphology. Carbides were identified using carbide extraction replica method. A retired rotor has molybdenum rich carbide $M_2C$, lndacochea vanadium rich carbide $M_4C_3$, and chromium rich carbides $M_{23}C_6$and $M_7C_3$. Weldments ruptured at ICHAZ showed that some of carbides have been transformed into spherical types of coarsened carbides at ruptured area. Those carbides were revealed as molybdenum rich $M_6C$ carbide and they provided cavitation sites due to molybdenum depletion around $(M_6C)$ carbide. However coarsened $M_6C$ and $M_{23}C_6$ carbides were observed at ruptured area in case of ruptured at CGHAZ.

• Resources Recycling
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• v.4 no.3
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• pp.32-39
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• 1995

Thc purpose of this study is to develop the efficient process for recovering vanadium and nickel from the incineralionash of the oil fly ash. In this paper, the physical and chemical properties of the incineration ash was examined, and theleaching characteristics of the incineration ash were investigated by water leaching and sulEuric acid leaching tcsls. The incinerationash of oil fly ash was mainly consisted of oxldes such as V,09, V,O,, NaVO,, Ni,(VO,)Z, Fe,O,, CaSO,, SiO,.Thc waler leaching showed low extraction of metallic components, while the sulfunc acid lcaching with high temperahlreand pressure increased the extraction of vanadium and nickcl considerably. For instance, the exlraction rates of the metalllccomponents on the sulfuric acid leaching were 99% for V and 45% for Ni at 90$^{\circ}$C with pH 0.5 H,SO,, and were86% for V and 75% far Ni at ZOO"C(64 psi) with pH 1.0 H-SO,. with pH 1.0 H-SO,.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.169-169
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• 2008

To keep pace with scaling trends of CMOS technologies, high-k metal oxides are to be introduced. Due to their high permittivity, high-k materials can achieve the required capacitance with stacks of higher physical thickness to reduce the leakage current through the scaled gate oxide, which make it become much more promising materials to instead of $SiO_2$. As further studying on high-k, an understanding of the relation between the etch characteristics of high-k dielectric materials and plasma properties is required for the low damaged removal process to match standard processing procedure. There are some reports on the dry etching of different high-k materials in ICP and ECR plasma with various plasma parameters, such as different gas combinations ($Cl_2$, $Cl_2/BCl_3$, $Cl_2$/Ar, $SF_6$/Ar, and $CH_4/H_2$/Ar etc). Understanding of the complex behavior of particles at surfaces requires detailed knowledge of both macroscopic and microscopic processes that take place; also certain processes depend critically on temperature and gas pressure. The choice of $BCl_3$ as the chemically active gas results from the fact that it is widely used for the etching o the materials covered by the native oxides due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. In this study, the surface reactions and the etch rate of $Al_2O_3$ films in $BCl_3/Cl_2$/Ar plasma were investigated in an inductively coupled plasma(ICP) reactor in terms of the gas mixing ratio, RF power, DC bias and chamber pressure. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by AFM and SEM. The chemical states of film was investigated using X-ray photoelectron spectroscopy (XPS), which confirmed the existence of nonvolatile etch byproducts.

• KSBB Journal
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• v.21 no.3
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• pp.194-198
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• 2006

Dried raw Ascidians(Halocynthia roretzi) shells harvested from fish farms in southern coast area in Korea were used to extract ${\beta}$-carotene using supercritical carbon dioxide($SCO_2$) and with ethanol as a co-solvent at the range of temperatures and pressures, from 25 to $65^{\circ}C$ and 100 to 350 bar respectively. The size of the dried Ascidians shells was around $850{\mu}m$. The system used this study was a semi-batch flow type high pressure unit. The efficiency of ${\beta}$-carotene extraction using $SCO_2$ with and without co-solvent, ethanol, influenced to pressure and temperature changes. The highest solubility of ${\beta}$-carotene in $SCO_2$ was 1.35 mg/g for ${\beta}$-carotene at $35^{\circ}C$ and 350 bar. With addition of 2(v/v%) ethanol the recovery of ${\beta}$-carotene was 93%. As a result of using n-hexane and methanol for rinse, at $35^{\circ}C$ and 350 bar the amount of ${\beta}$-carotene by methanol rinse was 5 times higher than that of n-hexane rinse.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.11a
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• pp.43-49
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• 2002

A7003 alloy has characteristics of their excellent weldability, high corrosion resistance and superior plastic working however the broadening of application for the alloy has been hampered by the lower extrudability associated by Mg content. For improvement of extrudability and enhanced recovery efficiency during Al scrap recyeling, it has been generally practiced to reduce Mg content in A7003 alloy. Therefore, it is necessary to investigate the influence of Mg content on mechanical strength and extrudability of A7003 alloy. For efficient material processing which has small amounts, life cycle assessment in material processing(MLCA) is evaluated. The quantitative analysis of energy requirements and $CO_2$ emission for production of A7003 extruded bar are estimated with different Mg content and billet pre-heating process (heating source by light oil or LPG). In particular, the estimation of energy requirements was performed within shipping and gating range (except the mining and extraction stages)to investigate the influence of the variables on energy requirements and $CO_2$ emission in detail. As Mg content increased, the flow stress and the extrusion pressure for A7003 alloy increased. It has been thought that an increment in extrusion pressure with increasing Mg content is caused by the solid solution hardening of Mg atoms in the matrix and increment in volume fraction of intermetallic compound, $Mg_2Si$. The extrudability and the tensile strength are equal to, or above that of conventional A 7003 alloy even the content of Mg varied from $1.1wt.\%\;to\;0.5wt.\%$ alloy. This means that minimizing the content of Mg in A7003 alloy can enhance recovery efficiency during Al scrap recycling. It can be quoted that rather than Mg content energy source for billet heating is a prime factor to determine the atmospheric $CO_2$ emission.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.32 no.4
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• pp.242-251
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• 2020

In this study, the extraction efficiency and reflection coefficient by a two-dimensional OWC (Oscillating Water Column) WEC (wave energy converter) installed in front of a seawall was investigated for regular/irregular waves. The matched eigenfunction expansion method (MEEM) based on the linear potential theory was applied as an analytical tool. The diffraction problem by the incident wave in the open-chamber and the radiation problem by the oscillating pressure in the closed-chamber were solved to obtain the volume fluxes at the internal free-surface. Applying the volume fluxes into the continuity equation for the airflow in a chamber, we got the oscillating air pressure. The maximum extracted power and corresponding reflection coefficient were determined at the optimal turbine coefficient that maximizes the extracted power. OWC device designed for a high extracted efficiency simultaneously contributes to reduce reflected waves.

• Journal of the Korean GEO-environmental Society
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• v.10 no.6
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• pp.135-141
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• 2009

Fracturing technique using fluid injection into the borehole is widely used technology in the industry for the geothermal heat, oil, and gas extraction. Dealing with fluid-driven natural fractures such as dike and vein indirectly, design technology would be improved by adapting their principles. In this paper, mechanical interaction between the segments is evaluated by modeling highly segmented and closely spaced fluid-driven natural fractures. The number of segments is 71 with 3,339 measured apertures in which the interaction is considerably predicted. To evaluate mechanical interaction, boundary collocation method is used and the net pressure is calculated by using least square method to fit measured apertures. As a result, in case that mechanical interaction is considered, two pressures as fitting parameters are sufficient to capture measured apertures.

• Food Science and Biotechnology
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• v.18 no.4
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• pp.978-984
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• 2009

An analytical method for the simultaneous determination of 9 quinolones (QNs) in porcine, chicken, and bovine muscles was developed and validated using liquid chromatography-fluorescence detector (LC-FLD). The samples were extracted using a liquid-liquid extraction (LLE) process. Chromatographic separation was achieved on a reverse phase $C_8$ column with a gradient elution using a mobile phase of 200 mM ammonium acetate buffer (pH 4.5) and acetonitrile (ACN). The proposed method was validated according to the Food and Drug Administration (FDA) guideline for bioanalytical assay procedures. Recoveries of QNs were 83.1-111.9% with relative standard deviations (RSDs) below 15%. Linearity within a range of 30-500 ${\mu}g/kg$ was obtained with the correlation coefficient ($R^2$) of 0.9967-0.9999. The limits of detection (LOD) were 1-16 ${\mu}g/kg$. These values were lower than the maximum residues limits (MRLs) established by the European Union (EU). The present method was successfully applied to determine QNs in edible muscles.