• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.16 no.5
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• pp.217-222
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• 2023

The purpose of this paper was to synthesize a polymer organic hard mask that simplifies the manufacturing process, reduces process time significantly, and thereby lowers manufacturing costs. The results of measuring residual metals through vapor refining showed that 9-Naphthalen-1-ylcarbazole(9-NC) measured 101.75ppb in the 4th zone, 2-Naphthol (2-NA) measured 306.98ppb in the 5th zone, and 9-Fluorenone(9-F) measured between 129.05ppb across the 4th and 5th zones. After passing through a filtration system, the synthesized organic hard mask measured residual metals in the range of 9 to 7ppb. Additionally, the thermal analysis indicated a decrease of 2.78%, a molecular weight of 942, carbon content of 89.74%, and a yield of 72.4%. The etching rate was measured at an average of 18.22Å/s, and the coating thickness deviation was averaged at 1.19. For particle sizes below 0.2㎛ in the organic hard mask, no particles were observed. By varying the coating speed at 1,000, 1,500, and 1,800rpm and measuring the resulting coating thickness, the shrinkage rate ranged from 17.9% to 20.8%. The coating results demonstrated excellent adhesion to SiON, and it was evident that the organic hard mask was uniformly applied.

• Tribology and Lubricants
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• v.28 no.2
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• pp.56-61
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• 2012

In order to investigate the possibility of Ni-Al based intermetallics coating onto aluminum substrate, the coating process for induction heating has been evaluated by microscopically analyzing the intermetallic layers coated at temperatures lower than the melting temperature of aluminum. The coating layers were divided into two parts with different microstructure along the depth. Hard $NiAl_3$ layer was found at lower parts of the coatings near the interface with aluminum substrate. This layer was formed by the diffusion of aluminum atoms from the substrate into the coating layer across the interface during the induction heating. Meanwhile, at the upper parts of the coating near the surface, a large amount of un-reacted Ni was still remained and surrounded by several Ni-Al based intermetallic compounds, such as $Ni_3Al$, NiAl and $Ni_2Al_3$ formed by the lattice diffusion.

• Journal of the Korean institute of surface engineering
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• v.37 no.3
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• pp.179-184
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• 2004

Hard chromium coating technology using hexavalent chromium bath is widely used in various industries. Because of the serious health and environmental problems of hexavalent chromium, many attempts to alternate the hexavalent chromium plating have been made over 50 years. Trivalent chromium plating is one of the challengeable technologies to alternate hexavalent chromium plating. It is relatively none-toxic. Although some papers have described hard chromium coatings produced from trivalent chromium solution, it has limited the industrialization because of chemical and electrochemical problems of trivalent chromium ions. This paper introduces a number of factors for successful trivalent chromium plating, to give a some information about trivalent chromium process.

• Applied Chemistry for Engineering
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• v.17 no.2
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• pp.170-176
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• 2006

The hard coatings on the polycarbonate plate were performed with the object of substitution the glass in the car to the polycarbonate plate. In this research, (3-glycidoxypropyl)trimethoxysilane (GPTMS), (3-aminopropyl)triethoxysilane (APS), and diethylenetriamine (DETA) were used to prepare the coatings by a sol-gel process. The optimum conditions and formulation to achiere the excellent physical properties of the coating were determined. In the case of using GPTMS and DETA, the smooth coating which had the 2 H class in pencil hardness was formed. In the case of using GPTMS and APS, the coating which had the 2 H class in pencil hardness was also formed. And the coatings with GPTMS and DETA showed an excellent abrasion resistant.

• Journal of Adhesion and Interface
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• v.7 no.1
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• pp.10-15
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• 2006

The hard coatings on the polycarbonate plate were performed with the object of substitution the glass in the car to the polycarbonate plate. In this research, [3-(methacryloyloxy)propyl]trimethoxysilane were used to prepare the coatings by sol-gel process. Butanol was used as a solvent, HCl was used as a catalyst, and AIBN was used as an initiator. Polycarbonate plate was pretreated with PMMA, and final heating of the coating was done at $130^{\circ}C$ for 6 h. Pencil hardness of the coating was 2 H, abrasion resistance and adhesion of the coating were excellent.

• Polymer(Korea)
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• v.36 no.3
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• pp.268-274
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• 2012

The silane coupling agent, 3-(trimethoxysilyl)propyl methacrylate (${\gamma}$-MPTS), was grafted on the surface of alumina nanoparticles. We used the surface modified nanoparticles in the hard coating layer for in-mold decoration (IMD) foils and evaluated the coating properties such as hardness and anti-abrasion property. The effects of electron beam (EB) irradiation on color layer and anchor layer of IMD foils were observed through the difference in color and the cross-cut tape test, respectively. Also, cure kinetics as studied quantitatively under various reaction temperatures by analysis of surface properties and Fourier transform infrared (FTIR) spectroscopy. From these results, we constructed database for the commercial exploitation of EB curing system.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.129-129
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• 2018

Hard coating application is effective way of cutting tool for hard-to-machine materials such as Inconel, Ti and composite materials focused on high-tech industries which are widely employed in aerospace, automobile and the medical device industry also Information Technology. In cutting tool for hard-to-machine materials, high hardness is one of necessary condition along with high temperature stability and wear resistance. In recent years, high-entropy alloys (HEAs) which consist of five or more principal elements having an equi-atomic percentage were reported by Yeh. The main features of novel HEAs reveal thermodynamically stable, high strength, corrosion resistance and wear resistance by four characteristic features called high entropy, sluggish diffusion, several-lattice distortion and cocktail effect. It can be possible to significantly extend the field of application such as cutting tool for difficult-to-machine materials in extreme conditions. Base on this understanding, surface coatings using HEAs more recently have been developed with considerable interest due to their useful properties such as high hardness and phase transformation stability of high temperature. In present study, the nanocomposite coating layers with high hardness on WC substrate are investigated using high entropy alloy target made a powder metallurgy. Among the many surface coating methods, reactive magnetron sputtering is considered to be a proper process because of homogeneity of microstructure, improvement of productivity and simplicity of independent control for several critical deposition parameters. The N2 is applied to reactive gas to make nitride system with transition metals which is much harder than only alloy systems. The acceleration voltage from 100W to 300W is controlled by direct current power with various deposition times. The coating layers are systemically investigated by structural identification (XRD), evaluation of microstructure (FE-SEM, TEM) and mechanical properties (Nano-indenter).

• Korean Chemical Engineering Research
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• v.45 no.4
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• pp.335-339
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• 2007

In order to overcome the problem of poor hardness of transparent polycarbonate (PC) sheets, organic-inorganic hybrid hard coating solutions, which show a high refractive index above 1.58, were made by the sol-gel method. These hybrid coating solutions were obtained from mixture of titanium tetraisopropoxide (TTIP), and (3-glycidoxypropyl)trimethoxysilane (GPTMS). The PC sheets were spin-coated, and cured at $120^{\circ}C$ for 2 hr. Change of refractive index in the range of 1.53-1.61 was obtained by varying the GPTMS content. The refractive index of the coated film decreased with increasing the GPTMS content, while the pencil hardness of the coated film was found to increase with increasing the GPTMS content.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.294-297
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• 2009

The frictional behaviors of Cermets/Cr-Ceramics and Cu-Al coatings of piston ring were investigated. Friction tests were carried out by pin-on-disk test and materials properties of coating layer were analyzed by nano indentation tester. Higher friction coefficient was obtained at harder coating with rougher surface. In case of hard-coating, the scratch depth, width and pile-up height had close relationship with indentation hardness. So the scratch width, depth and pile-up height increases with decreasing friction coefficient. But in case of soft-coating, the friction coefficients are strongly dependent on the morphological characteristics after nano scratching more than indentation hardness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.783-791
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• 2000

Increasing demands in productivity are propelling the development of new manufacturing methods like hard machining, high speed cutting (HSC) or machining of difficult to machine materials. In these processes the toois are subjected to very severe mechanical, tribological and thermal loads. They fail prematurely by abrasion, cratering, edge breakage and cold welding. The performance of such tools will be enhanced by better and more wear resistant coatings. The development of these new coatings shows a clear trend towards complex multi-component and multi-layer configurations. TiAIN multilayer coating belongs to these coatings for the new cutting tool generation. This paper tries to explain the benefits of the new coatings. TiAIN multilayer coating offers the following advantages: reduction of manufacturing costs. boost productivity, and lower coolant procurement, conditioning and disposal costs.