• Journal of the Microelectronics and Packaging Society
• /
• v.12 no.3 s.36
• /
• pp.187-196
• /
• 2005

MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to fabrication errors and the external stress. In the decoupled vibratory gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, fabricated with SOI (Silicon-On-Insulator) wafer and packaged using the anodic bonding, has a large wafer bowing caused by thermal expansion mismatch as well as non-uniform surfaces of the structures caused by the notching effect. These effects result in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) technology. It uses a silicon wafer and two glass wafers to minimize the wafer bowing and a metallic membrane to avoid the notching. In the packaged SiOG gyroscope, the notching effect is eliminated and the warpage of the wafer is greatly reduced. Consequently the frequency difference is more uniformly distributed and its variation is greatly improved. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.1
• /
• pp.89-97
• /
• 2001

A microgyroscope, which vibrates in two orthogonal axes on the substrate plane, is designed and fabricated. The shuttle mass of the vibrating gyroscope consists of two parts. The one is outer shuttle mass which vibrates in driving mode guided by four folded springs attached to anchors. And the other is inner shuttle mass which vibrates in driving mode as the outer frame does and also can vibrate in sensing mode guided by four folded springs attached to the outer shuttle mass. Due to the directions of vibrating mode, it is possible to fabricate the gyroscope with simplified process by using polysilicon on insulator structure. Fabrication processes of the microgyroscope are composed of anisotropic silicon etching by RIE, gas-phase etching (GPE) of the buried sacrificial oxide layer, metal electrode formation. An eletromechanical model of the vibrating microgyroscope was modeled and bandwidth characteristics of the gyroscope operates at DC 4V and AC 0.1V in a vacuum chamber of 100mtorr. The detection circuit consists of a discrete sense amplifier and a noise canceling circuit. Using the evaluated electromechanical model, an operating condition for high performance of the gyroscope is obtained.

• Journal of Institute of Control, Robotics and Systems
• /
• v.18 no.7
• /
• pp.632-637
• /
• 2012

This paper introduces a simple and efficient calibration method for three-axis accelerometers and three-axis gyroscopes using three-axis motion rate table. Usually, the performance of low cost MEMS-based inertial sensors is affected by scale and bias errors significantly. The calibration of these errors is a bothersome problem, but the previous calibration methods cannot propose simple and efficient method to calibrate the errors of three-axis inertial sensors. This paper introduces a new simple and efficient method for the calibration of accelerometer and gyroscope. By using a three-axis motion rate table, this method can calibrate the accelerometer and gyroscope simultaneously and simply. Experimental results confirm the performance of the proposed method.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.40 no.1
• /
• pp.86-92
• /
• 2012

The well-used actuators for the attitude control of spacecrafts are thruster, reaction wheel, control moment gyroscope, and magnetic torquer. Among them, the control moment gyroscope(CMG) which generates the torque based on the gyroscopic principle in physics, has an advantage of the high torque output compared to the low power consumption. This paper introduces an outline of CMG hardware technology, its application history in spacecrafts, and their associated hardware characteristics. Moreover, its spin-off cases to the other industrial fields such as ship, robotics, and MEMS including their research trend are provided.

• Journal of Sensor Science and Technology
• /
• v.25 no.2
• /
• pp.79-85
• /
• 2016

This paper proposes a threshold-based fall recognition algorithm to discriminate between falls and activities of daily living (ADL) using a tri-axial accelerometer and a bi-axial gyroscope sensor mounted on the upper sternum. The experiment was executed ten times according to the proposed experimental protocol. The output signals of the tri-axial accelerometer and the bi-axial gyroscope were measured during eight falls and eleven ADL action sequences. The threshold values of the signal vector magnitude (SVM_Acc), angular velocity (${\omega}_{res}$), and angular variation (${\theta}_{res}$) parameter were calculated using MATLAB. From the preliminary study, three thresholds (TH1, TH2, and TH3) were set so that the falls could be distinguished from ADL. When the parameter SVM_Acc is greater than 2.5 g (TH1), ${\omega}_{res}$ is greater than 1.75 rad/s (TH2), and ${\theta}_{res}$ is greater than 0.385 rad (TH3), these action sequences are recognized as falls. If at least one or more of these conditions is not satisfied, the sequence is classified as ADL.

• International Journal of Aeronautical and Space Sciences
• /
• v.14 no.4
• /
• pp.379-386
• /
• 2013

The hemispherical resonator gyroscope is a type of vibratory gyroscope, which can measure angle or angular rate, based on its operating mode. This paper deals with the case when the hemispherical resonator gyroscope is operated in angle measurement mode. In angle measurement mode, the resonator pattern angle precesses, with respect to the external rotation input, by the principle of the Coriolis effect, so that the external rotation can be estimated, by measuring the amount of precession angle. However, this pattern angle drifts, due to the manufacturing error of the resonator. Since the drift effect causes degradation of the angle estimation performance of the resonator, the corresponding drift compensation control should be performed, to enhance the estimation performance. In this paper, a mathematical model of the hemispherical resonator gyro is first introduced. By using the mathematical model, a nonlinear observer for imperfection parameter estimation, and the corresponding compensation controller are designed to operate hemispherical resonator gyros, as angle measurement sensors.

• Journal of Space Technology and Applications
• /
• v.4 no.1
• /
• pp.12-26
• /
• 2024

Attitude control of a satellite is very important to ensure proper for mission performance. Satellites launched in the past had simple missions. However, recently, with the advancement of technology, the tasks to be performed have become more complex. One example relies on a new technology that allows satellites quickly alter their attitude while orbiting in space. Currently, one of the most widely used technologies for satellite attitude control is the reaction wheel. However, the amount of torque generated by reaction wheels is too low to facilitate quick maneuvers by the satellite. One way to overcome this is to implement posture control logic using a control moment gyroscope (CMG). Various types of CMGs have been applied to space systems, and CMGs are currently mounted on large-scale satellites. However, although technological advancements have continued, the market for CMGs applicable to, small satellites remains in its early stages. An ultra-small CMG was developed for use with small satellites weighing less than 200 kg. The ultra-small CMG measured its target performance outcomes using a precision torque-measuring device. The target performance of the CMG, at 800 mNm, was set through an analysis. The final torque of the CMG produced through the design after the analysis was 821mNm, meaning that a target tolerance level of 10% was achieved.

• Journal of the Semiconductor & Display Technology
• /
• v.21 no.4
• /
• pp.132-137
• /
• 2022

In this paper, we have studied the quadrature error reduction for the single drive 3-axis MEMS Gyroscope. There was a limitation of the previous study which is the z-axis quadrature error was large. To reduce this value, design methodologies were presented. And the methodologies included a different mesh application, z-rate spring structure change, and mass compensation for balancing of the structure. We conducted the modal analysis, drive mode analysis and sense mode analysis using COMSOL Multiphysics. As a result, a drive resonant frequency was 26003 Hz, with the x-sense, y-sense, z-sense being 26749 Hz, 26858 Hz, 26920 Hz, respectively. And the Mechanical sensitivity was computed at 2000 degrees per second(dps) input angular rate while the sensitivity for roll, pitch, and yaw was computed 0.011, 0.012, and 0.011 nm/dps respectively. And z-axis quadrature error was successfully improved, 2.78 nm to 0.95 nm, which the improvement rate was about 66 %.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1547-1552
• /
• 2003

In this paper, we present a planar single-crystalline silicon x-axis micro-gyroscope fabricated with a perfectly aligned vertical actuation combs on one silicon wafer, using the extended SBM technology. The fabricated x-axis micro-gyroscope has the resolution of 0.1 deg/sec, the bandwidth of 100 Hz. These research results allow integrating 6 axes inertial measurement (3 accelerations and 3 angular rates) on the same silicon substrate using the same process for the first time.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.11 s.176
• /
• pp.165-172
• /
• 2005

In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.