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A study on Quadrature error Reduction of Design Methodology in a Single Drive 3-Axis MEMS Gyroscope  

Park, Ji Won (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education)
Din, Hussamud (Department of Mechatronics Engineering, Graduate School of Korea University of Technology and Education)
Lee, Byeung Leul (School of Mechatronics Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.21, no.4, 2022 , pp. 132-137 More about this Journal
Abstract
In this paper, we have studied the quadrature error reduction for the single drive 3-axis MEMS Gyroscope. There was a limitation of the previous study which is the z-axis quadrature error was large. To reduce this value, design methodologies were presented. And the methodologies included a different mesh application, z-rate spring structure change, and mass compensation for balancing of the structure. We conducted the modal analysis, drive mode analysis and sense mode analysis using COMSOL Multiphysics. As a result, a drive resonant frequency was 26003 Hz, with the x-sense, y-sense, z-sense being 26749 Hz, 26858 Hz, 26920 Hz, respectively. And the Mechanical sensitivity was computed at 2000 degrees per second(dps) input angular rate while the sensitivity for roll, pitch, and yaw was computed 0.011, 0.012, and 0.011 nm/dps respectively. And z-axis quadrature error was successfully improved, 2.78 nm to 0.95 nm, which the improvement rate was about 66 %.
Keywords
3-Axis MEMS Gyroscope; Quadrature error; Sensitivity; COMSOL Multiphysics; Rayleigh damping;
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