• 제어로봇시스템학회:학술대회논문집
• /
• 2002.10a
• /
• pp.39.4-39
• /
• 2002

This paper presents a design and implementation of a PID feedback control loop for micro gyroscope. The feedback control loop improves the gyroscope performance such as linearity, bandwidth, and bias stability for micro gyroscope which is basically a high-Q system and exhibits a low performance with an open loop control. The designed and implemented feed-back control loop is applied to the SNU-Bosch MEMS gyroscope to demonstrate the improvement with the feedback control loop. The bandwidth is improved to 60Hz from 25Hz of open loop control. The linearity becomes 0.5% from 1%. The bias stability is improved to 0.03 deg/sec from 0.06 deg/sec.

• Journal of Sensor Science and Technology
• /
• v.24 no.4
• /
• pp.274-279
• /
• 2015

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.14 no.8
• /
• pp.655-660
• /
• 2004

Vibration analysis for a coupled MEMS gyroscope design is presented in this paper. Slight mistuning in fabricated MEMS gyroscopes often leads to significant difference of vibration characteristics between expected and real designs. This difference frequently results in a negative effect to the MEMS gyroscope performance. As long as the coupling between excited and sensed motions exists, such difference inevitably occurs. In this paper, dimensionless parameters that govern the vibration characteristics of coupled MEMS gyroscope are identified and the effects of the parameters on the vibration characteristics are investigated.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.64 no.10
• /
• pp.1440-1447
• /
• 2015

This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles.

• Journal of the Optical Society of Korea
• /
• v.16 no.4
• /
• pp.401-408
• /
• 2012

The amplitude error of phase modulator used in closed-loop fiber optic gyroscope has occurred by the temperature dependency of the electro-optic coefficient, and also can be due to the square-wave dither signal which is generally applied for eliminating the deadzone. This error can cause bias drift and scale factor error. This paper analyzes the temperature dependency of the modulation amplitude and the relationship with the scale factor of the gyroscope, and deals with an amplitude control method. The error calculation logic considering the dither signal is implemented on the signal processing module. The result of experiments from a prototype gyroscope shows the effect of the modulation amplitude control and a considerable improvement on performances.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.57 no.3
• /
• pp.403-408
• /
• 2008

The gyroscope is the sensor for detecting the rotation in inertial reference frame and constitute the navigation system together an accelerometer. As the inertial reference equipment for attitude determination and control in the satellite, the mechanical gyroscope has been used but it bring the disturbance for mass unbalance so the disturbance give a bad influence to the observation satellite mission because the mechanical gyroscope has the rotation parts. During the launch. The mechanical gyroscope is weak in vibration, shock and has the defect of narrow operating temperature range so it need the special design in integration. Recently the low orbit observation satellite for seeking the high pointing accuracy of image camera payload accept the FOG(Fiber Optic Gyro) or RLG(Ring Laser Gyro) for the attitude determination and control. The Ring Laser Gyro makes use of the Sanac effect within a resonant ring cavity of a He-Ne laser and has more accuracy than the other gyros. It need the 1000V DC to create the He-Ne plasma in discharge tube. In this paper, the design process of the High Voltage Power Supply for RLG(Ring Laser Gyroscope) is described. The specification for High Voltage Power Supply (HVPS) is proposed. Also, The analysis of flyback converter topology is explained. The Design for the HVPS is composed of the inverter circuit, feedback control circuit, high frequency switching transformer design and voltage doubler circuit.

• Proceedings of the KIEE Conference
• /
• 2006.07c
• /
• pp.1635-1636
• /
• 2006

In this paper, a non-vacuum packaged single crystalline silicon MEMS gyroscope is designed, fabricated and tested. To reduce air damping of the gyroscope structure for non-vacuum packaging, air damping model is used and damping is minimized by analysis. The inner and outer spring length is optimized by ANSYS simulation for rigid body motion. The gyroscope is fabricated by SiOG(Silicon On Glass) process. The performance of the gyroscope is measured to evaluate the characteristic of the gyroscope. The sensitivity, non-linearity, noise density and the bias stability are measured to 9.7693 mV/deg/s, 04265 %, 2.3 mdeg/s/rtHz and 16.1014 deg/s, respectively.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.37 no.6
• /
• pp.551-555
• /
• 2009

We studied the design of fiber optic gyroscope that enables to sense high rotation by extending the limit of rotation sensibility of fiber optic interferometer. Based on the digital serrodyne modulation technique, the signal processing of fiber optic gyroscope was designed and the prototype fiber optic gyroscope showed the high rotation sensibility up to ${\pm}3000[deg/sec]$ and scale factor performance of about 150[ppm] by the experiments. Accordingly, we confirmed that the design of fiber optic gyroscope was valid for high rotation.

• Journal of Institute of Control, Robotics and Systems
• /
• v.18 no.6
• /
• pp.546-554
• /
• 2012

This paper suggests a design method of an improved phase control loop for tracking resonant frequency of solid type precision resonant gyroscope. In general, a low cost MEMS gyroscope adapts the automatic gain control loops by taking a velocity feedback configuration. This control technique for controlling the resonance amplitude shows a stable performance. But in terms of resonant frequency tracking, this technique shows an unreliable performance due to phase errors because the AGC method cannot provide an active phase control capability. For the resonance control loop design of a solid type precision resonant gyroscope, this paper presents a phase domain control loop based on linear PLL (Phase Locked Loop). In particular, phase control loop is exploited using a higher order PLL loop filter by extending the first order active PI (Proportion-Integral) filter. For the verification of the proposed loop design, a hemispherical resonant gyroscope is considered. Numerical simulation result demonstrates that the control loop shows a robust performance against initial resonant frequency gap between resonator and voltage control oscillator. Also it is verified that the designed loop achieves a stable oscillation even under the initial frequency gap condition of about 25 Hz, which amounts to about 1% of the natural frequency of a conventional resonant gyroscope.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.21 no.7
• /
• pp.1013-1020
• /
• 1997

Among various gyroscopes, the vibrating gyroscope has advantages such as compact size, mass-productivity and low cost. However this kind of gyroscope usually suffer from low linearity and low signal to noise ratio. Therefore, it is necessary to study on vibrating gyroscope to improve performance. In this paper, triangular cross section si selected in consideration for several points. The existing designs of exciting and sensing have some problems such that small signal size and low linearity. This paper proposes new design of exciting and sensing which is named one period exciting and the other period sensing. This design improves signal size, but it cannot improve linearity. This is because above two designs are the same open-loop type. So, another new design is proposed, which is named rebalancing, is applied to one period exciting and the other period sensing. This design are closed-loop type. It feedbacks the output signal. According to control theory, it can improve linearity. The circuits of each design are realized and used to calibration test. Calibration results show that new design of rebalancing improves linearity and signal size.