• 한국정밀공학회지
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• 제13권11호
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• pp.46-56
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• 1996

Planarization technique is rapidly recognized as a critical step in chip fabrication due to the increase in wiring density and the trend towards a three dimensional structure. Global planarity requires the preferential removal of the projecting features. Also, the several materials i.e. Si semiconductor, oxide dielectric and sluminum interconnect on the chip, should be removed simultaneously in order to produce a planar surface. This research has investihgated the development of the chemical mechanical polishing(CMP) machine with uniform pressure and velocity mechanism, and the pad insensitive to pattern topography named hard grooved(HG) pad for global planarization. Finally, a successful result of uniformity less than 5% standard deviation in residual oxide film and planarity less than 15nm in residual step height of 4 inch device wafer, is achieved.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.97-97
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• 2002

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 1997년도 특별강연 및 추계학술발표 개요집
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• pp.36-39
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• 1997

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.223-223
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• 2012

Surface engineering plays a significant role in fabricating highly functionalized materials applicable to industrial and biomedical fields. Surface wrinkles and folds formed by ion beam or plasma treatment are buckling-induced patterns and controlled formation of those patterns has recently gained considerable attention as a way of creating well-defined surface topographies for a wide range of applications. Surface wrinkles and folds can be observed when a stiff thin layer attached to a compliant substrate undergoes compression and plasma treatment is one of the techniques that can form stiff thin layers on compliant polymeric substrates, such as poly (dimethylsiloxane) (PDMS). Here, we report two effective methods using plasma modification techniques for controlling the formation of surface wrinkles and folds on flat or patterned PDMS substrates. First, we show a method of creating wrinkled diamond-like carbon (DLC) film on grooved PDMS substrates. Grooved PDMS substrates fabricated by a molding method using a grooved master prepared by photolithography and a dry etching process were treated with argon plasma and subsequently coated with DLC film, which resulted in the formation of wrinkled DLC film aligning perpendicular to the steps of the pre-patterned ridges. The wavelength and the amplitude of the wrinkled DLC film exhibited variation in the submicron- to micron-scale range according to the duration of argon plasma pre-treatment. Second, we present a method for controlled formation of folds on flat PDMS substrates treated with oxygen plasma under large compressive strains. Flat PDMS substrates were strained uniaxially and then treated with oxygen plasma, resulting in the formation of surface wrinkles at smaller strain levels, which evolved into surface folds at larger strain levels. Our results demonstrate that we can control the formation and evolution of surface folds simply by controlling the pre-strain applied to the substrates and/or the duration of oxygen plasma treatment.

• 한국가스학회:학술대회논문집
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• 한국가스학회 1997년도 추계학술발표회 논문집
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• pp.45-52
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• 1997

The objective of this study is, with concept of fitness-for-purpose, to evaluate the fracture toughness in X-grooved weld HAZ(heat-affected zone) of QLT(quenching, lamellarizing and tempering)-processed $9\%$ Ni steel, qualitatively and quantitatively, and analyze the relation with the change of microstructure. In general, CTOD test is widely used to determine the fracture toughness of steel weldments. But several problem of accuracy has been brought up. Therefore, in this study, modified CTOD test was used for X-grooved weld HAZ for $9\%$ Ni steel. Additionally, microstructure of HAZ is observed and analyzed by OM, SEM and XRD. From the resulty, HAZ toughness of QLT-$9\%$ Ni steel decreased as the evaluated region approaches the fusion line. The decreased toughness was partly caused by reduction of the retained austenite content, resulted from decreased nucleation site of the retained austenite content, resulted from decreased nucleasion site for reverse transformation due to the increasing fraction of coarse grained region. On the other hand, unexpectedly, the increasing fraction of ductile weld did not increase the HAZ toughness. Therefore, in this X-grooved weld HAZ, the primary factor affecting fracture toughness was the fraction of coarse grained region, i.e., the weakest region.

• 한국추진공학회지
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• 제14권6호
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• pp.60-68
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• 2010

본 연구에서는 팁 형상이 가스터빈 블레이드의 팁 열전달에 미치는 영향을 알아보기 위하여 선형 캐스케이드의 블레이드에 설치된 평면 팁, 스퀼러 팁, Groove 팁들에 대하여 열전달 계수가 측정되었다. 블레이드 팁에서의 열전달 계수는 색상검출방식에 기반을 둔 천이액정법을 이용하여 측정되었으며 각각의 팁 형상에 대하여 팁 간극은 블레이드 스팬의 1.5%와 2.3% 두 조건에서 실험을 수행하였다. 캐스케이드 출구 속도와 블레이드 코드길이에 기초를 둔 Reynolds 수는 $2.48{\times}10^5$ 이다. Groove 팁 표면에서의 열전달 계수는 평면 팁보다 낮게 측정되었으며, 특히 흡입면을 따라 경사진 홈이 파인 팁에서는 스퀼러 팁보다 낮은 열전달 계수가 측정되었다.

• 해양환경안전학회:학술대회논문집
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• 해양환경안전학회 2005년도 추계학술대회지
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• pp.159-163
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• 2005

채널 내부의 비정상 흐름을 규명하기 위하여 실제 사용 중인 판형 열교환기 모델을 대상으로 가시화 실험과 입자영상유속계(PIV)를 사용한 계측을 수행하였다. 실험은 기복을 가지고 있는 채널의 높이와 내부유동의 부분 평균속도벡터에 따른 7가지 종류의 레이놀즈수를 적용하였고, 순간속도벡터분포와 유동특성을 고찰하였다. 실험에서 삼각형상 그루브 채널은 하부 채널과 채널 흐름에 의해서 받고 있는 전단응력의 그루브 흐름과의 관계에서 복합적인 흐름의 형태로 나타났다. 삼각형상 그루브와 채널 사이의 경계인 전단혼합층은 채널에서 난류강도가 상승하는 주흐름에 영향을 미쳤다.

• Animal cells and systems
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• 제13권1호
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• pp.59-69
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• 2009

This paper documents the defining morphological characteristics of the larval stages of Chionoecetes tanneri Rathbun, 1893, the grooved Tanner crab, from specimens reared in the laboratory. Chionoecetes tanneri larval stages include two zoeae and one megalopa. The first zoea is characterized by: six setae on the posterior margin of the carapace; postero-lateral spines on abdominal somites 3 and 4, extending beyond the posterior margin of adjacent somites and bearing 9-10 spinnules; 12 plumose setae and one stout distal plumose seta present on the margin of the scaphognathite of the maxilla; and one fused lateral spine and one articulated dorso-medial spine on each fork of the telson. The second zoea is characterized by: 9 setae on the postero-lateral margin of the carapace; a serrated mandible molar; a mandibular palp bud; 25-26 plumose setae on the margin of the scaphognathite of the maxilla; pereiopods with well-developed gills and buds; and four pairs of stout setae on the posterior margin of the telson. For the megalopal stage, the distinguishing characteristics include: a rostral spine equal in length to the supraorbital spine; six setae on the exopod of the uropod; and a single spine on the ischium of the second pereiopod. This study allows C. tanneri larvae to be distinguished from the larvae of known sympatric congeners. This information provides a basic taxonomic tool for researchers in fisheries management and zooplankton ecology who are addressing issues related to trophic interactions, metapopulation dynamics and ecosystem impacts in the evolving marine resource management strategies in the North Pacific, and those related to Chionoecetes species in particular.

• 대한치과보철학회지
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• 제36권6호
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• pp.846-857
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• 1998

The purpose of this study was to compare the fitness of the IPS Empress ceramic crowns according to margin type such as bevel, shoulder, rounded shoulder, shoulder with bevel, rounded shoulder with bevel and grooved bevel. After 10 experimental dies were constructed for each group, the IPS Empress ceramic crowns were fabricated on the dies, cemented with resin cement(Bistite resin cement, Tokuyama Soda Co. Ltd., Japan) and embeded in clear epoxy resin. Each specimen was sectioned with a low speed diamond saw in both the faciopalatal and the mesiodistal direction. The cement film thickness was measured with a measuring microscope. The obtained results were as follows : 1. The fitness at the external margin was good in the following order: rounded shoulder(28.99), shoulder with bevel(31.33), grooved bevel(31.79), rounded shoulder with bevel(34.65), bevel(35.02) and shoulder(35.08). However there is no significant statistical difference. 2. The fitness at the internal margin of bevel(25.75), rounded shoulder(31.24), shoulder with bevel(32.07) and rounded shoulder with bevel(34.45) was better than that of shoulder(47.98). 3. The fitness at the axial surface of bevel(26.58) was better than that of shoulder(49.59). 4. The fitness at the central fossa was good in the following order: shoulder with bevel(38.88), grooved bevel(40.46) rounded shoulder with shoulder(46.29), shoulder(48.91), bevel(49.47) and rounded bevel(52.07). However there is no significant statistical difference. 5. Overall fitness of bevel(29.71), rounded shoulder(32.49) and shoulder with bevel(34.47) was better than that of shoulder(44.73).

• 한국콘텐츠학회논문지
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• 제11권5호
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• pp.260-269
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• 2011

본 연구는 감각처리능력에 문제를 갖는 지적장애 아동에게 감각통합활동의 자발적 수행능력을 동영상을 통해 증진시키고자 하였다. 이 연구는 4명의 지적장애아동을 대상으로 개별실험 연구방법 중 A-B-A 디자인이 사용되었다. 독립변인은 아동이 4개의 감각통합활동을 8분간 자발적으로 수행하는 장면의 동영상을 주 2회 시청하도록 하였다. 종속변인은 1)감각통합활동의 자발성과 과제 수행율, 2) 일반적 과제 (grooved pegboard) 수행시간이었다. 동영상을 통해 자발성 부족으로 감각통합활동을 스스로 수행하지 않았던 지적장애 아동의 자발성과 과제 수행율이 향상되었고, 동영상 중재방법이 지적장애 아동의 교육에 효과적임을 확인할 수 있었다. 앞으로는 다양한 질환의 아동에게 동영상을 치료에 적용하여 그 효과에 대한 연구들이 지속적으로 이루어지길 기대해본다.